Bubbler device for washing semiconductor materials

Claim 1

A bubbler device to be located near the bottom in a rinse vessel for washing semiconductor materials set in a carrier disposed above said bubbler device, said bubbler device comprising a main pipe through which pressurized gas is transferred, a suitable number of branch pipes connected with the main pipe and disposed on either side thereof, and bubbling portions located on the end of the respective branch pipes for the generation of bubbles, wherein each of said bubbling portions has a filter with a fine mesh of 0.1μ-0.05μ, the filter being releasably mounted on an upper side of the bubbling portion, said branch pipes being of at least two different lengths alternately disposed longer and shorter along each side of said base pipe such that said bubbler portions are alternately disposed farther and nearer to said main pipe, to thereby generate fine bubbles through the respective filter so as to effectively stir a liquid and cause circulation thereof through said carrier in said vessel to promote the washing of the semiconductor materials without the penetration of liquid through the filter.