US5024500A
Expired / Lapsed
US
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Cantilever beam radiation deflector assembly
Assignee: IPG Photonics Corp
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Filing: 1988-03-31
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Granted: 1991-06-18
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Expires: 2008-03-31
Abstract
Abstract A micromechanical cantilever beam (1) for use in an optical switch or other radiation deflector assembly includes a beam portion (2) comprising two parallel arms (5,6) hinged at one end to a supporting substrate (4) and at the other end to a load portion (3) which provides the major proportion of the total mass of the cantilever beam. The beam is deflected by the application of an electrostatic potential between electrodes on opposing surfaces (8,9) of the load portion and the supporting substrate respectively. This structure has improved switching performance in operation.
Inventors
- 👤 Ian W. Stanley
- 👤 John N. Shepherd
- 👤 Peter S. Dobson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:12
CPC Classifications
H; H01; H01H; H01H59/00; H01H59/0009; G; G02; G02B; G02B26/00; G02B26/08; G02B6/00; G02B6/24; G02B6/26; G02B6/35; G02B6/3564; G02B6/3566; G02B6/3502; G02B6/3508; G02B6/351; G02B6/3512; G02B6/354; G02B6/3544; G02B6/3548; G02B6/355; G02B6/3568; G02B6/357
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
46 words
A radiation deflector comprising a deflectable cantilever beam wherein one end is free and the other end is integral with a supporting substrate and wherein the cantilever beam has its centre of mass closer to the free end of the beam than to the hinged end.
Claim 2
Dependent Claim
46 words
A radiation deflector comprising a deflectable cantilever beam wherein one end is free and the other end is integral with a supporting substrate and wherein the cantilever beam has its centre of mass closer to the free end of the beam than to the hinged end.
Claim 3
Dependent Claim
43 words
A radiation deflector according to claim 1 wherein the cantilever beam comprises a beam portion and a load portion at the free end of the beam portion and the load portion provides the major proportion of the total mass of the cantilever beam.
Claim 4
Dependent Claim
122 words
A radiation deflector assembly comprising: at least three radiation waveguides; a controllable radiation deflector positioned such that when the deflector is in a first position, radiation passes between one combination of two of the waveguides, and when the deflector is in a second position, radiation passes between another combination of two of the waveguides; and control means responsive to control signals for controlling the position of the deflector wherein the deflector comprises a cantilever beam having one end free and the other end integral with a supporting substrate on which are mounted waveguides and characterised in that the cantilever beam has its centre of mass closer to the free end of the beam than to the end hinged to the common substrate.
Claim 5
Dependent Claim
122 words
A radiation deflector assembly comprising: at least three radiation waveguides; a controllable radiation deflector positioned such that when the deflector is in a first position, radiation passes between one combination of two of the waveguides, and when the deflector is in a second position, radiation passes between another combination of two of the waveguides; and control means responsive to control signals for controlling the position of the deflector wherein the deflector comprises a cantilever beam having one end free and the other end integral with a supporting substrate on which are mounted waveguides and characterised in that the cantilever beam has its centre of mass closer to the free end of the beam than to the end hinged to the common substrate.
Claim 6
Dependent Claim
44 words
A radiation deflector assembly according to claim 3 wherein the cantilever beam comprises a beam portion and a load portion at the free end of the beam portion and the load portion provides the major proportion of the total mass of the cantilever beam.
Claim 7
Dependent Claim
52 words
A radiation deflector assembly according to claim 4 wherein the length of the beam portion and the mass of the load portion are selected such that the first natural resonant frequency of the cantilever beam is substantially greater than the maximum frequency at which the deflector is to be switched between positions.
Claim 8
Dependent Claim
28 words
A radiation deflector assembly according to claim 3 or claim 4 wherein the control means comprises means for applying an electrostatic potential for displacing the cantilever beam deflector.
Claim 9
Dependent Claim
38 words
A radiation deflector assembly according to claim 6 wherein the control means includes an electrode arranged such that the displacement force provided by an applied electrostatic potential effectively acts at the centre of mass of the load portion.
Claim 10
Dependent Claim
21 words
A radiation deflector assembly according to claim 3 wherein at least one of the waveguides is provided on the cantilever beam.
