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US5015492A
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Method and apparatus for pulsed energy induced vapor deposition of thin films
Assignee: Rutgers, The State University of New Jersey
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Filing: 1989-04-03
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Granted: 1991-05-14
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Expires: 2009-04-03
Abstract
Abstract Vapor deposition of a thin film is accomplished by employing a pulsed laser to irradiate at least a region of a homogeneous stoichiometric complex material pellet with sufficient energy density to accomplish congruent evaporation of constituents of the material. The energy density is further at least sufficient to cause at least a predetermined portion, a central forward lobe, of the evaporant to have approximately the same stoichiometry as the irradiated material. A substrate is positioned to allow deposit thereon of that lobe portion of the evaporant as a thin film. Also shown are apparatus for masking out predetermined portions of the evaporant outside said lobe and passing at least a part of the lobe evaporant through a mask aperture, use of apparatus for causing relative movement of the substrate and the mask to achieve film deposition over a substrate area substantially larger than the area of the aperture, apparatus for charge level detection in the evaporant stream to detct lobe drift, and apparatus for tilting the pellet to compensate for drift of the forward lobe away from the mask aperture.
Inventors
- 👤 Thirumalai Venkatesan
- 👤 Xin D. Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 04:05
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
117 words
A vapor deposition method for coating a substrate with a complex material having a predetermined stoichiometric set of constituents, the method comprising the steps of composing a pellet of said complex material, irradiating at least a portion of said pellet with a pulsed beam of at least sufficient energy to vaporize said constituents congruently in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant material is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet, and intercepting on said substrate substantially only a portion of said evaporant plume in said central lobe.
Claim 2
Dependent Claim
117 words
A vapor deposition method for coating a substrate with a complex material having a predetermined stoichiometric set of constituents, the method comprising the steps of composing a pellet of said complex material, irradiating at least a portion of said pellet with a pulsed beam of at least sufficient energy to vaporize said constituents congruently in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant material is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet, and intercepting on said substrate substantially only a portion of said evaporant plume in said central lobe.
Claim 3
Dependent Claim
51 words
The method in accordance with claim 1 in which said composing step comprises: composing a homogeneous pellet of said complex material and exhibiting the same material in any random volume that can be examined in the material and which volume is of a size no more than about 1000 cubic nanometers.
Claim 4
Dependent Claim
89 words
The method in accordance with claim 1 in which said irradiating step comprises the substeps of directing a pulsed energy beam onto said pellet, each pulse of said beam having finite rise and fall times and having more than sufficient energy density to cause said congruent vaporization of a portion of said pellet, and adjusting the intensity of said beam to control the proportion of the duration of said each pulse having at least said sufficient energy density and hence to control said amount of evaporant in said lobe.
Claim 5
Dependent Claim
57 words
The method in accordance with claim 1 in which said irradiating step comprises: selecting an energy beam having particle energy at least adequate to produce congruent evaporation of said material at the surface thereof but insufficient to penetrate to a depth at which congruent evaporation of significant amounts of said material at said surface is not possible.
Claim 6
Dependent Claim
27 words
The method in accordance with claim 1 and further comprising the step of tilting said pellet to steer said lobe in a predetermined direction toward said substrate.
Claim 7
Dependent Claim
60 words
The method in accordance with claim 5 in which said irradiating step comprises the substep of focusing said beam onto a predetermined region of said major face of said pellet, and said tilting step comprises tilting said pellet about an axis located to affect no substantial change in said amount of evaporant in said lobe during steering of said lobe.
Claim 8
Dependent Claim
135 words
A vapor deposition method for coating a substrate with a complex material having a predetermined stoichiometric set of constituents, the method comprising the steps of composing a pellet of said complex material, irradiating at least a portion of said pellet with a pulsed beam of at least sufficient energy to vaporize said constituents congruently in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant material is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet, and intercepting on said substrate a portion of said evaporant plume in said central lobe, said intercepting step comprising the substep of blocking portions of said plume outside said lobe from deposition on said substrate.
Claim 9
Dependent Claim
135 words
A vapor deposition method for coating a substrate with a complex material having a predetermined stoichiometric set of constituents, the method comprising the steps of composing a pellet of said complex material, irradiating at least a portion of said pellet with a pulsed beam of at least sufficient energy to vaporize said constituents congruently in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant material is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet, and intercepting on said substrate a portion of said evaporant plume in said central lobe, said intercepting step comprising the substep of blocking portions of said plume outside said lobe from deposition on said substrate.
Claim 10
Dependent Claim
55 words
The method in accordance with claim 7 in which said blocking step comprises the substep of inserting a mask having an aperture for passing at least a portion of said plume in said lobe between said pellet and said substrate to limit evaporant deposited on said substrate substantially to that which is in said lobe.
Claim 11
Dependent Claim
40 words
The method in accordance with claim 8 and comprising the further steps of: detecting a drift of said lobe at least partially away from said aperture, and tilting said pellet in a direction to redirect said lobe through said aperture.
Claim 12
Dependent Claim
50 words
The method in accordance with claim 9 in which said detecting step comprises the substep of: detecting electrical charge level in said evaporant in a predetermined portion of said lobe upstream in said evaporant from said aperture and at a point where said drift caused a change in said level.
