US4996441A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Lithographic apparatus for structuring a subject
Assignee: Siemens AG
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Filing: 1989-08-21
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Granted: 1991-02-26
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Expires: 2009-08-21
Abstract
Abstract In modern electron beam writers, the subject to be structured is simultaneously processed with a plurality of probes or electron beams. The apparatus of the present invention, instead of sub-dividing a single electron beam into a plurality of probes, utilizes a beam generator having a plurality of sources of electron beams, which are arranged line-like and are imaged demagnified with the assistance of a telecentric electron optical arrangement onto the subject which is to be processed or structured.
Inventors
- 👤 Burkard Lischke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:57
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J37/3177; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
49 words
A lithographic apparatus for structuring a subject with a plurality of particle probes, said apparatus comprising a beam generator composed of a plurality of sources for particle beams arranged in a line, and a first telecentric unit for focussing the particle beams to form particle probes onto the subject.
Claim 2
Dependent Claim
49 words
A lithographic apparatus for structuring a subject with a plurality of particle probes, said apparatus comprising a beam generator composed of a plurality of sources for particle beams arranged in a line, and a first telecentric unit for focussing the particle beams to form particle probes onto the subject.
Claim 3
Dependent Claim
17 words
A lithographic apparatus according to claim 1, which includes means for individual blanking of the particle probes.
Claim 4
Dependent Claim
43 words
A lithographic apparatus according to claim 2, wherein said means for individual blanking includes a first diaphragm comprising a line-shaped arrangement of holes for passage of the particle probes, and deflecting elements for individually deflecting the particle probes onto a beam blanking diaphragm.
Claim 5
Dependent Claim
31 words
A lithographic apparatus according to claim 3, wherein the first diaphragm is arranged in the beam path above the first telecentric unit, with the holes being telecentrically imaged onto the subject.
Claim 6
Dependent Claim
30 words
A lithographic apparatus according to claim 4, wherein the first telecentric unit comprises an objective lens and intermediate images of the sources of particles are disposed on said objective lens.
Claim 7
Dependent Claim
29 words
A lithographic apparatus according to claim 5, wherein a second telecentric unit for imaging the sources of particle beams onto the plane of the first diaphragm having the openings.
Claim 8
Dependent Claim
30 words
A lithographic apparatus according to claim 4, which includes a second telecentric unit for imaging the sources of particle beams into the plane of the first diaphragm having the opening.
Claim 9
Dependent Claim
30 words
A lithographic apparatus according to claim 3, which includes a second telecentric unit for imaging the sources of particle beams into the plane of the first diaphragm having the opening.
Claim 10
Dependent Claim
23 words
A lithographic apparatus according to claim 3, wherein the beam blanking diaphragm is arranged in an objective lens of the first telecentric unit.
Claim 11
Dependent Claim
46 words
A lithographic apparatus according to claim 3, wherein the first diaphragm is arranged in the beam path above the first telecentric unit with the holes being telecentrically imaged onto the subject, said beam blanking diaphragm being arranged inside an objective lens of said first telecentric unit.
Claim 12
Dependent Claim
38 words
A lithographic arrangement according to claim 10, wherein the first telecentric unit includes a condenser lens coacting with the objective lens to focus intermediate images of the sources of the particle beams to lie in the objective lens.
Claim 13
Dependent Claim
25 words
A lithographic apparatus according to claim 11, which includes a second telecentric unit for imaging the particle sources onto the plane of the first diaphragm.
Claim 14
Dependent Claim
25 words
A lithographic apparatus according to claim 10, which includes a second telecentric unit for imaging the particle sources into the plane of the first diaphragm.
Claim 15
Dependent Claim
78 words
A lithographic apparatus according to claim 1, which includes means for individual blanking of particle beams including a first diaphragm composed of a line-shaped arrangement of openings for passage of the particle beams and having deflection elements for individually deflecting the particle probes onto a beam-blanking diaphragm, a second telecentric unit for imaging the particle source onto the plane of the first diaphragms and said beam-blanking diaphragm being arranged in an objective lens of the first telecentric unit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-25 | 1994-08-27 | 1995-02-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-25 | 1998-08-27 | 1999-02-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-25 | 2002-08-27 | 2003-02-26 | $7700.00 | Window Closed / Lapsed |