Claim 11
Dependent Claim
19 words
A radiation deflector assembly according to claim 8 wherein the at least waveguide runs longitudinally along the cantilever beam.
Claim 12
Dependent Claim
58 words
A radiation deflector comprising an electrostatically deflectable composite cantilever beam having at least two legs connected together in a parallelogram configuration having one end attached to a supporting substrate which provides the only support to the cantilever beam and the other end freely movable between at least two positions to switch optical signals between different optical signal waveguides.
Claim 13
Dependent Claim
58 words
A radiation deflector comprising an electrostatically deflectable composite cantilever beam having at least two legs connected together in a parallelogram configuration having one end attached to a supporting substrate which provides the only support to the cantilever beam and the other end freely movable between at least two positions to switch optical signals between different optical signal waveguides.
Claim 14
Dependent Claim
82 words
A radiation deflector comprising: an electrostatically deflectable composite cantilever beam including at least two parallel separated component legs connected together at each end wherein one end of the composite beam is attached to a supporting substrate which provides the only support to the cantilever beam and the other end of the composite beam is unsupported at all times and freely movable, and wherein said parallel legs of the composite beam remain parallel to each other during a full range of beam deflection.
Claim 15
Dependent Claim
82 words
A radiation deflector comprising: an electrostatically deflectable composite cantilever beam including at least two parallel separated component legs connected together at each end wherein one end of the composite beam is attached to a supporting substrate which provides the only support to the cantilever beam and the other end of the composite beam is unsupported at all times and freely movable, and wherein said parallel legs of the composite beam remain parallel to each other during a full range of beam deflection.
Claim 16
Dependent Claim
99 words
A radiation deflector comprising: a composite deflectable cantilever beam including a pair of parallel legs connected in a parallelogram configuration wherein one end of the composite beam is attached to a supporting substrate and the other end is freely movable and including attached opposing lateral surfaces connected to the free end of the beam which remain parallel to the substrate during deflection to different operative positions; and a control means for displacing the free end of the beam, said control means including electrodes for producing an electrostatic potential between at least one of said lateral surfaces and said substrate.
Claim 17
Dependent Claim
99 words
A radiation deflector comprising: a composite deflectable cantilever beam including a pair of parallel legs connected in a parallelogram configuration wherein one end of the composite beam is attached to a supporting substrate and the other end is freely movable and including attached opposing lateral surfaces connected to the free end of the beam which remain parallel to the substrate during deflection to different operative positions; and a control means for displacing the free end of the beam, said control means including electrodes for producing an electrostatic potential between at least one of said lateral surfaces and said substrate.
Claim 18
Dependent Claim
16 words
The radiation deflector of claim 12 wherein said composite beam carries at least one radiation waveguide.
Claim 19
Dependent Claim
51 words
The radiation deflector of claim 12 further comprising: at least three radiation waveguides, wherein when the beam is in a first position, radiation passes between one combination of two of the waveguides, and when the beam is in a second position, radiation passes between another combination of two of the waveguides.
Claim 20
Dependent Claim
14 words
The radiation deflector of claim 14 wherein the substrate contains all of the waveguides.
Claim 21
Dependent Claim
15 words
The radiation deflector of claim 14 wherein the beam contains at least one radiation waveguide.
Claim 22
Dependent Claim
90 words
A radiation deflector comprising: a deflectable composite cantilever beam having two parallel legs connected together in a parallelogram configuration with one end attached to a supporting substrate which provides the only support to the cantilever beam and the other end of the beam being freely movable; and at least three radiation waveguides, wherein when the beam is in a first position, radiation passes between one combination of two of the waveguides, and when the beam is in a second position, radiation passes between another combination of two of the waveguides.
Claim 23
Dependent Claim
90 words
A radiation deflector comprising: a deflectable composite cantilever beam having two parallel legs connected together in a parallelogram configuration with one end attached to a supporting substrate which provides the only support to the cantilever beam and the other end of the beam being freely movable; and at least three radiation waveguides, wherein when the beam is in a first position, radiation passes between one combination of two of the waveguides, and when the beam is in a second position, radiation passes between another combination of two of the waveguides.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-17 | 1994-12-17 | 1995-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-17 | 1998-12-17 | 1999-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-17 | 2002-12-17 | 2003-06-18 | $7700.00 | Window Closed / Lapsed |