US4871244A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Movable member mounting
Assignee: British Telecommunications PLC
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Filing: 1986-10-16
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Granted: 1989-10-03
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Expires: 2006-10-16
Abstract
Abstract The mounting of a movable member such as an optical mirror (3) by bridges (4-7) between a pair of supports (1, 2). The support (1, 2) bridges (4-7) and mirror (3) are integrally formed from a silicon substrate. A pair of electrically conductive paths (8, 9) are formed by doping or metallizing portions of the assembly so that by passing controlled currents through the paths, thermal expansion of parts of the paths will cause deflection of the mirror (3). The assembly is particularly useful for deflecting optical beams.
Inventors
- 👤 Ian W. Stanley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:41
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/14; H01S5/141; G; G01; G01D; G01D5/00; G01D5/26; G01D5/266; G01J; G01J3/00; G01J3/12; G01J3/26; G02; G02B; G02B26/00; G02B26/001; G02B6/00; G02B6/24; G02B6/26; G02B6/28; G02B6/2804; G02B6/2817; G02B6/32; G02B6/36; G02B6/38; G02B6/3801; G02B6/3803; G02B6/42; G02B6/4201; G02B6/4219; G02B6/4228; G02B6/423; G02B6/293; G02B6/29346; G02B6/29358; G02B6/35; G02B6/351; G02B6/3512; G02B6/3516; G02B6/3564; G02B6/3568; G02B6/357; H01S3/00; H01S3/10; H01S3/105; H01S3/1055; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
90 words
An assembly of: at least two supports and a movable member mounted by respective connecting members between the supports, the electrical conductivity of the assembly being such that at least one electrically conductive path extends from a support to the movable member and thereafter to a support, the resistivity of the path being such that the passage of a working current along the path causes thermal expansion of at least one of the connecting members and the movable member thereby causing movement of the movable member relatively to the supports.
Claim 2
Dependent Claim
90 words
An assembly of: at least two supports and a movable member mounted by respective connecting members between the supports, the electrical conductivity of the assembly being such that at least one electrically conductive path extends from a support to the movable member and thereafter to a support, the resistivity of the path being such that the passage of a working current along the path causes thermal expansion of at least one of the connecting members and the movable member thereby causing movement of the movable member relatively to the supports.
Claim 3
Dependent Claim
21 words
An assembly according to claim 1, wherein the movable member is mounted to each support by a pair of connecting members.
Claim 4
Dependent Claim
14 words
An assembly according to claim 2, wherein all the connecting members are electrically conductive.
Claim 5
Dependent Claim
30 words
An assembly according to any of the preceding claims, wherein part of at least one of the electrical paths is defined by an electrically conductive portion of the movable member.
Claim 6
Dependent Claim
27 words
An assembly according to claim 4, wherein an electrically conductive part of the movable member has a higher resistivity than the remainder of the electrically conductive path.
Claim 7
Dependent Claim
37 words
An assembly according to any of the preceding claims 1, 2 or 3, wherein the resistivity of a connecting member forming part of an electrically conductive path is higher than the remainder of the electrically conductive path.
Claim 8
Dependent Claim
19 words
An assembly according to claim 2, wherein two electrical paths are defined between the supports across the movable member.
Claim 9
Dependent Claim
21 words
An assembly according to claim 6, wherein four electrical paths are provided, each associated with a respective pair of connecting members.
Claim 10
Dependent Claim
37 words
An assembly according to any of the preceding claims 1, 2, or 3, further comprising at least one current source; and control means for controlling the flow of current from each current source through each electrical path.
Claim 11
Dependent Claim
26 words
An assembly according to any of the preceding claims 1, 2 or 3, wherein the supports, connecting members, and the movable member are all integrally formed.
Claim 12
Dependent Claim
33 words
An assembly according to any of the preceding claims 1, 2, or 3, wherein those parts of the support, connecting members, and movable member which define each electrical path are doped or metallised.
Claim 13
Dependent Claim
18 words
An assembly according to any of the preceding claims 1, 2, or 3 which is made from silicon.
Claim 14
Dependent Claim
21 words
An assembly according to any of the preceding claims 1, 2 or 3, wherein the movable member comprises an optical mirror.
Claim 15
Dependent Claim
94 words
A unitary, integral, structure including an optical component mounted for controlled movements therewithin, said structure comprising: an optical component mounted to said substrate by at least one electrically conductive bridge member integral with said substrate; said bridge member having sufficient resistivity to cause its controlled thermal expansion upon the passage of correspondingly controlled electrical current therethrough; and said at least one bridge member being disposed between the substrate and optical component so as to cause controlled relative movement of said optical component with respect to said substrate in response to said controlled thermal expansion.
Claim 16
Dependent Claim
94 words
A unitary, integral, structure including an optical component mounted for controlled movements therewithin, said structure comprising: an optical component mounted to said substrate by at least one electrically conductive bridge member integral with said substrate; said bridge member having sufficient resistivity to cause its controlled thermal expansion upon the passage of correspondingly controlled electrical current therethrough; and said at least one bridge member being disposed between the substrate and optical component so as to cause controlled relative movement of said optical component with respect to said substrate in response to said controlled thermal expansion.
Claim 17
Dependent Claim
62 words
A structure as in claim claim 14 wherein: said substrate, said optical component and said at least one bridge member are formed from an integral silicon crystal having selectively doped portions to define at least one electrically conductive path having said sufficient resistivity and passing through selected portions of said substrate, said optical signal component and said at least one bridge member.
Claim 18
Dependent Claim
37 words
A structure as in claim 15 including four of said bridge members, one disposed near each corner of a rectilinearly shaped said optical component which is thereby supported between at least two opposing walls of said substrate.
Claim 19
Dependent Claim
17 words
A structure as in claim 16 wherein said bridge members all are oriented parallel to one another.
Claim 20
Dependent Claim
17 words
A structure as in claim 17 wherein pairs of said parallel bridge members are also co-linearly oriented.
Claim 21
Dependent Claim
15 words
A structure as in claim 14 or 15 wherein said optical component comprises a mirror.
Claim 22
Dependent Claim
16 words
A structure as in claim 14 or 15 wherein said optical component comprises a diffraction grating.
Claim 23
Dependent Claim
14 words
A structure as in claim 14 wherein said optical component comprises a laser diode.
Claim 24
Dependent Claim
18 words
A structure as in claim 14 or 15 wherein said relative movement comprises rotation about a predetermined axis.
Claim 25
Dependent Claim
20 words
A structure as in claim 14 or 15 wherein said relative movement comprises translational piston-like motion of the optical component.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |