Solid state pressure sensor

Claim 1

A solid state pressure sensor that comprises: a silicon body having a circumferentially continuous annular peripheral portion and an imperforate central portion bridging said peripheral portion and thinner than said peripheral portion, said body being of integral monolithic construction that is circumferentially symmetrical about the axis of said peripheral portion, strain gauge sensor means deposited on said body so as to form an integral assembly with said body, and being constructed and arranged to provide electrical signals as a function of flexure of said central portion with respect to said peripheral portion, a pair of fittings bonded to said body peripheral portion on opposite sides of said central portion, each of said fittings including means cooperating with said body to form a sealed fluid cavity on an associated side of said central portion, each of said cavities being circumferentially symmetrical with respect to said axis, electrical leads deposited on said body and extending to a radial edge of said body for connecting said sensor means to external circuitry, said central and peripheral portions of said body having a common planar surface, said sensor means being positioned on said surface so as to be disposed within one of said cavities, said leads being on said surface and extending through an adjacent joint between said surface and one of said fittings, and a housing externally surrounding said body and enclosing said body and at least a portion of said fittings, electrical terminal means on said housing and means connecting said terminal means to said leads, said fittings being identical and including respective necks extending coaxially with said axis, said housing including means sealingly embracing said necks.