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US5013366A Expired / Lapsed US ⏱️ 0.0 years remaining

Cleaning process using phase shifting of dense phase gases

Assignee: Raytheon Co
•
Filing: 1988-12-07
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Granted: 1991-05-07
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Expires: 2008-12-07
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Abstract

Abstract A process for removing two or more contaminants from a substrate in a single process. The substrate to be cleaned is contacted with a dense phase gas at or above the critical pressure thereof. The phase of the dense phase gas is then shifted between the liquid state and the supercritical state by varying the temperature of the dense fluid in a series of steps between temperatures above and below the critical temperature of the dense fluid. After completion of each step in the temperature change, the temperature is maintained for a predetermined period of time in order to allow contact with the substrate and contaminants and removal of the contaminants. At each step in the temperature change, the dense phase gas possesses different cohesive energy density or solubility properties. Thus, this phase shifting of the dense fluid provides removal of a variety of contaminants from the substrate without the necessity of utilizing different solvents. In alternative embodiments, ultraviolet radiation, ultrasonic energy, or reactive dense phase gas or additives may additionally be used.

Inventors

  • 👤 David P. Jackson
  • 👤 Orval F. Buck

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 23:05
CPC Classifications
B; B08; B08B; B08B7/00; B08B7/0021; C; C23; C23G; C23G5/00

