Optical type encoder

Claim 2

An optical type coder having a light source for projecting at least one light beam onto a movable optical type scale having a diffraction grating formed thereon, forming interferenced light waves by the use of diffracted light waves from said scale, and photoelectrically converting said interferenced light waves to thereby measure the displacement of said scale, wherein a beam splitter splits said at least one light beam into first and second light beams said first and second light beams being caused by a first reflecting means to enter substantially the same position on said scale from different first and second directions, first and second diffracted light beams emerging from said scale at said position are received by a second reflecting means and are directed to said position by said second reflecting means, and the first and second diffracted light beams, emerging in said first and second directions by said first and second light beams being diffracted by said scale, are superposed one upon the other to thereby form interferenced light waves, and wherein light components created by said first and second light beams being regularly reflected at said position are not included in said interferenced light waves.

Claim 3

An optical type encoder having: a light source; a beam splitter for dividing a light beam from said light source into first and second light beams; an optical system for causing said first light beam and said second light beam to obliquely enter substantially the same position on a movable diffraction grating from a first direction and a second direction differing from said first direction, respectively, so that said first and second light beams are diffracted by said diffraction grating and first and second diffracted light beams emerge from said diffraction grating in predetermined directions; reflecting means for retroflecting said first and second diffracted light beams and directing them to said position to thereby diffract said first and second diffracted light beams by said diffraction grating and cause a first re-diffracted light beam and a second re-diffracted light beam to emerge in said first direction and said second direction, respectively; and light receiving means for receiving said first and second re-diffracted light beams through said optical systems and said beam splitter, said light receiving means photoelectrically converting interference light waves formed by said first and second re-diffracted light beams and outputting a signal conforming to a displacement of said diffraction grating, said optical system and said beam splitter being designed such that light components created by said first and second light beams being regularly reflected by said diffraction grating are not directed to said light receiving means.

Claim 4

An optical type encoder having: a light source; a beam splitter for dividing a light beam from said light source into first and second light beams; an optical system for causing said first light beam and said second light beam to obliquely enter substantially the same position on a movable diffraction grating from a first direction and a second direction differing from said first direction, respectively, so that said first and second light beams are diffracted by said diffraction grating and first and second diffracted light beams emerge from said diffraction grating in predetermined directions; reflecting means for retroflecting said first and second diffracted light beams and directing them to said position to thereby diffract said first and second diffracted light beams by said diffraction grating and cause a first re-diffracted light beam and a second re-diffracted light beam to emerge in said first direction and said second direction, respectively; and light receiving means for receiving said first and second re-diffracted light beams through said optical systems and said beam splitter, said light receiving means photoelectrically converting interference light waves formed by said first and second re-diffracted light beams and outputting a signal conforming to a displacement of said diffraction grating, said optical system and said beam splitter being designed such that light components created by said first and second light beams being regularly reflected by said diffraction grating are not directed to said light receiving means.

Claim 5

An encoder according to claim 2, wherein said beam splitter is a polarizing beam splitter.

Claim 6

An encoder according to claim 3, wherein said optical system has a first quarter wavelength plate provided in the optical path of said first light beam, and a second quarter wavelength plate provided in the optical path of said second light beam, the direction of the advanced phase axis of said second quarter wavelength plate for said second light beam being substantially equal to the direction of the advanced phase axis of said first quarter wavelength plate for said first light beam.

Claim 7

An encoder according to claim 4, wherein said optical system further has a first reflecting mirror disposed in the optical path between said first quarter wavelength plate and said diffraction grating for reflecting said first light beam, and a second reflecting mirror disposed in the optical path between said second quarter wavelength plate and said diffraction grating for reflecting said second light beam, and said first and second mirrors determine the angles of incidence of said first and second light beams onto said diffraction grating.

Claim 8

An encoder according to claim 2, wherein said light source includes a semiconductor laser.

Claim 9

An encoder according to claim 2, wherein said light receiving means has a second beam splitter for dividing said interferenced light waves into first and second interferenced light beams, a first light receiving element for receiving said first interferenced light beam, and a second light receiving element for receiving said second interferenced light beam.

Claim 10

An optical type encoder for optically measuring the displacement of a movable scale having a diffraction grating formed thereon, having: a laser; a polarizing beam splitter provided in the optical path of laser light emitted from said laser; an optical system for illuminating said scale by a reflected light beam and a transmitted light beam from said polarizing beam splitter, said optical system causing said reflected light beam to enter a predetermined position on said scale at an angle of incidence θ and causing said transmitted light beam to enter said predetermined position at an angle of incidence -θ; a reflecting system for reflecting first and second diffracted light beams created by said reflected light beam and said transmitted light beam being diffracted by the diffraction grating of said scale and emerging from said diffraction grating, and directing them to said predetermined position to thereby cause a first re-diffracted light beam to emerge from said predetermined position at said angle θ and cause a second re-diffracted light beam to emerge from said predetermined position at said angle -θ; a first photodetector for receiving said first and second re-diffracted beams superposed one upon the other through said optical system and said polarizing beams splitter, through an analyzer, said first photodetector outputting a signal conforming to a displacement of said scale; and first and second quarter wavelength plates provided in the optical paths, respectively, of said reflected light beam and said transmitted light beam in said optical system, the direction of the advanced phase axis of said first quarter wavelength plate for said reflected light beams and the direction of the advanced phase axis of said second quarter wavelength plate for said transmitted light beam being substantially equal to each other.

