US4524278A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Charged particle beam exposure device incorporating beam splitting
Assignee: US Philips Corp
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Filing: 1983-02-14
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Granted: 1985-06-18
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Expires: 2003-02-14
Abstract
Abstract An electron source or ion source of a charged particle beam exposure device comprises a matrix of elements, each of which forms an elementary beam. The matrix is arranged in a field space such that the elementary beams emerge from the matrix in a mutually diverging manner. At the area where the distance between the elementary beams is sufficiently large, there is arranged an electrode system with a matrix of beam deflectors in which each of the elementary beams can be independently manipulated. Near a target to be exposed, there is arranged an aperture plate which completely or partly transmits each of the modulated elementary beams so that spot-shaping can be performed. Using the device in accordance with the invention, some one hundred possible different patterns can be written simultaneously.
Inventors
- 👤 Jan B. Le Poole
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 08:57
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J37/3177; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
100 words
A device for exposing a target to be positioned in an object space to a beam of charged particles, said device comprising in sequence along an optical axis a radiation source, a first beam splitting device arranged near said radiation source, said first beam splitting device including two systems of parallel wires directed transversely to one another and means for applying mutually different potentials to said two systems of parallel wires, a multiple beam deflection system including an electrode system and a beam modulation system, a second beam splitting device, and a target positioned near said second beam splitting device.
Claim 2
Independent Claim
100 words
A device for exposing a target to be positioned in an object space to a beam of charged particles, said device comprising in sequence along an optical axis a radiation source, a first beam splitting device arranged near said radiation source, said first beam splitting device including two systems of parallel wires directed transversely to one another and means for applying mutually different potentials to said two systems of parallel wires, a multiple beam deflection system including an electrode system and a beam modulation system, a second beam splitting device, and a target positioned near said second beam splitting device.
Claim 3
Dependent Claim
48 words
A device according to claim 1, wherein said beam modulation system is arranged after said first beam splitting device at a distance to separate elementary radiation beams, and wherein said beam modulation system includes a matrix of individually and independently controllable beam deflectors for each elementary radiation beam.
Claim 4
Dependent Claim
35 words
A device according to claim 1, wherein said multiple beam deflection system includes a lens system for directing elementary radiation beams perpendicularly to said deflection system, and for converging said beams after said deflection system.
Claim 5
Dependent Claim
40 words
A device according to claim 1, wherein said multiple beam deflection system includes at least one aperture plate for transmitting elementary radiation beams, and ring-shaped electrodes adjacent to said at least one aperture plate for applying an electric field thereto.
Claim 6
Dependent Claim
43 words
A device according to claim 1, wherein a first and second gauze structure are located at each side of said multiple beam deflection system, said gauze structure transmitting elementary radiation beams, and wherein ring-shaped electrodes apply an electric field to said gauze structures.
Claim 7
Dependent Claim
42 words
A device according to claim 1, wherein said multiple beam deflection system includes deflection elements for an x-direction and deflection elements for a y-direction, said deflection elements being in planes separated from one another and in planes parallel to said optical axis.
Claim 8
Dependent Claim
19 words
A device according to claim 6, wherein said multiple beam deflection system includes a matrix of controllable mirror electrodes.
Claim 9
Dependent Claim
54 words
A device according to claim 1, wherein said multiple beam deflection system includes an electrically insulating carrier plate, deflection electrodes on either side of said carrier plate, said deflection electrodes being metal layer portions, and electrically conductive tracks provided on said carrier plate, said electrically conductive tracks providing control potentials to said deflection electrodes.
Claim 10
Dependent Claim
26 words
A device according to claim 1, wherein said radiation source includes a matrix of emissive elements, said matrix also acting as said first beam splitting device.
Claim 11
Dependent Claim
23 words
A device according to claim 4, wherein said aperture plate has a hexagonal configuration forming elementary radiation beams with hexagonal or circular cross-sections.
Claim 12
Dependent Claim
23 words
A device according to claim 1, wherein controllable optical means are provided for performing spot-shaping of the charged particles for elementary radiation beams.
Claim 13
Dependent Claim
29 words
A device according to claim 1, wherein an electron-lithographic apparatus is provided for forming patterns, said patterns defining microcircuits by a read apparatus for reading drawings of said patterns.
