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US5006906A
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Integrated semiconductor waveguide/photodetector
Assignee: Nytell Software LLC
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Filing: 1988-08-29
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Granted: 1991-04-09
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Expires: 2008-08-29
Abstract
Abstract An integrated waveguide/detector optical device is fabricated on a semiconductor substrate whose surface includes a step region. Guiding and absorbing layers are grown on the surface in sequence overlying the step region. This is done in a single epitaxial growth cycle. The absorbing layer is patterned to form a non-planar detector that overlies the guiding layer in the step region. Due to bending of the guiding layer in the step region, a strong coupling exists between the overlying detector and light propagating in the guiding layer. Easily fabricated integrated devices having short-length (high-speed) photodetectors are thereby made feasible.
Inventors
- 👤 Robert J. Deri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:46
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/10; G02B6/12; G02B6/122; H; H10; H10F; H10F77/00; H10F77/10; H10F77/14; H10F77/147; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
100 words
An integrated optical device comprising: a substrate having a step region in one main planar surface thereof, means including an optical signal waveguiding layer having a straight portion on said main planar surface and a curved nonplanar portion overlying said step region for propagating an optical signal along said planar surface toward and over said step region, and means including a curved nonplanar photodetecting layer overlying substantially the entire curved nonplanar portion of said waveguiding layer in said step region for detecting in said step region the optical signal propagated along said planar surface toward and over said step region.
Claim 2
Dependent Claim
100 words
An integrated optical device comprising: a substrate having a step region in one main planar surface thereof, means including an optical signal waveguiding layer having a straight portion on said main planar surface and a curved nonplanar portion overlying said step region for propagating an optical signal along said planar surface toward and over said step region, and means including a curved nonplanar photodetecting layer overlying substantially the entire curved nonplanar portion of said waveguiding layer in said step region for detecting in said step region the optical signal propagated along said planar surface toward and over said step region.
Claim 3
Dependent Claim
12 words
A device as in claim 1 wherein said substrate comprises a semiconductor.
Claim 4
Dependent Claim
12 words
A device as in claim 2 wherein said semiconductor substrate comprises InP.
Claim 5
Dependent Claim
15 words
A device as in claim 3 wherein said waveguiding layer includes In, Ga and As.
Claim 6
Dependent Claim
15 words
A device as in claim 4 wherein said waveguiding layer comprises a quaternary semiconductor material.
Claim 7
Dependent Claim
19 words
A device as in claim 5 wherein said quaternary material comprises a material selected from the class designated InGaAsP.
Claim 8
Dependent Claim
19 words
A device as in claim 5 wherein said quaternary material comprises a material selected from the class designated InGaAlAs.
Claim 9
Dependent Claim
13 words
A device as in claim 4 wherein said waveguiding layer comprises a superlattice.
Claim 10
Dependent Claim
16 words
A device as in claim 8 wherein said superlattice comprises interleaved layers of InP and InGaAs.
Claim 11
Dependent Claim
12 words
A device as in claim 4 wherein said photodetecting layer comprises InGaAs.
Claim 12
Dependent Claim
21 words
A device as in claim 1 further including electrical contacts on the respective top and bottom surfaces of said photodetecting layer.
Claim 13
Dependent Claim
18 words
A device as in claim 1 further including spaced-apart contacts on the top surface of said photodetecting layer.
Claim 14
Dependent Claim
12 words
A device as in claim 12 wherein said contacts comprise interdigitated fingers.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-08 | 1994-10-08 | 1995-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-08 | 1998-10-08 | 1999-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-08 | 2002-10-08 | 2003-04-09 | $7700.00 | Window Closed / Lapsed |