US5024916A
Expired / Lapsed
US
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Organometal-containing polymers and use thereof in a photosensitive composition with photoacid generators
Assignee: Novartis Corp
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Filing: 1990-09-24
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Granted: 1991-06-18
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Expires: 2010-09-24
Abstract
Abstract Organometal-containing polymers having side chains of the formula I ##STR1## in which, for example, M is Si, X is O, R 1 and R 2 are hydrogen and R 4 to R 6 are each methyl and which have an average molecular weight between 1,000 and 1,000,000, are suitable for the preparation of dry-developable photoresists, such as are required for the generation of structured images, in particular in microelectronics.
Inventors
- 👤 Alfred Steinmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:05
CPC Classifications
G; G03; G03C; G03C1/00; G03C1/72; C; C08; C08F; C08F30/00; C08F30/04; C07; C07F; C07F7/00; C07F7/02; C07F7/08; C07F7/0803; C07F7/081; C07F7/0812; C08F8/00; C08F8/42; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/075; G03F7/0757; G03F7/0758; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/115
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
150 words
A composition comprising (a) a polymer having groupings of the formula I ##STR30## in which R 1 to R 6 independently of one another are C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, benzyl, phenoxy, a group --M(R 8 ) 3 or ##STR31## or R 3 and R 4 together are ##STR32## and R 1 to R 3 in addition are hydrogen, R 8 is C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, benzyl or phenoxy, M is Si, Ge, Sn, CH 2 Si or OSi and X is O, S or NR', where R' is hydrogen or a single bond, b is a whole number from 1 to 6 and c is a whole number from 3 to 6, wherein the polymer has an average molecular weight between 1,000 and 1,000,000 and (b) a compound liberating an acid under the influence of radiation.
Claim 2
Dependent Claim
150 words
A composition comprising (a) a polymer having groupings of the formula I ##STR30## in which R 1 to R 6 independently of one another are C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, benzyl, phenoxy, a group --M(R 8 ) 3 or ##STR31## or R 3 and R 4 together are ##STR32## and R 1 to R 3 in addition are hydrogen, R 8 is C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, benzyl or phenoxy, M is Si, Ge, Sn, CH 2 Si or OSi and X is O, S or NR', where R' is hydrogen or a single bond, b is a whole number from 1 to 6 and c is a whole number from 3 to 6, wherein the polymer has an average molecular weight between 1,000 and 1,000,000 and (b) a compound liberating an acid under the influence of radiation.
Claim 3
Dependent Claim
16 words
A composition according to claim 1, in which M is CH 2 Si, OSi or Si.
Claim 4
Dependent Claim
13 words
A composition according to claim 1, in which X is S or O.
Claim 5
Dependent Claim
45 words
A composition according to claim 1, in which R 1 and R 2 are each hydrogen, R 3 is methyl or Si(CH 3 ) 3 and R 4 to R 6 are each methyl or in which R 3 and R 4 together are ##STR33##
Claim 6
Dependent Claim
41 words
A composition according to claim 1, in which R 1 and R 2 are each hydrogen, R 3 is methyl or Si(CH 3 ) 3 , R 4 to R 6 are each methyl, M is Si and X is O.
Claim 7
Dependent Claim
51 words
A composition according to claim 1 having repeating units of the formula II ##STR34## in which R 1 to R 6 and M are as defined in claim 1, X' is O, S or NH, R 7 is hydrogen or C 1 -C 4 alkyl and a is zero or 1.
Claim 8
Dependent Claim
18 words
A composition according to claim 6, in which a is zero and R 7 is hydrogen or methyl.
Claim 9
Dependent Claim
44 words
A composition comprising repeating units of the formula II according to claim 6, up to 50 mol %, relative to the entire copolymer, of structural units which are derived from other copolymerizable monomers and a compound liberating an acid under the influence of radiation.
Claim 10
Dependent Claim
82 words
A composition according to claim 8 containing, in addition to the structural elements of the formula II, at least one of the structural elements of the formulae III or IV ##STR35## in which R 7 is as defined in claim 6, R 9 is hydrogen, C 1 -C 4 alkyl or C 1 -C 4 alkoxy and R 10 is hydrogen, C 1 -C 4 alkyl, C 1 -C 4 alkoxy, C 1 -C 4 alkoxycarbonyl or C 1 -C 4 alkylcarbonyloxy.
Claim 11
Dependent Claim
54 words
A composition according to claim 1, in which the groupings of the formula I are bound directly or via a group of the formula V ##STR36## in which Z is O, S or NR' where R' is hydrogen or a single bond, to a polyalcohol, a polyphenol, a polythiol, a polyamine or a polyimide.
Claim 12
Dependent Claim
9 words
Substrate coated with a composition according to claim 1.
Claim 13
Dependent Claim
9 words
Substrate coated with a composition according to claim 8.
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