Claims Analysis

Total Claims: 37
Claim 1
Independent Claim 175 words
A process for removing two or more contaminants from a chosen substrate comprising the steps of: (a) placing said substrate containing said contaminants in a cleaning vessel; (b) contacting said substrate containing said contaminants with a chosen dense phase gas at a pressure equal to or above the critical pressure of said dense phase gas; and (c) shifting the phase of said dense phase gas between the liquid state and the supercritical state by varying the temperature of said dense phase gas in a series of steps between a temperature above the critical temperature of said dense phase gas and a temperature below said critical temperature, maintaining said temperature at the completion of each said step for a period of time sufficient to remove one or more of said contaminants, and maintaining contact between said dense phase gas and said substrate containing said contaminants for said period of time at each said step wherein a solvent spectrum of said dense phase gas is provided to thereby remove said two or more contaminants from said substrate.
Claim 2
Dependent Claim 175 words
A process for removing two or more contaminants from a chosen substrate comprising the steps of: (a) placing said substrate containing said contaminants in a cleaning vessel; (b) contacting said substrate containing said contaminants with a chosen dense phase gas at a pressure equal to or above the critical pressure of said dense phase gas; and (c) shifting the phase of said dense phase gas between the liquid state and the supercritical state by varying the temperature of said dense phase gas in a series of steps between a temperature above the critical temperature of said dense phase gas and a temperature below said critical temperature, maintaining said temperature at the completion of each said step for a period of time sufficient to remove one or more of said contaminants, and maintaining contact between said dense phase gas and said substrate containing said contaminants for said period of time at each said step wherein a solvent spectrum of said dense phase gas is provided to thereby remove said two or more contaminants from said substrate.
Claim 3
Dependent Claim 43 words
The process as set forth in claim 1 wherein said varying said temperature comprises starting at a first temperature below said critical temperature, increasing said temperature to a second temperature above said critical temperature, and then decreasing said temperature to said first temperature.
Claim 4
Dependent Claim 16 words
The process as set forth in claim 2 wherein said varying is performed more than film.
Claim 5
Dependent Claim 43 words
The process as set forth in claim 1 wherein said varying said temperature comprises starting at a first temperature above said critical temperature, decreasing said temperature to a second temperature below said critical temperature, and then increasing said temperature to said first temperature.
Claim 6
Dependent Claim 17 words
The process as set forth in claim 4 wherein said varying is performed more than one time.
Claim 7
Dependent Claim 22 words
The process as set forth in claim 1 wherein said temperature is varied above said critical temperature by about 5 to 100K.
Claim 8
Dependent Claim 22 words
The process as set forth in claim 6 wherein each said step comprises a change in temperature of about 5 to 10K.
Claim 9
Dependent Claim 24 words
The process as set forth in claim 6 wherein said predetermined period of time is within the range of about 5 to 30 minutes.
Claim 10
Dependent Claim 22 words
The process as set forth in claim 1 wherein said temperature is varied below said critical temperature by about 5 to 25K.
Claim 11
Dependent Claim 22 words
The process as set forth in claim 9 wherein each said step comprises a change in temperature of about 5 to 10K.
Claim 12
Dependent Claim 24 words
The process as set forth in claim 9 wherein said predetermined period of time is within the range of about 5 to 30 minutes.
Claim 13
Dependent Claim 44 words
The process as set forth in claim 1 wherein said dense phase gas is selected from the group consisting of carbon dioxide, nitrous oxide, ammonia, helium, krypton, argon, methane, ethane, propane, butane, pentane, hexane, ethylene, propylene, tetrafluoromethane, chlorodifluoromethane, sulfur hexafluoride, perfluoropropane, and mixtures thereof.
Claim 14
Dependent Claim 38 words
The process as set forth in claim 12 wherein said dense phase gas is selected from the group consisting of a mixture of carbon dioxide and nitrous oxide and a mixture of dry carbon dioxide and anhydrous ammonia.
Claim 15
Dependent Claim 38 words
The process as set forth in claim 1 wherein said dense phase gas comprises a mixture of a non-hydrogen bonding compound with a sufficient amount of a hydrogen-bonding compound to thereby provide hydrogen-bonding solvent properties in said mixture.
Claim 16
Dependent Claim 28 words
The process as set forth is claim 14 wherein said mixture comprises 75 to 90 percent liquid dry carbon dioxide and 25 to 10 percent liquid anhydrous ammonia.
Claim 17
Dependent Claim 25 words
The process as set forth in claim 15 wherein said contaminants are selected from the group consisting of an ionic substance and a polar substance.
Claim 18
Dependent Claim 26 words
The process as set forth in claim 1 wherein said substrate comprises a material selected from the group consisting of metal, organic compound, and inorganic compound.
Claim 19
Dependent Claim 35 words
The process as set forth in claim 17 wherein said substrate is selected from the group consisting of complex hardware, metal casting, printed wiring board, pin connector, fluorosilicone seal, ferrite core, and cotton tipped applicator.
Claim 20
Dependent Claim 35 words
The process as set forth in claim 1 wherein said contaminant is selected form the group consisting of oil, grease, lubricant, solder flux residue, photoresist, adhesive residue, plasticizer, unreacted monomer, inorganic particulates, and organic particulates.
Claim 21
Dependent Claim 48 words
The process as set forth in claim 1 wherein said dense phase gas containing said contaminants is continually removed from said cleaning vessel and replaced with additional dense phase gas in an amount sufficient to maintain the pressure in said cleaning vessel at or above said critical pressure.
Claim 22
Dependent Claim 46 words
A process as set forth in claim 1 wherein the temperature of said dense phase gas is controlled to provide a temperature gradient in which the temperature of said dense phase gas decreases from the surface of said substrate to the wall of said cleaning vessel.
Claim 23
Dependent Claim 30 words
The process as set forth in claim 1 further including after step "c", subjecting said substrate to thermal vacuum degassing to thereby remove residual dense phase gas from said substrate.
Claim 24
Dependent Claim 44 words
The process as set forth in claim 1 further including after step "c", displacing said dense phase gas with a chosen gas having a diffusion rate which is higher than the diffusion rate of said dense phase gas, and then depressurizing said cleaning vessel.
Claim 25
Dependent Claim 27 words
The process as set forth in claim 1 wherein said substrate is suspended in a liquid solvent to thereby enhance removal of said contaminants from said substrate.
Claim 26
Dependent Claim 31 words
The process as set forth in claim 1 wherein during step "c" said dense phase gas is exposed to ultraviolet radiation to thereby enhance removal of said contaminants from said substrate.
Claim 27
Dependent Claim 22 words
The process as set forth in claim 25 wherein said radiation has a wavelength within the range of 180 to 350 nanometers.
Claim 28
Dependent Claim 37 words
The process as set forth in claim 1 wherein during step "c" said dense phase gas and said substrate containing said contaminants are exposed to ultrasonic energy to thereby enhance removal of said contaminants from said substrate.
Claim 29
Dependent Claim 24 words
The process as set forth in claim 27 wherein said ultrasonic energy has a frequency within the range of about 20 to 80 kilohertz.
Claim 30
Dependent Claim 25 words
The process as set forth in claim 27 wherein said ultrasonic energy is shifted back and forth over the range between 20 and 80 kilohertz.
Claim 31
Dependent Claim 40 words
The process as set forth in claim 1 wherein during step "c" said dense phase gas and said substrate containing said contaminants are exposed to ultraviolet radiation and ultrasonic energy to thereby enhance removal of said contaminants from said substrate.
Claim 32
Dependent Claim 52 words
The process as set forth in claim 1 wherein said dense phase gas comprises a mixture of a first dense phase gas capable of chemically reacting with said contaminants to thereby enhance the removal of said contaminants, and a second dense phase gas as a carrier for said first dense phase gas.
Claim 33
Dependent Claim 17 words
The process as set forth in claim 31 wherein said first dense phase gas comprises an oxidant.
Claim 34
Dependent Claim 16 words
The process as set forth in claim 32 wherein said first dense phase gas comprises ozone.
Claim 35
Dependent Claim 29 words
The process as set forth in claim 33 wherein said second dense phase gas is selected from the group consisting of carbon dioxide, oxygen, argon, krypton, xenon, and ammonia.
Claim 36
Dependent Claim 25 words
The process as set forth in claim 33 wherein said ozone is generated in situ when said dense phase gas is contacted with said substrate.
Claim 37
Dependent Claim 24 words
The process as set forth in claim 1 wherein said shifting of said phase of said dense phase gas is accomplished under computer control.

References Cited (Backward Citations)

US4061566A Cited
US4147624A Cited
US4379724A Cited
WO1984002291A1 Cited
JPS60192333A Cited
US4576837A Cited
US4718974A Cited
US4854337A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-05-06 1994-11-05 1995-05-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-05-06 1998-11-05 1999-05-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-05-06 2002-11-05 2003-05-07 $7700.00 Window Closed / Lapsed

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