US4997869A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Production of electronic coatings by spin coating a partially fluorinated polyimide composition
Assignee: Albemarle Corp
•
Filing: 1988-10-11
•
Granted: 1991-03-05
•
Expires: 2008-10-11
Abstract
Abstract In humid atmospheres (e.g., 40% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyimides tend to be unstable in the sense that during spin coating operations undesirable precipitate formation occurs on the rotating surface of the wafer. The result is the formation of unacceptable coatings due to their irregularity and lack of uniformity. Described are solutions of these polyimide polymers in a solvent containing one or more liquid aromatic hydrocarbons having a boiling point of at least about 110° C. and one or more dipolar aprotic solvents having a boiling point of at least about 150° C., such that the solution (a) contains on a weight basis from about 5% to about 50% of the polyimide, and (b) does not undergo precipitate formation during spin coating in an atmosphere of at least up to about 55% relative humidity.
Inventors
- 👤 Allan A. Eisenbraun
- 👤 Wesley C. Blocker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:03
CPC Classifications
H; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/303; C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1039; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; Y; Y10; Y10S; Y10S148/00; Y10S148/137
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
147 words
A partially fluorinated polyimide composition especially adapted for use in spin coating wafers of semiconductive materials which composition comprises a solution of (i) a 2,2-bis(3,4-dicarb oxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyimide polymer having an inherent viscosity in the range of about 0.05 to about 1.5 dL/g (as measure in N-methylpyrrolidone at room temperature at a concentration of 0.5 g/dL) in (ii) a solvent containing at least 40% by weight of one or more liquid aromatic hydrocarbons having a boiling point or at least about 110° C. and at least 5% by weight of one or more dipolar aprotic solvents having a boiling point of at least about 150° C., such that said solution (a) contains on a weight basis from about 5% to about 50% of such polyimide, and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.
Claim 2
Dependent Claim
147 words
A partially fluorinated polyimide composition especially adapted for use in spin coating wafers of semiconductive materials which composition comprises a solution of (i) a 2,2-bis(3,4-dicarb oxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyimide polymer having an inherent viscosity in the range of about 0.05 to about 1.5 dL/g (as measure in N-methylpyrrolidone at room temperature at a concentration of 0.5 g/dL) in (ii) a solvent containing at least 40% by weight of one or more liquid aromatic hydrocarbons having a boiling point or at least about 110° C. and at least 5% by weight of one or more dipolar aprotic solvents having a boiling point of at least about 150° C., such that said solution (a) contains on a weight basis from about 5% to about 50% of such polyimide, and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.
Claim 3
Dependent Claim
13 words
A composition of claim 1 wherein the 2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane of said polyimide is 2,2-bis[4-(4aminophenoxy)phenyl]hexafluoropropane.
Claim 4
Dependent Claim
40 words
A composition of claim 2 wherein the solvent additionally contains at least one additional co-solvent that does not cause the solution to undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.
Claim 5
Dependent Claim
20 words
A composition of claim 2 wherein the solvent is essentially a mixture of N-methylpyrrolidone and one or more liquid methylbenzenes.
Claim 6
Dependent Claim
22 words
A composition of claim 1 wherein said solution contains on a weight basis from about 10% to about 35% of such polyimide.
Claim 7
Dependent Claim
36 words
A composition of claim 1 wherein the inherent viscosity of the polyimide as measured in N-methylpyrrolidone at room temperature at a concentration of 0.5 g/dL is in the range of about 0.1 to about 0.9 dL/g.
Claim 8
Dependent Claim
54 words
A composition of claim 1 wherein said solution contains on a weight basis from about 10% to about 35% of such polyimide, and wherein the inherent viscosity of the polyimide as measured in N-methylpyrrolidone at room temperature at a concentration of 0.5 g/dL is in the range of about 0.1 to about 0.9 dL/g.
Claim 9
Dependent Claim
13 words
A composition of claim 7 wherein the 2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane of said polyimide is 2,2-bis[4-(4aminophenoxy)phenyl]hexafluoropropane.
Claim 10
Dependent Claim
40 words
A composition of claim 8 wherein the solvent additionally contains at least one additional co-solvent that does not cause the solution to undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.
Claim 11
Dependent Claim
13 words
A composition of claim 8 wherein the solvent includes one or more methylbenzenes.
Claim 12
Dependent Claim
12 words
A composition of claim 8 wherein the dipolar aprotic solvent is N-methylpyrrolidone.
Claim 13
Dependent Claim
20 words
A composition of claim 1 wherein the 2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane of said polyimide is 2,2-bis[4-(3aminophenoxy)phenyl]hexafluoropropane, or a combination of 2,2bis[4-(3-aminophenoxy)phenyl]hexafluoropropane and 2,2-bis[4-(4aminophenoxy)phenyl]hexafluoropropane.
References Cited (Backward Citations)
US3356648A
Cited
US4454310A
Cited
US4416973A
Cited
US4454220A
Cited
US4430418A
Cited
US4548891A
Cited
US4792476A
Cited
US4690999A
Cited
US4835197A
Cited
US4920005A
Cited
US4686147A
Cited
US4927736A
Cited
US4803147A
Cited
US4925915A
Cited
US4931540A
Cited
US4904758A
Cited
US4877653A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-04 | 1994-09-03 | 1995-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-04 | 1998-09-03 | 1999-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-04 | 2002-09-03 | 2003-03-05 | $7700.00 | Window Closed / Lapsed |