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US4998002A
Expired / Lapsed
US
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Wire-bonding method, wire-bonding apparatus, and semiconductor device produced by the wire-bonding method
Assignee: Hitachi Ltd
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Filing: 1988-01-26
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Granted: 1991-03-05
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Expires: 2008-01-26
Abstract
Abstract A semiconductor device is fabricated by placing a semiconductor chip with at least one bonding pad on the bonding stage of a wire bonder. A coated wire on a spool is passed through a bore in a bonding capillary so that one end of the wire projects from the lower tip of the capillary. An electrical arc discharge is created between the wire tip projecting from the capillary and a discharge electrode by applying a first electric potential to this wire tip through the opposite end of the wire and applying a second electric potential to the electrode. A ball is formed on the end of the wire and this ball is bonded to the pad with the lower tip of the capillary.
Inventors
- 👤 Susumu Okikawa
- 👤 Michio Tanimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 15:50
CPC Classifications
B; B23; B23K; B23K20/00; B23K20/002; B23K20/004; B23K20/005; B23K20/007; B23K20/24; H; H10; H10W; H10W72/00; H10W72/071; H10W72/075; H10W72/0711; H10W72/01; H10W72/015; H10W72/01551; H10W72/07141; H10W72/07168; H10W72/07502; H10W72/07511; H10W72/07521; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/07541; H10W72/50; H10W72/521; H10W72/522; H10W72/531; H10W72/536; H10W72/5363; H10W72/541; H10W72/543; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/5525; H10W72/553; H10W72/555; H10W72/59; H10W72/851; H10W72/874; H10W72/884; H10W72/90; H10W72/951; H10W72/981; H10W72/983; H10W74/00; H10W90/00; H10W90/701; H10W90/731; H10W90/736; H10W90/751; H10W90/756
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
217 words
A method for fabricating a semiconductor device, comprising the steps of: (a) placing a semiconductor device chip having at least one bonding pad on an upper major surface thereof, and placing at least one lead, on a bonding stage of a wire bonder; (b) providing a bonding capillary, through a bore thereof, with a coated wire coiled on a spool so that one end of the wire projects from a lower tip of the capillary through the bore, an opposite end of the wire being adjacent the spool, the spool including a conductive portion; (c) generating an arc discharge between the one end of the wire, projected from the tip of the capillary, and an opposed discharge electrode, by applying a first electric potential to the one end of the wire through the opposite end of the wire and applying a second electric potential to the electrode, thereby forming a ball on the one end of the wire, wherein the conductive portion of the spool is connected to the first electric potential, and wherein said arc discharge is generated by an arcing circuit, the arcing circuit being connected to said first electric potential; and then (d) bonding the ball to the bonding pad by pressing the ball against the pad with the lower tip of the capillary.
Claim 2
Independent Claim
217 words
A method for fabricating a semiconductor device, comprising the steps of: (a) placing a semiconductor device chip having at least one bonding pad on an upper major surface thereof, and placing at least one lead, on a bonding stage of a wire bonder; (b) providing a bonding capillary, through a bore thereof, with a coated wire coiled on a spool so that one end of the wire projects from a lower tip of the capillary through the bore, an opposite end of the wire being adjacent the spool, the spool including a conductive portion; (c) generating an arc discharge between the one end of the wire, projected from the tip of the capillary, and an opposed discharge electrode, by applying a first electric potential to the one end of the wire through the opposite end of the wire and applying a second electric potential to the electrode, thereby forming a ball on the one end of the wire, wherein the conductive portion of the spool is connected to the first electric potential, and wherein said arc discharge is generated by an arcing circuit, the arcing circuit being connected to said first electric potential; and then (d) bonding the ball to the bonding pad by pressing the ball against the pad with the lower tip of the capillary.
Claim 3
Dependent Claim
52 words
A method according to claim 1, wherein the conductive portion of the spool is electrically connected to the opposite end of the wire so that the first electric potential is applied to the one end of the wire from the conductive portion of the spool through the opposite end of the wire.
Claim 4
Dependent Claim
49 words
A method according to claim 2, wherein at least a portion of said opposite end of a wire has the coating removed therefrom, the electrical connection of the conductive portion of the spool to the opposite end of the wire being via the uncoated portion of said opposite end.
Claim 5
Dependent Claim
14 words
A method according to claim 3, wherein the first electric potential is ground potential.
Claim 6
Dependent Claim
21 words
A method according to claim 4, wherein the first electric potential is a plus potential relative to the second electric potential.
Claim 7
Dependent Claim
14 words
A method according to claim 2, wherein the first electric potential is ground potential.
Claim 8
Dependent Claim
14 words
A method according to claim 1, wherein the first electric potential is ground potential.
Claim 9
Dependent Claim
21 words
A method according to claim 1, wherein the first electric potential is a plus potential relative to the second electric potential.
Claim 10
Dependent Claim
23 words
A method according to claim 1, wherein, during said bonding, the opposite end of the wire is connected to said first electric potential.
Claim 11
Dependent Claim
14 words
A method according to claim 9, wherein said first electric potential is ground potential.
Claim 12
Dependent Claim
47 words
A method according to claim 1, wherein, while generating said arc discharge to thereby form the ball, the one end of the wire has a shield gas provided adjacent thereto so as to provide an inert gas atmosphere around the one end during formation of the ball.
Claim 13
Dependent Claim
50 words
A method according to claim 1 wherein, during forming of the ball by generating the arc discharge, the one end of the wire is covered by a cover member so as to prevent any coating of the coated wire from falling on the semiconductor device chip on the bonding stage.
