Patent US5020910A successfully refreshed from Google Patents.
US5020910A
Expired / Lapsed
US
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Monolithic diffraction spectrometer
Assignee: Intellectual Ventures II LLC
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Filing: 1990-03-05
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Granted: 1991-06-04
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Expires: 2010-03-05
Abstract
Abstract A monolithic diffraction spectrometer having a diffraction grating formed over a light sensing array is provided. The diffraction grating serves to diffract wavelengths of interest to an underlying photosensitive device while diffracting other wavelengths away from the photosensing element. By forming a diffraction grating with a variable pitch, or multiple diffraction gratings having various pitches, any number of specific light wavelengths can be detected with a high degree of precision. When a diffraction grating having a pitch which is in the order of the incident wavelength of light is used, improved sensitivity is achieved.
Inventors
- 👤 William C. Dunn
- 👤 Stuart T. Langley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:42
CPC Classifications
G; G01; G01J; G01J3/00; G01J3/12; G01J3/18; G01J3/02; G01J3/0256; G01J3/0259; G01J3/28; G01J3/2803
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
33 words
A spectrometer comprising: a semiconductor substrate; an array of light sensing devices formed in the substrate; and an opaque diffraction grating formed on the substrate wherein the diffraction grating has a variable pitch.
Claim 2
Dependent Claim
33 words
A spectrometer comprising: a semiconductor substrate; an array of light sensing devices formed in the substrate; and an opaque diffraction grating formed on the substrate wherein the diffraction grating has a variable pitch.
Claim 3
Dependent Claim
16 words
The spectrometer of claim 1 wherein the variable pitch ranges from 0.5 microns to 1.0 microns.
Claim 4
Dependent Claim
34 words
A spectrometer comprising: a semiconductor substrate; an array of light sensing devices formed in the substrate; and an opaque diffraction grating formed on the substrate wherein the diffraction grating comprises a patterned conductive layer.
Claim 5
Dependent Claim
34 words
A spectrometer comprising: a semiconductor substrate; an array of light sensing devices formed in the substrate; and an opaque diffraction grating formed on the substrate wherein the diffraction grating comprises a patterned conductive layer.
Claim 6
Independent Claim
70 words
A method of spectral analysis comprising the steps of: providing a substrate; providing an array of photon sensing devices on the substrate, wherein the photon sensing devices are isolated from each other; providing a diffraction grating above the photon sensing devices, wherein the diffraction grating has a variable pitch; exposing the diffraction grating to a light to be analyzed; and detecting a signal from the array of photon sensing devices.
Claim 7
Independent Claim
70 words
A method of spectral analysis comprising the steps of: providing a substrate; providing an array of photon sensing devices on the substrate, wherein the photon sensing devices are isolated from each other; providing a diffraction grating above the photon sensing devices, wherein the diffraction grating has a variable pitch; exposing the diffraction grating to a light to be analyzed; and detecting a signal from the array of photon sensing devices.
Claim 8
Dependent Claim
23 words
The method of claim 4 further comprising the step of applying a narrow bandwidth of photons to each of the photon sensing elements.
Claim 9
Dependent Claim
29 words
A monolithic semiconductor spectrometer comprising: an array of light sensing elements; a fan-shaped diffraction filter formed over the light sensing elements; and electrodes coupled to the light sensing elements.
Claim 10
Dependent Claim
29 words
A monolithic semiconductor spectrometer comprising: an array of light sensing elements; a fan-shaped diffraction filter formed over the light sensing elements; and electrodes coupled to the light sensing elements.
Claim 11
Dependent Claim
13 words
The spectrometer of claim 6 wherein the diffraction filter comprises an opaque material.
Claim 12
Dependent Claim
24 words
A solid state imaging device comprising an array of light sensing elements and a variable pitch diffraction grating formed over the light sensing elements.
Claim 13
Dependent Claim
24 words
A solid state imaging device comprising an array of light sensing elements and a variable pitch diffraction grating formed over the light sensing elements.
Claim 14
Dependent Claim
19 words
The device of claim 8 further comprising a transparent dielectric formed between the sensing elements and the diffraction grating.
Claim 15
Dependent Claim
38 words
A solid state spectrometer comprising: a monolithic array of light sensing elements; and a reflection grating formed adjacent to the array of light sensing elements wherein the reflecting grating comprises alternating layers of reflective material and transparent material.
Claim 16
Dependent Claim
38 words
A solid state spectrometer comprising: a monolithic array of light sensing elements; and a reflection grating formed adjacent to the array of light sensing elements wherein the reflecting grating comprises alternating layers of reflective material and transparent material.
References Cited (Backward Citations)
JPS58174925A
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US4746186A
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US4798464A
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JPS61219008A
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JPS6379020A
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JPS6413707A
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US4852079A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-03 | 1994-12-03 | 1995-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-03 | 1998-12-03 | 1999-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-03 | 2002-12-03 | 2003-06-04 | $7700.00 | Window Closed / Lapsed |