Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
195 words
A method of measuring displacement between two points on a test object, comprising the steps of: (a) generating a first interference pattern representing the superposition of laterally-displaced images of the test object, while the object is in an undeformed state, (b) generating a sequence of second interference patterns representing the superposition of laterally-displaced images of the test object, while the object is in a deformed state, and repeatedly producing third interference patterns determined by comparing each of said second interference patterns with the first interference pattern, the generating steps comprising the steps of storing the patterns in a computer, the comparing step being performed by electronically comparing the respective second patterns with the first pattern, (c) selecting a point on one of the third interference patterns corresponding to the points on the test object, (d) adjusting an optical element so as to adjust the phase of the second interference patterns currently being formed, by a measured amount, until the corresponding third interference pattern comprises a fringe pattern having an extremum at the selected point, and (e) converting the measured amount of phase adjustment into a value of the displacement between the points on the object.
Claim 2
Independent Claim
195 words
A method of measuring displacement between two points on a test object, comprising the steps of: (a) generating a first interference pattern representing the superposition of laterally-displaced images of the test object, while the object is in an undeformed state, (b) generating a sequence of second interference patterns representing the superposition of laterally-displaced images of the test object, while the object is in a deformed state, and repeatedly producing third interference patterns determined by comparing each of said second interference patterns with the first interference pattern, the generating steps comprising the steps of storing the patterns in a computer, the comparing step being performed by electronically comparing the respective second patterns with the first pattern, (c) selecting a point on one of the third interference patterns corresponding to the points on the test object, (d) adjusting an optical element so as to adjust the phase of the second interference patterns currently being formed, by a measured amount, until the corresponding third interference pattern comprises a fringe pattern having an extremum at the selected point, and (e) converting the measured amount of phase adjustment into a value of the displacement between the points on the object.
Claim 3
Dependent Claim
85 words
The method of claim 1, wherein the optical element includes a polarizer, and wherein the first and second interference patterns are generated by the steps of: (a) directing coherent radiation onto the test object, (b) passing radiation reflected from the object through a birefringent material and then through the polarizer, and (c) directing radiation emerging from the polarizer onto a detector, the birefringent material and the polarizer cooperating to form a random interference pattern on the detector, and storing the random interference pattern thus formed.
Claim 4
Dependent Claim
19 words
The method of claim 2, wherein the adjusting step comprises the step of varying the orientation of the polarizer.
Claim 5
Dependent Claim
19 words
The method of claim 2, wherein there is a quarter-wave plate disposed between the birefringent material and the polarizer.
Claim 6
Independent Claim
275 words
A method of measuring displacement between two points on a test object, comprising the steps of: (a) generating a first interference pattern representing the superposition of laterally-displaced images of the test object, while the object is in an undeformed state, the interference pattern being generating by directing radiation onto the test object, passing radiation reflected from the object through a birefringent material and then through a polarizer, and directing radiation emerging from the polarizer onto a detector, the birefringent material and the polarizer cooperating to form a random interference pattern on the detector, and storing the random interference pattern thus formed, (b) generating a sequence of second interference patterns representing the superposition of laterally-displaced images of the test object, while the object is in a deformed state, each second interference pattern being generated by the same method used to generate the first interference pattern, (c) repeatedly producing third interference patterns determined by comparing each of said second interference patterns with the first interference pattern, the generating steps comprising the steps of storing the patterns in a computer, the comparing step being performed by electronically comparing the respective second patterns with the first pattern. (d) selecting a point on one of the third interference patterns corresponding to the points on the test object, (e) adjusting the orientation of the polarizer so as to adjust the phase of the second interference patterns currently being formed, by a measured amount, until the corresponding third interference pattern comprises a fringe pattern having an extremum at the selected point, and (f) converting the measured amount of phase adjustment into a value of the displacement between the points on the object.
