Patent US5028967A successfully refreshed from Google Patents.
US5028967A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Achromatic lens for ultraviolet rays
Assignee: Tosoh Corp
•
Filing: 1990-03-16
•
Granted: 1991-07-02
•
Expires: 2010-03-16
Abstract
Abstract An achromatic lens for ultraviolet rays constituted by (A) high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (B) silica glass containing germanium dioxide or silica glass containing germanium dioxide and boron oxide.
Inventors
- 👤 Nobusuke Yamada
- 👤 Koji Tsukuma
- 👤 Tetsuo Fujii
- 👤 Hideaki Segawa
- 👤 Shinichi Kondo
- 👤 Keishi Honta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:52
CPC Classifications
C; C03; C03C; C03C3/00; C03C3/04; C03C3/076; C03C3/06; C03C3/089; G; G02; G02B; G02B1/00; G02B13/00; G02B13/14; G02B13/143; C03C2201/00; C03C2201/06; C03C2201/08; C03C2201/10; C03C2201/12; C03C2201/30; C03C2201/31
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
53 words
An achromatic lens system for ultraviolet rays constituted by: (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide.
Claim 2
Dependent Claim
53 words
An achromatic lens system for ultraviolet rays constituted by: (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide.
Claim 3
Dependent Claim
29 words
The achromatic lens system for ultraviolet rays according to claim 1, wherein said silica glass of said second lens (b) contains 50 mol % or less of germanium dioxide.
Claim 4
Dependent Claim
27 words
The achromatic lens system for ultraviolet rays according to claim 1, wherein said silica glass of said second lens (b) contains 5-14 mol % of germanium dioxide.
Claim 5
Dependent Claim
24 words
The achromatic lens system according to claim 1, wherein said first lens is a convex lens, and said second lens is a concave lens.
Claim 6
Dependent Claim
56 words
An achromatic lens system for ultraviolet rays constituted by: (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide and boron oxide.
Claim 7
Dependent Claim
56 words
An achromatic lens system for ultraviolet rays constituted by: (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide and boron oxide.
Claim 8
Dependent Claim
34 words
The achromatic lens system for ultraviolet rays according to claim 5, wherein said silica glass of said second lens (b) contains 1-30 mol % of germanium dioxide and 5-30 mol % of boron oxide.
Claim 9
Dependent Claim
34 words
The achromatic lens system for ultraviolet rays according to claim 5, wherein said silica glass of said second lens (b) contains 10-15 mol % of germanium dioxide and 7-14 mol % of boron oxide.
Claim 10
Dependent Claim
24 words
The achromatic lens system according to claim 5, wherein said first lens is a convex lens, and said second lens is a concave lens.
Claim 11
Dependent Claim
83 words
An excimer laser reduction projection aligner having in its optical system an achromatic lens system for ultraviolet rays showing high transmittance of ultraviolet rays having a wavelength of 300 nm or less, said achromatic lens system being constituted by (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide.
Claim 12
Dependent Claim
83 words
An excimer laser reduction projection aligner having in its optical system an achromatic lens system for ultraviolet rays showing high transmittance of ultraviolet rays having a wavelength of 300 nm or less, said achromatic lens system being constituted by (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, or fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide.
Claim 13
Dependent Claim
26 words
The excimer laser reduction projection aligner according to claim 9, wherein said first lens is a convex lens, and said second lens is a concave lens.
Claim 14
Dependent Claim
85 words
An excimer laser reduction projection aligner having in its optical system an achromatic lens system for ultraviolet rays showing high transmittance of ultraviolet rays having a wavelength of 300 nm or less, said achromatic lens system being constituted by (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide and boron oxide.
Claim 15
Dependent Claim
85 words
An excimer laser reduction projection aligner having in its optical system an achromatic lens system for ultraviolet rays showing high transmittance of ultraviolet rays having a wavelength of 300 nm or less, said achromatic lens system being constituted by (a) at least one first lens made of high-purity silica glass having a purity of 99.9% or more, fluorine-containing, high-purity silica glass having a purity of 99.9% or more; and (b) at least one second lens made of silica glass containing germanium dioxide and boron oxide.
Claim 16
Dependent Claim
26 words
The excimer laser reduction projection aligner according to claim 11, wherein said first lens is a convex lens, and said second lens is a concave lens.
References Cited (Backward Citations)
US3517979A
Cited
SU458798A1
Cited
US4050778A
Cited
US4494819A
Cited
US4461546A
Cited
US4871219A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-01 | 1994-12-31 | 1995-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-01 | 1998-12-31 | 1999-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-01 | 2002-12-31 | 2003-07-02 | $7700.00 | Window Closed / Lapsed |