Patent US5007689A successfully refreshed from Google Patents.
US5007689A
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Infra-red transmitting optical components and optical coatings therefor
Assignee: UK Secretary of State for Defence
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Filing: 1989-08-30
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Granted: 1991-04-16
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Expires: 2009-08-30
Abstract
Abstract Infrared transmitting optical components having a wide variety of substrates (e.g. ZnS, ZnSe, Ge, Si, SiO2) are disclosed all with an optical coating of boron phosphide (BP). The boron phosphide may be a single layer coating or one layer of a multilayer coating in which case it is preferably the penultimate layer. Coated components are provided which are very low in absorption, which are operable at high temperatures with minimal transmission loss, and which are transmitting in two IR wavebands. The boron phosphide layer is deposited by plasma-assisted chemical vapor deposition at a temperature in the range 300 DEG -500 DEG C. preferably using feedstock gases which are hydrogen-fee. Boron phosphide coatings of up to 40 mu m in thickness have been achieved.
Inventors
- 👤 Christopher J. Kelly
- 👤 Keith L. Lewis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; H; H10; H10F; H10F77/00; H10F77/30
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
41 words
An infra-red transmitting optical component having an anti-reflecting coating thereon of boron phosphide, the coating having been deposited on the component by plasma-assisted chemical vapor deposition at a temperature of less than about 500° C. and having a disordered non-crystalline structure.
Claim 2
Dependent Claim
41 words
An infra-red transmitting optical component having an anti-reflecting coating thereon of boron phosphide, the coating having been deposited on the component by plasma-assisted chemical vapor deposition at a temperature of less than about 500° C. and having a disordered non-crystalline structure.
Claim 3
Dependent Claim
23 words
A component as claimed in claim 1, wherein the coating is the result of deposition at a temperature in the range 300-500° C.
Claim 4
Dependent Claim
73 words
A component as claimed in claim 1, wherein the component comprises a substrate of zinc sulphide (ZnS) and the boron phosphide coating is 2 microns in thickness on the face of the substrate, the component having a refractive index value of 3.1, an average absorption co-efficient value of 20 in 3 to 5 micron waveband and 80 in the 8 to 11.5 micron waveband and respective average absorption values of 0.3 and 0.8.
Claim 5
Dependent Claim
35 words
A component as claimed in claim 1, wherein the component comprises a substrate of silicon (Si) and the boron phosphide coating is free of deep absorption bands in the 2.5 to 50 micron length range.
Claim 6
Dependent Claim
57 words
A component as claimed in claim 1, wherein the component comprises a substrate of quartz (SiO 2 ) and the boron phosphide coating is 4 microns in thickness, the component having a transmission characteristic for the 0.5 to 2.5 micron waveband which rises from zero at about 0.5 micron to about 90% at and above 1.06 micron.
Claim 7
Dependent Claim
41 words
A component as claimed in claim 1, wherein the component comprises a zinc selenide (ZnSe) substrate having a transmission loss at temperatures up to 500° C. for the 8 to 11.5 micron waveband of about 0.4% per micron of coating thickness.
Claim 8
Dependent Claim
19 words
A component as claimed in claim 1, wherein the plasma-assisted chemical vapor deposition utilizes feedstock gases which are hydrogen-free.
Claim 9
Dependent Claim
23 words
A component as claimed in claim 1, wherein the boron phosphide coating comprises one layer of a multilayer coating on the component substrate.
Claim 10
Dependent Claim
26 words
A component as claimed in claim 8, wherein the multilayer coating comprises a final layer of diamond-like carbon (DLC) and the penultimate layer is boron phosphide.
Claim 11
Dependent Claim
52 words
A component as claimed in claim 9, wherein the multilayer coating is as set forth in the Table, the material thicknesses being measured in fractions of a quarter wave at 10 microns: TABLE
______________________________________
Material Thickness Index
______________________________________
Substrate ZnS 2.2
First layer
BP 0.3833 3.1
Second layer
DLC 1.1365 2.0
______________________________________
Claim 12
Dependent Claim
61 words
A component as claimed in claim 9, wherein the multilayer coating is as set forth in the Table, the material thicknesses being measured in fractions of a quarter wave at 10 microns: TABLE
______________________________________
Material Thickness Index
______________________________________
Substrate ZnS
First layer
BP 0.7343 3.1
Second layer
Ge 1.1825 4.1
Third layer
BP 0.2670 3.1
Fourth layer
DLC 0.7801 2.0
______________________________________
Claim 13
Dependent Claim
27 words
A component as claimed in claim 1, wherein the boron phosphide coating comprises surface etching to the `Moth-eye effect` to provide characteristics similar to a multilayer coating.
Claim 14
Dependent Claim
22 words
A component as claimed in claim 1 having a boron phosphide coating with a thickness in the range up to 40 microns.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-15 | 1994-10-15 | 1995-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-15 | 1998-10-15 | 1999-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-15 | 2002-10-15 | 2003-04-16 | $7700.00 | Window Closed / Lapsed |