Claim 14
Dependent Claim
32 words
A method according to claim 1, wherein, when the ball is formed at the one end by generating the arc discharge, a fluid is directed against the one end of the wire.
Claim 15
Dependent Claim
13 words
A method according to claim 13, wherein said fluid is a cooling fluid.
Claim 16
Dependent Claim
32 words
A method according to claim 1, wherein, in the step of generating the arc discharge to thereby form the ball on the one end of the wire, the metal wire is denuded.
Claim 17
Dependent Claim
19 words
A method according to claim 1, wherein the at least one lead is spaced from the semiconductor device chip.
Claim 18
Independent Claim
230 words
A method for fabricating a semiconductor device, comprising the steps of: (a) placing a semiconductor device chip having at least one bonding pad on an upper major surface thereof, and placing at least one lead, on a wire bonding stage of a wire bonder; (b) providing a bonding capillary, through a bore thereof, with an insulating film-coated metal bonding wire coiled on a spool so that one end of the wire projects from a lower tip of the capillary through the bore; (c) generating an arc discharge through a gap between the one end of the wire, projected from the lower tip of the capillary, and an opposed discharge electrode, by applying a first electric potential to the one end of the wire through another end of the wire, adjacent to the spool, and applying a second electric potential to the opposed discharge electrode, thereby forming a ball on the one end of the wire, while the other end of the wire is connected to a ground electric potential common to the wire bonder, so as to prevent an undesirable discharge between the wire and the wire bonder from taking place; and then (d) bonding the wire to the bonding pad by pressing the ball against the pad with the lower tip of the capillary, while the other end of the wire is connected to the common ground electric potential.
Claim 19
Independent Claim
230 words
A method for fabricating a semiconductor device, comprising the steps of: (a) placing a semiconductor device chip having at least one bonding pad on an upper major surface thereof, and placing at least one lead, on a wire bonding stage of a wire bonder; (b) providing a bonding capillary, through a bore thereof, with an insulating film-coated metal bonding wire coiled on a spool so that one end of the wire projects from a lower tip of the capillary through the bore; (c) generating an arc discharge through a gap between the one end of the wire, projected from the lower tip of the capillary, and an opposed discharge electrode, by applying a first electric potential to the one end of the wire through another end of the wire, adjacent to the spool, and applying a second electric potential to the opposed discharge electrode, thereby forming a ball on the one end of the wire, while the other end of the wire is connected to a ground electric potential common to the wire bonder, so as to prevent an undesirable discharge between the wire and the wire bonder from taking place; and then (d) bonding the wire to the bonding pad by pressing the ball against the pad with the lower tip of the capillary, while the other end of the wire is connected to the common ground electric potential.
Claim 20
Dependent Claim
30 words
A method according to claim 17, wherein the wire has been coated over the substantial full length thereof with a thin film of an organic resin as the insulating film.
Claim 21
Dependent Claim
39 words
A method according to claim 18, which comprises the further step, after (d), of wedge-bonding the wire to one of the at least one lead at a predetermined point between the one and the other ends of the wire.
Claim 22
Dependent Claim
21 words
A method according to claim 19, wherein the first electric potential is a plus potential relative to the second electric potential.
Claim 23
Dependent Claim
14 words
A method according to claim 20, wherein the spool is made of a metal.
Claim 24
Dependent Claim
13 words
A method according to claim 21, wherein the spool is made of aluminum.
Claim 25
Dependent Claim
15 words
A method according to claim 20, wherein the metal bonding wire is made of gold.
Claim 26
Dependent Claim
15 words
A method according to claim 20, wherein the metal bonding wire is made of copper.
Claim 27
Dependent Claim
15 words
A method according to claim 20, wherein the metal bonding wire is made of aluminum.
Claim 28
Dependent Claim
17 words
A method according to claim 20, wherein the thin insulating film is made of a polyurethane resin.
Claim 29
Dependent Claim
26 words
A method according to claim 20, wherein the common ground electric potential is electrically common to that of an arc generator for generating the arc discharge.
Claim 30
Dependent Claim
38 words
A method according to claim 20, which includes the further step of evacuating vapor of the organic resin produced by the heat of the arc discharge, through an evacuating nozzle adjacent to the one end of the wire.
Claim 31
Dependent Claim
25 words
A method according to claim 20, wherein the wedge-bonding is performed with removing the thin insulating film, by an ultrasonic vibration of the bonding capillary.
Claim 32
Dependent Claim
49 words
A method according to claim 18, wherein, in the step of generating the arc discharge to thereby form the ball on the one end of the wire, the metal wire is denuded, so as to denude the metal wire while the arc discharge to form the ball is performed.
Claim 33
Dependent Claim
29 words
A method according to claim 18, wherein, in the step of generating the arc discharge, the insulating film is removed from the one end of the metal bonding wire.
Claim 34
Dependent Claim
29 words
A method according to claim 17, wherein, in the step of generating the arc discharge, the insulating film is removed from the one end of the metal bonding wire.
Claim 35
Dependent Claim
33 words
A method according to claim 17, wherein, in the step of generating the arc discharge to thereby form the ball on the one end of the wire, the metal bonding wire is denuded.
Claim 36
Dependent Claim
22 words
A method according to claim 17, wherein said at least one lead is at least one lead that is outside the chip.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-04 | 1994-09-03 | 1995-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-04 | 1998-09-03 | 1999-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-04 | 2002-09-03 | 2003-03-05 | $7700.00 | Window Closed / Lapsed |