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US5004525A Expired / Lapsed US ⏱️ 0.0 years remaining

Copper electroplating composition

Assignee: Shipley Co Inc
•
Filing: 1989-11-20
•
Granted: 1991-04-02
•
Expires: 2009-11-20
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Abstract

Abstract A composition for electroplating copper onto a conductive surface comprising a solution soluble copper salt and an acid electrolyte, said copper salt being present in a concentration of from about 1 to 10 grams per liter of solution and said acid being present in a concentration whereby the acid to copper ratio preferably varies between about 30 to 1 and 50 to 1. The composition is especially useful for the plating of walls of cylindrical openings having a ratio of height to diameter of at least 10 to 1 and a length of at least 0.100 inches.

Inventors

  • 👤 Roger F. Bernards
  • 👤 Gordon Fisher
  • 👤 Wade Sonnenberg

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 22:49
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/02; C25D3/38; H; H05; H05K; H05K3/00; H05K3/40; H05K3/42; H05K2203/00; H05K2203/16; H05K2203/162

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 88 words
An aqueous acid copper plating solution comprising one or more bath soluble copper salts in a concentration sufficient to provide a total copper ion content in an amount varying between 1 and 10 grams per liter and sufficient to support plating, acid as an electrolyte and a surfactant conforming to the formula R--O--(CH.sub.2 CH.sub.2 O).sub.n H where R is an aryl or alkyl group containing from about 2 to 20 carbon atoms and n is an integer whereby the molecular weight of the surfactant is at least 500,000.
Claim 2
Dependent Claim 88 words
An aqueous acid copper plating solution comprising one or more bath soluble copper salts in a concentration sufficient to provide a total copper ion content in an amount varying between 1 and 10 grams per liter and sufficient to support plating, acid as an electrolyte and a surfactant conforming to the formula R--O--(CH.sub.2 CH.sub.2 O).sub.n H where R is an aryl or alkyl group containing from about 2 to 20 carbon atoms and n is an integer whereby the molecular weight of the surfactant is at least 500,000.
Claim 3
Dependent Claim 20 words
The copper plating solution of claim 1 where the copper salt is cupric sulfate and the acid is sulfuric acid.
Claim 4
Dependent Claim 11 words
The copper plating solution of claim 1 where R is ethylene.
Claim 5
Dependent Claim 18 words
The copper plating solution of claim 1 where the molecular weight of the surfactant is at least 2,500,000.

References Cited (Backward Citations)

US2931760A Cited
US3328273A Cited
US3770598A Cited
US4374709A Cited
US4384930A Cited
GB2123036A Cited
US4555315A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-04-01 1994-10-01 1995-04-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-04-01 1998-10-01 1999-04-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-04-01 2002-10-01 2003-04-02 $7700.00 Window Closed / Lapsed

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