Claim 14
Dependent Claim
19 words
A device according to claim 1, wherein an ion lithographic apparatus is provided for writing patterns in said target.
Claim 15
Dependent Claim
38 words
A device according to claim 13, wherein said beam modulation system is preceded by means for decelerating an ion beam, and is followed by means for accelerating said ion beam without disturbing mutual relationships of elementary radiation beams.
Claim 16
Independent Claim
100 words
A device for exposing a target to be positioned in an object space to a beam of charged particles, said device comprising in sequence along an optical axis, a radiation source, a first beam splitting device arranged near said radiation source, said first beam splitting device including a gauze structure and an electrode array at each side of said gauze structure to homogenize an electric field generated near said gauze structure, a multiple beam deflection system including an electrode system and a beam modulation system, a second beam splitting device, and a target positioned near said second beam splitting device.
Claim 17
Independent Claim
100 words
A device for exposing a target to be positioned in an object space to a beam of charged particles, said device comprising in sequence along an optical axis, a radiation source, a first beam splitting device arranged near said radiation source, said first beam splitting device including a gauze structure and an electrode array at each side of said gauze structure to homogenize an electric field generated near said gauze structure, a multiple beam deflection system including an electrode system and a beam modulation system, a second beam splitting device, and a target positioned near said second beam splitting device.
Claim 18
Dependent Claim
48 words
A device according to claim 15, wherein said beam modulation system is arranged after said first beam splitting device at a distance to separate elementary radiation beams, and wherein said beam modulation system includes a matrix of individually and independently controllable beam deflectors for each elementary radiation beam.
Claim 19
Dependent Claim
35 words
A device according to claim 15, wherein said multiple beam deflection system includes a lens system for directing elementary radiation beams perpendicularly to said deflection system, and for converging said beams after said deflection system.
Claim 20
Dependent Claim
40 words
A device according to claim 15, wherein said multiple beam deflection system includes at least one aperture plate for transmitting elementary radiation beams, and ring-shaped electrodes adjacent to said at least one aperture plate for applying an electric field thereto.
Claim 21
Dependent Claim
43 words
A device according to claim 15, wherein a first and second gauze structure are located at each side of said multiple beam deflection system, said gauze structure transmitting elementary radiation beams, and wherein ring-shaped electrodes apply an electric field to said gauze structures.
Claim 22
Dependent Claim
42 words
A device according to claim 15, wherein said multiple beam deflection system includes deflection elements for an x-direction and deflection elements for a y-direction, said deflection elements being in planes separated from one another and in planes parallel to said optical axis.
Claim 23
Dependent Claim
19 words
A device according to claim 20, wherein said multiple beam deflection system includes a matrix of controllable mirror electrodes.
Claim 24
Dependent Claim
54 words
A device according to claim 15, wherein said multiple beam deflection system includes an electrically insulating carrier plate, deflection electrodes on either side of said carrier plate, said deflection electrodes being metal layer portions, and electrically conductive tracks provided on said carrier plate, said electrically conductive tracks providing control potentials to said deflection electrodes.
Claim 25
Dependent Claim
26 words
A device according to claim 15, wherein said radiation source includes a matrix of emissive elements, said matrix also acting as said first beam splitting device.
Claim 26
Dependent Claim
23 words
A device according to claim 18, wherein said aperture plate has a hexagonal configuration forming elementary radiation beams with hexagonal or circular cross-sections.
Claim 27
Dependent Claim
23 words
A device according to claim 15, wherein controllable optical means are provided for performing spot-shaping of the charged particles for elementary radiation beams.
Claim 28
Dependent Claim
29 words
A device according to claim 15, wherein an electron-lithographic apparatus is provided for forming patterns, said patterns defining microcircuits by a read apparatus for reading drawings of said patterns.
Claim 29
Dependent Claim
19 words
A device according to claim 15, wherein an ion lithographic apparatus is provided for writing patterns in said target.
Claim 30
Dependent Claim
38 words
A device according to claim 27, wherein said beam modulation system is preceded by means for decelerating an ion beam, and is followed by means for accelerating said ion beam without disturbing mutual relationships of elementary radiation beams.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-17 | 1988-12-17 | 1989-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-17 | 1992-12-17 | 1993-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-17 | 1996-12-17 | 1997-06-18 | $7700.00 | Window Closed / Lapsed |