Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
179 words
A pressure chamber useful for performing double exposure interferometric analysis of a test object surface before and after a pressure change, comprising: a base plate having a horizontal extension and operative to support said test object and an apparatus for peforming the interferometric analysis; means operative to support the base plate relative to a rigid mounting surface; a pressure dome having a free edge configured so as to be supported in contact with the base plate to enclose an area above the base plate; means located beneath the base plate for defining an enclosed manifold volume substantially coextensive with the area of the base plate surrounded by the pressure dome; means for modifying the pressure within the volume defined by the base plate and the pressure dome; and means for maintaining pressure in the manifold volume in equilibrium with the pressure within the volume defined by the top of the base plate and the pressure dome, whereby the pressure on opposed sides of the base plate is maintained substantially equal, independent of changes in pressure within the pressure dome.
Claim 2
Dependent Claim
179 words
A pressure chamber useful for performing double exposure interferometric analysis of a test object surface before and after a pressure change, comprising: a base plate having a horizontal extension and operative to support said test object and an apparatus for peforming the interferometric analysis; means operative to support the base plate relative to a rigid mounting surface; a pressure dome having a free edge configured so as to be supported in contact with the base plate to enclose an area above the base plate; means located beneath the base plate for defining an enclosed manifold volume substantially coextensive with the area of the base plate surrounded by the pressure dome; means for modifying the pressure within the volume defined by the base plate and the pressure dome; and means for maintaining pressure in the manifold volume in equilibrium with the pressure within the volume defined by the top of the base plate and the pressure dome, whereby the pressure on opposed sides of the base plate is maintained substantially equal, independent of changes in pressure within the pressure dome.
Claim 3
Dependent Claim
68 words
The pressure chamber of claim 1 wherein the pressure dome is supported for motion between a first position wherein its free edge is supported to enclose a volume on an upper surface of the base plate and a second position wherein its free edge is removed from the base plate to allow free insertion or removal of a test object on the upper surface of the base plate.
Claim 4
Dependent Claim
39 words
The pressure chamber of claim 2 including a resilient gasket operative to be disposed between the free edge of the pressure dome and the supporting section of the base plate to form a pressure resistant seal between the two.
Claim 5
Dependent Claim
76 words
The pressure chamber of claim 1 wherein said manifold volume is defined by a surface of the base plate, a thin sheet metal disc supported in spaced relation to the base plate, below the base plate, and a resilient annular gasket connecting the edge of the disc to the base plate so that the center of the disc may flex toward and away from the base plate in response to pressure variations within the manifold volume.
Claim 6
Dependent Claim
30 words
The pressure chamber of claim 4 including a rigid steel ring having a diameter substantially equal to the metal disc affixed beneath the base plate and supporting said resilient gasket.
Claim 7
Dependent Claim
57 words
The pressure chamber of claim 1 wherein said means for maintaining pressure equilibrium in the manifold volume and the volume defined by the pressure dome and the base includes apertures formed through the base plate so that the manifold volume and the volume beneath the pressure dome of the base plate are in communication with one another.
Claim 8
Dependent Claim
182 words
A pressure chamber useful for performing double exposure interferometric analysis of the surface of a test object before and after pressure changes, comprising: a relatively rigid base plate having a substantially horizontal orientation; means operative to support the base plate in a generally horizontal attitude above a rigid mounting surface; a concave pressure cover having a free edge; a resilient gasket formed about the free edge of the cover; means for positioning the cover with the gasket in pressured contact with an upper surface of the base plate to define an enclosed volume between the cover and the base plate; means for defining an enclosed manifold volume on the underside of the base plate, the manifold volume having a projection coextensive with the projection of the cover on the base plate; passages through the base plate communicating the manifold volume with the volume within the cover; and means for modifying the pressure within the manifold volume and the volume within the cover, whereby no net pressure forces are exerted on the base plate as a result of pressure changes within the cover.
Claim 9
Dependent Claim
182 words
A pressure chamber useful for performing double exposure interferometric analysis of the surface of a test object before and after pressure changes, comprising: a relatively rigid base plate having a substantially horizontal orientation; means operative to support the base plate in a generally horizontal attitude above a rigid mounting surface; a concave pressure cover having a free edge; a resilient gasket formed about the free edge of the cover; means for positioning the cover with the gasket in pressured contact with an upper surface of the base plate to define an enclosed volume between the cover and the base plate; means for defining an enclosed manifold volume on the underside of the base plate, the manifold volume having a projection coextensive with the projection of the cover on the base plate; passages through the base plate communicating the manifold volume with the volume within the cover; and means for modifying the pressure within the manifold volume and the volume within the cover, whereby no net pressure forces are exerted on the base plate as a result of pressure changes within the cover.
Claim 10
Dependent Claim
31 words
The pressure chamber of claim 7 in which said means operative to support the base plate in a generally horizontal attitude above a rigid mounting surface comprises a vibration isolating mount.