US5028584A
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Process and apparatus for producing epitaxial and/or highly textured grown film, free of foreign phases, of a high-Tc -oxide superconductor on a substrate
Assignee: Karlsruher Institut für Technologie
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Filing: 1989-09-15
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Granted: 1991-07-02
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Expires: 2009-09-15
Abstract
Abstract A process for producing an epitaxial and/or highly texturized grown film, free of foreign phases, of a high-T c -oxide superconductor on a substrate, in which an ablation process is triggered and maintained on a spender target by means of pulsed particles or a laser beams, and the thus developing small droplets are deposited on a heated substrate. The substrate is held at a temperature at which the droplets on impact wet the substrate and coagulate into a uniform smooth film. An apparatus for this process comprises an electron source which produces a pulsed electron beam with an electron energy of about 10 to 20 keV and a current density in the range of 10 3 to 10 4 A/cm 2 .
Inventors
- 👤 Christoph Schultheiss
- 👤 Jochen Geerk
- 👤 Hans Karow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:05
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30; C23C26/00; C23C26/02; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/225; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
101 words
Process for producing an epitaxial and/or a highly textured grown film, free of foreign phases, of a high-T c -oxide superconductor on a substrate, in which a spender target made of superconductor material is subjected to a pulsed electron beam to generate an ablation process to produce small droplets which are deposited onto a heated substrate, comprising: adjusting the energy of the pulsed electron beam to an energy which forms droplets of the spender target and holding the substrate at a temperature at which the droplets wet the substrate on impact and coagulate into a uniform, smooth, epitaxial and superconducting film.
Claim 2
Dependent Claim
101 words
Process for producing an epitaxial and/or a highly textured grown film, free of foreign phases, of a high-T c -oxide superconductor on a substrate, in which a spender target made of superconductor material is subjected to a pulsed electron beam to generate an ablation process to produce small droplets which are deposited onto a heated substrate, comprising: adjusting the energy of the pulsed electron beam to an energy which forms droplets of the spender target and holding the substrate at a temperature at which the droplets wet the substrate on impact and coagulate into a uniform, smooth, epitaxial and superconducting film.
Claim 3
Dependent Claim
30 words
Process according to claim 1, wherein the substrate temperature is held to a temperature about 300° to 400 ° C. below the melting temperature of the high-T c -oxide superconductor.
Claim 4
Dependent Claim
25 words
Process according to claim 1, and further comprising producing an oxidation resistant intermediate coating on the substrate before forming the high-T c -oxide superconductor film.
Claim 5
Dependent Claim
23 words
Process according to claim 3, wherein, the intermediate coating is comprised of ZrO 2 , Al 2 O 3 or SiTiO 3 .
Claim 6
Dependent Claim
48 words
Process according to claim 1, wherein the ablation process is generated and maintained by subjecting the spender target to a pulsed electron beam with an electron energy of about 10 to 20 keV and a current density of about 10 3 to about 10 4 A/cm 2 .
Claim 7
Dependent Claim
95 words
Apparatus for producing an epitaxial and/or a highly textured grown film, free of foreign phases, of a high T c -oxide superconductor on a substrate in which a spender target made of a superconductor is subjected to an energy source to produce small droplets of the spender target, which droplets are deposited onto a heated substrate, the improvement wherein the energy source is an electron source for producing a pulsed electron beam with an electron energy of about 10 to 20 Kev and a current density of 10 3 to 10 4 A/cm 2 .
Claim 8
Dependent Claim
95 words
Apparatus for producing an epitaxial and/or a highly textured grown film, free of foreign phases, of a high T c -oxide superconductor on a substrate in which a spender target made of a superconductor is subjected to an energy source to produce small droplets of the spender target, which droplets are deposited onto a heated substrate, the improvement wherein the energy source is an electron source for producing a pulsed electron beam with an electron energy of about 10 to 20 Kev and a current density of 10 3 to 10 4 A/cm 2 .
Claim 9
Dependent Claim
31 words
Apparatus according to claim 6, and further comprising an insulating sleeve, which has one end connected to the electron source and which has a free end positioned near the spender target.
Claim 10
Dependent Claim
24 words
Apparatus according to claim 7, wherein the distance of the free end of the sleeve from the spender target is 1 to 5 centimeters.
Claim 11
Dependent Claim
25 words
Apparatus according to claim 7, wherein the inside diameter of the sleeve is in the same size magnitude as the diameter of the electron beam.
Claim 12
Dependent Claim
22 words
Apparatus according to claim 7, wherein the sleeve is a straight tube of a length of 0.5 cm up to 100 cm.
Claim 13
Dependent Claim
31 words
Apparatus according to claim 7, wherein the sleeve is bent with a radius down to 2 cm whereby a deflection angle of the electron beam up to 90 degrees is achieved.
Claim 14
Dependent Claim
60 words
Apparatus according to claim 7, wherein the spender target is a ring shaped spender target,. and the apparatus comprises several parallel arranged electron sources, with each electron source having an insulating sleeve connected to it, with each sleeve having a bent shape and pointing with its free end to the ring-shaped spender target which can be rotated around its axis.
Claim 15
Dependent Claim
18 words
Apparatus according to claim 12, wherein a wire-shaped substrate is led by or through the ring-shaped spender target.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-01 | 1994-12-31 | 1995-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-01 | 1998-12-31 | 1999-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-01 | 2002-12-31 | 2003-07-02 | $7700.00 | Window Closed / Lapsed |