Claim 13
Dependent Claim
51 words
The method in accordance with claim 8 in which said blocking step further comprises the substep of: causing relative movement between said substrate and said mask in accordance with a predetermined algorithm to achieve deposition of evaporant over a predetermined area, greater than the area of said aperture, of said substrate.
Claim 14
Dependent Claim
24 words
The claim in accordance with claim 11 in which said causing step comprises the substep of: moving said substrate in accordance with said algorithm.
Claim 15
Dependent Claim
143 words
Vapor deposition apparatus for directing an energy beam onto at least a portion of a body of a complex material to cause congruent evaporation of at least a portion of the material and depositing the resulting evaporant as a film on a substrate, said material having a predetermined homogeneous stoichiometric set of constituents, said apparatus comprising: means, including said beam, for irradiating at least a portion of said material with at least sufficient energy density congruently to vaporize said constituents in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet; and means for intercepting substantially only a portion of said evaporant plume from said lobe on a substrate.
Claim 16
Dependent Claim
143 words
Vapor deposition apparatus for directing an energy beam onto at least a portion of a body of a complex material to cause congruent evaporation of at least a portion of the material and depositing the resulting evaporant as a film on a substrate, said material having a predetermined homogeneous stoichiometric set of constituents, said apparatus comprising: means, including said beam, for irradiating at least a portion of said material with at least sufficient energy density congruently to vaporize said constituents in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet; and means for intercepting substantially only a portion of said evaporant plume from said lobe on a substrate.
Claim 17
Dependent Claim
96 words
The vapor deposition apparatus in accordance with claim 13 in which said irradiating means comprises: means for directing said beam as a pulsed energy beam onto said pellet, each pulse of said beam having finite rise and fall times and having more than sufficient energy density to cause said congruent vaporization of a portion of said pellet; and means for adjusting the energy density of said beam to control the proportion of the duration of said each pulse having at least said sufficient energy density and hence to control said amount of evaporant in said lobe.
Claim 18
Dependent Claim
30 words
The vapor deposition apparatus in accordance with claim 13 in which there are provided: means for tilting said pellet to steer said lobe in a predetermined direction toward said substrate.
Claim 19
Dependent Claim
65 words
The vapor deposition apparatus in accordance with claim 15 in which: said irradiating means comprises means for focusing said beam in a predetermined region of said major face of said pellet, and said tilting means comprises means for tilting said pellet about an axis including a line sufficiently close to said region to affect no substantial change in said amount of evaporant in said lobe.
Claim 20
Dependent Claim
161 words
Vapor deposition apparatus for directing an energy beam onto at least a portion of a body of a complex material to cause congruent evaporation of at least a portion of the material and depositing the resulting evaporant as a film on a substrate, said material having a predetermined homogeneous stoichiometric set of constituents, said apparatus comprising: means, including said beam, for irradiating at least a portion of said material with at least sufficient energy density congruently to vaporize said constituents in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet; and means for intercepting a portion of said evaporant plume from said lobe on a substrate, said intercepting means comprising means for blocking predetermined portions of said plume outside said lobe from deposition on said substrate.
Claim 21
Dependent Claim
161 words
Vapor deposition apparatus for directing an energy beam onto at least a portion of a body of a complex material to cause congruent evaporation of at least a portion of the material and depositing the resulting evaporant as a film on a substrate, said material having a predetermined homogeneous stoichiometric set of constituents, said apparatus comprising: means, including said beam, for irradiating at least a portion of said material with at least sufficient energy density congruently to vaporize said constituents in a three-dimensional plume adjacent to said pellet, said plume including a central lobe in which the amount of evaporant is at least in part a function of said density and in which the evaporant stoichiometric characteristic is approximately the same as in said pellet; and means for intercepting a portion of said evaporant plume from said lobe on a substrate, said intercepting means comprising means for blocking predetermined portions of said plume outside said lobe from deposition on said substrate.
Claim 22
Dependent Claim
55 words
The vapor deposition apparatus in accordance with claim 17 in which said blocking means comprises: means, including an aperture in the vapor projection path of said lobe between said pellet and said substrate, for masking out predetermined fringes of said evaporant outside said lobe and passing evaporant in said lobe for deposit on said substrate.
Claim 23
Dependent Claim
42 words
The vapor deposition apparatus in accordance with claim 18 and comprising: means for detecting a drift of said lobe at least partially away from said aperture; and means for tilting said pellet in a direction to redirect said lobe through said aperture.
Claim 24
Dependent Claim
38 words
The vapor deposition apparatus in accordance with claim 19 in which said detecting means comprises: means, in said evaporant upstream of said aperture, for detecting electrical charge level in said evaporant in a predetermined portion of said lobe.
Claim 25
Dependent Claim
52 words
The vapor deposition apparatus in accordance with claim 18 in which said blocking means further comprises: means for causing relative movement between said substrate and said mask in accordance with a predetermined algorithm to achieve deposition of evaporant over a predetermined area, greater than the area of said aperture, of said substrate.
Claim 26
Dependent Claim
25 words
The vapor deposition apparatus in accordance with claim 21 in which said causing means comprises: means for moving said substrate in accordance with said algorithm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-13 | 1994-11-12 | 1995-05-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-13 | 1998-11-12 | 1999-05-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-13 | 2002-11-12 | 2003-05-14 | $7700.00 | Window Closed / Lapsed |