US5021919A
Expired / Lapsed
US
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Device for the generation of electrically charged and/or uncharged particles
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1989-10-12
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Granted: 1991-06-04
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Expires: 2009-10-12
Abstract
Abstract The invention relates to a device for the generation of electrically charged and/or uncharged particles in which into a cavity resonator (5) filled with a gas or gas mixture electromagnetic energy is introduced and in which a first magnetic field (19, 20) permeates the gas or gas mixture. With the aid of a second magnetic field (H ext , 40, 41) permeating the gyromagnetic material the cavity resonator (5) is tuned. Usually, the tuning is carried out in such a manner that a hollow space resonator (5) which is loaded and mistuned by the plasma is again brought into resonance.
Inventors
- 👤 Jurgen Engemann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:04
CPC Classifications
H; H05; H05H; H05H7/00; H05H7/14; H05H7/18; H01; H01J; H01J27/00; H01J27/02; H01J27/16; H01J27/18; H05H3/00
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
60 words
A device for generation of electrically charged or uncharged particles comprising: a hollow space resonator; means to introduce electromagnetic energy into said hollow space resonator; means to generate a first magnetic field to permeate a gas or gas mixture in said hollow space resonator; and means to generate a second magnetic field for resonance tuning of said hollow space resonator.
Claim 2
Independent Claim
60 words
A device for generation of electrically charged or uncharged particles comprising: a hollow space resonator; means to introduce electromagnetic energy into said hollow space resonator; means to generate a first magnetic field to permeate a gas or gas mixture in said hollow space resonator; and means to generate a second magnetic field for resonance tuning of said hollow space resonator.
Claim 3
Dependent Claim
35 words
A device as stated in claim 1, wherein the hollow space resonator comprises a resonant cavity in which is located at least one object of gyromagnetic material which is permeated by the second magnetic field.
Claim 4
Dependent Claim
43 words
A device as in claim 1 wherein the means to generate a second magnetic field comprises an electromagnet having a coil disposed in a magnetically conducting part, said magnetically conducting part having a slot in which is located an object of gyromagnetic material.
Claim 5
Dependent Claim
49 words
A device as in claim 1, wherein said hollow space resonator comprises a resonant cavity and a glass vessel for the reception of the charged or uncharged particles, said glass vessel having a closed upper side and a depression for receiving said means to generate a first magnetic field.
Claim 6
Dependent Claim
44 words
A device as in claim 4, wherein the glass vessel is surrounded by the resonant cavity and the resonant cavity substantially conforms to the contours of the glass vessel providing a free space solely in an area into which the electromagnetic energy is fed.
Claim 7
Dependent Claim
25 words
A device as in claim 5, further comprising a gyromagnetic material on an upper side of the free space facing away from the glass vessel.
Claim 8
Dependent Claim
64 words
A device as in claim 6, wherein: the glass vessel and the resonant cavity are cylindrically symmetric, the gyromagnetic material has the form of a circular ring disposed on the upper side of the free space, and the circular ring of gyromagnetic material lies in a recess of a soft iron core which is acted upon by the field of a permanent or electromagnet.
Claim 9
Dependent Claim
51 words
A device as in claim 4, wherein the generator of the first magnetic field comprises an electromagnet having a coil wound about a perpendicular shank of a T-shaped soft iron core, wherein the transversely extending portion of the core extends parallel to a floor of the depression of the glass vessel.
Claim 10
Dependent Claim
20 words
A device as in claim 4, wherein the glass vessel is closed with an extraction grid on its under side.
Claim 11
Dependent Claim
41 words
A device as in claim 5, wherein the resonant cavity has a diameter D and a height A, and the depression of the resonant cavity has a diameter d and a height a, and the approximate condition A=2a or D=2d applies.
Claim 12
Dependent Claim
20 words
A device as in claim 2, wherein the resonant cavity has a gap for the coupling-in of the electromagnetic energy.
Claim 13
Dependent Claim
76 words
A device as in claim 1, wherein said means to generate a second magnetic field comprises means for detection of the resonance condition, a coil and a gyromagnetic material, wherein in the absence of resonance the detection means influences the current flow through said coil in such manner that the magnetic field generated by this current flow permeates said gyromagnetic material such that the gyromagnetic material changes its magnetic properties and again restores the resonance condition.
Claim 14
Dependent Claim
60 words
In a device for generating electrically charged or uncharged particles comprising an electron cyclotron resonator, the improvement comprising: means to generate a magnetic field for resonance tuning of said electron cyclotron resonator, wherein said means to generate a magnetic field for resonance tuning comprises at least one object of gyromagnetic material located in a cavity of said electron cyclotron resonator.
Claim 15
Dependent Claim
60 words
In a device for generating electrically charged or uncharged particles comprising an electron cyclotron resonator, the improvement comprising: means to generate a magnetic field for resonance tuning of said electron cyclotron resonator, wherein said means to generate a magnetic field for resonance tuning comprises at least one object of gyromagnetic material located in a cavity of said electron cyclotron resonator.
Claim 16
Independent Claim
49 words
A method of generating electrically charged or uncharged particles comprising the steps of: introducing electromagnetic energy into a cavity resonator; generating a first magnetic field to permeate a gas or gas mixture in said resonator to produce electron cyclotron resonance; and magnetically tuning the resonance of said cavity resonator.
Claim 17
Independent Claim
49 words
A method of generating electrically charged or uncharged particles comprising the steps of: introducing electromagnetic energy into a cavity resonator; generating a first magnetic field to permeate a gas or gas mixture in said resonator to produce electron cyclotron resonance; and magnetically tuning the resonance of said cavity resonator.
Claim 18
Dependent Claim
27 words
A method of generating electrically charged or uncharged particles as in claim 14, wherein the magnetic tuning step comprise the step of: generating a second magnetic field.
Claim 19
Dependent Claim
42 words
A method of generating electrically charged or uncharged particles as in claim 15, wherein the magnetic tuning step further comprise the step of: passing said second magnetic field through at least one object formed of gyromagnetic material located inside said cavity resonator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-03 | 1994-12-03 | 1995-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-03 | 1998-12-03 | 1999-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-03 | 2002-12-03 | 2003-06-04 | $7700.00 | Window Closed / Lapsed |