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US5017983A Expired / Lapsed US ⏱️ 0.0 years remaining

Amorphous silicon thin film transistor with a depletion gate

Assignee: Industrial Technology Research Institute
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Filing: 1989-08-03
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Granted: 1991-05-21
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Expires: 2009-08-03
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Abstract

Abstract The present invention is a high speed thin film transistor with an accumulation gate and a depletion gate. When a positive voltage is applied to the accumulation gate, the electrons are accumulated in the channel region of the accumulation gate and the transistor is operated at the "on" state. If a negative voltage is applied to the depletion gate, the accumulated electrons are depleted, and the transistor is operated at the "off" state. The on-current of the thin film transistor is the same as that of conventional thin film transistors; however, a smaller off-current of the transistor is obtained.

Inventors

  • 👤 Biing-Seng Wu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 07:30
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0321; H10D30/60; H10D30/67; H10D30/6729; H10D30/673; H10D30/6733; H10D30/6734

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 232 words
An amorphous semiconductor thin film field effect transistor comprising: (a) an insulating substrate; (b) an accumulation gate electrode overlying said substrate; (c) a bottom insulating layer overlying said accumulation gate electrode and said insulating substrate; (d) an amorphous semiconductor channel layer overlying said bottom insulating layer; (e) a top insulating layer overlying a portion of said bottom insulating layer and being centered with respect to said accumulation gate electrode; (f) a source amorphous semiconductor layer and a drain amorphous semiconductor layer, said source and drain semiconductor layers being of a first conductivity type and overlying opposite portions of said top insulating layer and being in contact with respective opposite portions of said channel layer not covered by said top insulating layer, said source and drain semiconductor layers being separated from one another by an intermediate portion of said channel layer overlying said accumulation gate; (g) metallic source and drain electrodes overlying said source and drain semiconductor layers, respectively; and (h) a metallic depletion gate disposed on said top insulating layer and over said intermediate portion of said channel layer, said intermediate portion of said channel layer being juxtaposed between said accumulation gate and said depletion gate, said channel layer having charge carrier flow therethrough between said source and drain semiconductor layers that is enhanced by one potential on said accumulation gate and is depleted by an opposite potential on said depletion gate.
Claim 2
Dependent Claim 232 words
An amorphous semiconductor thin film field effect transistor comprising: (a) an insulating substrate; (b) an accumulation gate electrode overlying said substrate; (c) a bottom insulating layer overlying said accumulation gate electrode and said insulating substrate; (d) an amorphous semiconductor channel layer overlying said bottom insulating layer; (e) a top insulating layer overlying a portion of said bottom insulating layer and being centered with respect to said accumulation gate electrode; (f) a source amorphous semiconductor layer and a drain amorphous semiconductor layer, said source and drain semiconductor layers being of a first conductivity type and overlying opposite portions of said top insulating layer and being in contact with respective opposite portions of said channel layer not covered by said top insulating layer, said source and drain semiconductor layers being separated from one another by an intermediate portion of said channel layer overlying said accumulation gate; (g) metallic source and drain electrodes overlying said source and drain semiconductor layers, respectively; and (h) a metallic depletion gate disposed on said top insulating layer and over said intermediate portion of said channel layer, said intermediate portion of said channel layer being juxtaposed between said accumulation gate and said depletion gate, said channel layer having charge carrier flow therethrough between said source and drain semiconductor layers that is enhanced by one potential on said accumulation gate and is depleted by an opposite potential on said depletion gate.
Claim 3
Dependent Claim 60 words
The transistor of claim 1, wherein said amorphous semiconductor channel layer comprises amorphous silicon; said source and drain semiconductor layers comprise amorphous silicon having an N-type impurity whereby said conductivity type is N so that the charge carriers in said channel layer comprise electrons; and said one potential is a positive potential and said opposite potential is a negative potential.
Claim 4
Dependent Claim 47 words
The transistor of claim 1 wherein said accumulation gate underlies the entirety of said intermediate portion of said channel layer and wherein said depletion gate overlies only part of said intermediate portion of said channel layer, said depletion gate being centered with respect to said accumulation gate.
Claim 5
Dependent Claim 60 words
The transistor of claim 2 wherein said amorphous semiconductor channel layer comprises amorphous silicon; said source and drain semiconductor layers comprise amorphous silicon having a P-type impurity whereby said conductivity type is P so that the charge carriers in said channel layer comprise holes; and said one potential is a negative potential and said opposite potential is a positive potential.

References Cited (Backward Citations)

US3500137A Cited
US4532536A Cited
US4425544A Cited
JPS6083370A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-05-20 1994-11-19 1995-05-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-05-20 1998-11-19 1999-05-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-05-20 2002-11-19 2003-05-21 $7700.00 Window Closed / Lapsed

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