Claim 7
Independent Claim
275 words
A method of measuring displacement between two points on a test object, comprising the steps of: (a) generating a first interference pattern representing the superposition of laterally-displaced images of the test object, while the object is in an undeformed state, the interference pattern being generating by directing radiation onto the test object, passing radiation reflected from the object through a birefringent material and then through a polarizer, and directing radiation emerging from the polarizer onto a detector, the birefringent material and the polarizer cooperating to form a random interference pattern on the detector, and storing the random interference pattern thus formed, (b) generating a sequence of second interference patterns representing the superposition of laterally-displaced images of the test object, while the object is in a deformed state, each second interference pattern being generated by the same method used to generate the first interference pattern, (c) repeatedly producing third interference patterns determined by comparing each of said second interference patterns with the first interference pattern, the generating steps comprising the steps of storing the patterns in a computer, the comparing step being performed by electronically comparing the respective second patterns with the first pattern. (d) selecting a point on one of the third interference patterns corresponding to the points on the test object, (e) adjusting the orientation of the polarizer so as to adjust the phase of the second interference patterns currently being formed, by a measured amount, until the corresponding third interference pattern comprises a fringe pattern having an extremum at the selected point, and (f) converting the measured amount of phase adjustment into a value of the displacement between the points on the object.
Claim 8
Dependent Claim
19 words
The method of claim 5, wherein there is a quarter-wave plate disposed between the birefringent material and the polarizer.
Claim 9
Independent Claim
286 words
A method of measuring displacement between two points on a test object, comprising the steps of: (a) generating a first interference patter representing the superposition of laterally-displaced images of the test object, while the object is in an undeformed state, the interference pattern being generated by directing radiation onto the test object, passing radiation reflected from the object through a birefringent material, through a quarter-wave plate, and then through a polarizer, and directing radiation emerging from the polarizer onto a detector, the birefringent material and the polarizer cooperating to form a random interference pattern on the detector, and storing the random interference pattern thus formed, (b) generating a sequence of second interference patterns representing the superposition of laterally-displaced images of the test object, while the object is in a deformed state, each second interference pattern being generating by the same method used to generate the first interference pattern, (c) repeatedly producing third interference patterns determined by comparing each of said second interference patterns with the first interference pattern, the generating steps comprising the steps of storing the patterns in a computer, the comparing step being performed by electronically comparing the respective second patterns with the first pattern, (d) selecting a point on one of the third interference patterns corresponding to the points on the test object, (e) adjusting the orientation of the polarizer so as to adjust the phase of the second interference patterns currently being formed, by a measured amount, by varying the orientation of the polarizer, until the corresponding third interference pattern comprises a fringe pattern having an extremum at the selected point, and (f) converting the measured amount of phase adjustment into a value of the displacement between the points on the object.
Claim 10
Independent Claim
286 words
A method of measuring displacement between two points on a test object, comprising the steps of: (a) generating a first interference patter representing the superposition of laterally-displaced images of the test object, while the object is in an undeformed state, the interference pattern being generated by directing radiation onto the test object, passing radiation reflected from the object through a birefringent material, through a quarter-wave plate, and then through a polarizer, and directing radiation emerging from the polarizer onto a detector, the birefringent material and the polarizer cooperating to form a random interference pattern on the detector, and storing the random interference pattern thus formed, (b) generating a sequence of second interference patterns representing the superposition of laterally-displaced images of the test object, while the object is in a deformed state, each second interference pattern being generating by the same method used to generate the first interference pattern, (c) repeatedly producing third interference patterns determined by comparing each of said second interference patterns with the first interference pattern, the generating steps comprising the steps of storing the patterns in a computer, the comparing step being performed by electronically comparing the respective second patterns with the first pattern, (d) selecting a point on one of the third interference patterns corresponding to the points on the test object, (e) adjusting the orientation of the polarizer so as to adjust the phase of the second interference patterns currently being formed, by a measured amount, by varying the orientation of the polarizer, until the corresponding third interference pattern comprises a fringe pattern having an extremum at the selected point, and (f) converting the measured amount of phase adjustment into a value of the displacement between the points on the object.