Claim 11

An optical type encoder for optically measuring the displacement of a movable scale having a diffraction grating formed thereon, having: a laser; a polarizing beam splitter provided in the optical path of laser light emitted from said laser; an optical system for illuminating said scale by a reflected light beam and a transmitted light beam from said polarizing beam splitter, said optical system causing said reflected light beam to enter a predetermined position on said scale at an angle of incidence θ and causing said transmitted light beam to enter said predetermined position at an angle of incidence -θ; a reflecting system for reflecting first and second diffracted light beams created by said reflected light beam and said transmitted light beam being diffracted by the diffraction grating of said scale and emerging from said diffraction grating, and directing them to said predetermined position to thereby cause a first re-diffracted light beam to emerge from said predetermined position at said angle θ and cause a second re-diffracted light beam to emerge from said predetermined position at said angle -θ; a first photodetector for receiving said first and second re-diffracted beams superposed one upon the other through said optical system and said polarizing beams splitter, through an analyzer, said first photodetector outputting a signal conforming to a displacement of said scale; and first and second quarter wavelength plates provided in the optical paths, respectively, of said reflected light beam and said transmitted light beam in said optical system, the direction of the advanced phase axis of said first quarter wavelength plate for said reflected light beams and the direction of the advanced phase axis of said second quarter wavelength plate for said transmitted light beam being substantially equal to each other.

Claim 12

An encoder according to claim 8, wherein said laser is a semiconductor laser, and a collimator lens for collimating the laser light from said laser is provided between said laser and said polarizing beam splitter.

Claim 13

An encoder according to claim 8, wherein said optical system has a first mirror for reflecting said reflected light beam and directing it to said scale, and a second mirror for reflecting said transmitted light beam and directing it to said scale.

Claim 14

An encoder according to claim 8, wherein said optical system has a prism having a first inclined surface for refracting said reflected light beam and directing it to said scale and a second inclined surface for refracting said transmitted light beam and directing it to said scale.

Claim 15

An encoder according to claim 8, wherein said reflecting system forms a common optical path for said first and second diffracted light beams.

Claim 16

An encoder according to claim 12, wherein said optical system causes said reflected light beam and said transmitted light beam to enter said predetermined position so that said first and second diffracted light beams emerge perpendicularly from said scale.

Claim 17

An encoder according to claim 13, wherein said reflecting system causes said first and second diffracted light beams to enter said scale perpendicularly thereto.

Claim 18

An encoder according to claim 14, wherein said reflecting system has a lens and a reflecting mirror.

Claim 19

An encoder according to claim 8, wherein said first and second diffracted light beams are +1st-order diffracted light beams.

Claim 20

An encoder according to claim 16, wherein said first re-diffracted light beam is +1st-order re-diffracted light beam created by the +1st-order diffracted light beam being diffracted, and said second re-diffracted light beam is -1st-order re-diffracted light beam created by the -1st-order diffracted light beam being diffracted.

Claim 21

An encoder according to claim 8, further having a quarter wavelength plate provided between said polarizing beam splitter and said analyzer.

Claim 22

An encoder according to claim 18, further having a half-mirror provided between said first-mentioned analyzer and said quarter wavelength plate, a second analyzer and a second photodetector, said first photodetector receiving the light transmitted through said half-mirror, said second photodetector receiving the light reflected by said half-mirror through said second analyzer, the polarization azimuth of said second analyzer having an inclination of 45° relative to that of said first analyzer, whereby said second photodetector outputs a signal 90° out of phase with the signal from said first photodetector.

Claim 23

A displacement measuring apparatus for measuring the displacement of a movable diffraction grating, having: optical means forming first and second optical paths which intersect each other at said diffraction grating; light source means for supplying a light beam for illuminating said diffraction grating along each of said optical paths; light receiving means for receiving first and second diffracted light beams emerging from said diffraction grating in the directions of said first and second optical paths, through said optical means, said light receiving means photoelectrically converting an interference fringe formed by said first and second diffracted light beams and outputting a signal conforming to a displacement of said diffraction grating; and means for causing any light beam passed through both of said optical paths and said second optical path not to enter said light receiving means.

Claim 24

A displacement measuring apparatus for measuring the displacement of a movable diffraction grating, having: optical means forming first and second optical paths which intersect each other at said diffraction grating; light source means for supplying a light beam for illuminating said diffraction grating along each of said optical paths; light receiving means for receiving first and second diffracted light beams emerging from said diffraction grating in the directions of said first and second optical paths, through said optical means, said light receiving means photoelectrically converting an interference fringe formed by said first and second diffracted light beams and outputting a signal conforming to a displacement of said diffraction grating; and means for causing any light beam passed through both of said optical paths and said second optical path not to enter said light receiving means.

Claim 25

An apparatus according to claim 20, wherein said optical means has a reflecting system cooperating with said diffraction grating to form a third optical path, and said reflecting system reflects a plurality of diffracted light beams created by said diffraction grating and directs them to said diffraction grating, thereby creating said first and second diffracted light beams.