US3715580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi electron beam apparatus
Assignee: Hitachi Ltd
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Filing: 1971-03-04
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Granted: 1973-02-06
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Expires: 1991-03-04
Abstract
Abstract A multi-electron beam recorder having a new type electron lens composed of common exciting coils and a plurality of closely spaced pole piece parts excited by said coils. Electron beams pass through the respective pole piece parts and are focussed therein to impinge on a plurality of photographic plates and to record desired IC patterns thereon.
Inventors
- 👤 N Saitou
- 👤 A Maekawa
- 👤 C Munakata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:20
CPC Classifications
B; B82; B82Y; B82Y10/00; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/14; H01J37/141; B82Y40/00; H01J37/30; H01J37/3002; H01J37/3007; H01J37/317; H01J37/3174; H01J37/3177
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
95 words
A multi-electron beam apparatus comprising a plurality of electron beam sources for emitting respective electron beams, at least one electron lens having a common exciting coil and a pole piece assembly having a plurality of beam passing apertures which are provided in correspondence to the respective electron beams and are commonly excited by said common exciting coil so as to focus respectively said electron beams passing through said apertures, a deflecting device for deflecting said focussed electron beams, and support means for supporting a specimen so as to be impinged on by the electron beams.
Claim 2
Dependent Claim
95 words
A multi-electron beam apparatus comprising a plurality of electron beam sources for emitting respective electron beams, at least one electron lens having a common exciting coil and a pole piece assembly having a plurality of beam passing apertures which are provided in correspondence to the respective electron beams and are commonly excited by said common exciting coil so as to focus respectively said electron beams passing through said apertures, a deflecting device for deflecting said focussed electron beams, and support means for supporting a specimen so as to be impinged on by the electron beams.
Claim 3
Dependent Claim
95 words
A multi-electron beam apparatus comprising a plurality of electron beam sources for emitting respective electron beams, at least one electron lens having a common exciting coil and a pole piece assembly having a plurality of beam passing apertures which are provided in correspondence to the respective electron beams and are commonly excited by said common exciting coil so as to focus respectively said electron beams passing through said apertures, a deflecting device for deflecting said focussed electron beams, and support means for supporting a specimen so as to be impinged on by the electron beams.
Claim 4
Dependent Claim
95 words
A multi-electron beam apparatus comprising a plurality of electron beam sources for emitting respective electron beams, at least one electron lens having a common exciting coil and a pole piece assembly having a plurality of beam passing apertures which are provided in correspondence to the respective electron beams and are commonly excited by said common exciting coil so as to focus respectively said electron beams passing through said apertures, a deflecting device for deflecting said focussed electron beams, and support means for supporting a specimen so as to be impinged on by the electron beams.
Claim 5
Dependent Claim
35 words
A multi-electron beam apparatus according to claim 1 which further comprises a plurality of auxiliary coils disposed adjacent to the respective beam passing apertures of said lens for finely adjusting the focal lengths thereof, respectively.
Claim 6
Dependent Claim
28 words
A multi-electron beam apparatus according to claim 1 which further comprises a plurality of auxiliary coils disposed in said lens to surround the respective beam passing apertures thereof.
Claim 7
Dependent Claim
32 words
A multi-electron beam apparatus according to claim 1 which further comprises means for supplying a deflection control signal to said deflecting device so as to record desired IC patterns on said specimen.
Claim 8
Dependent Claim
98 words
A multi-electron beam apparatus comprising a plurality of electron beam sources for emitting electron beams, two electron lenses each having a common exciting coil and a pole piece assembly having a plurality of beam passing apertures provided in correspondence to respective electron beams and commonly excited by said common exciting coil so as to focus said respective electron beams passing therethrough, said two electron lenses being disposed along the electron beams respectively, a deflecting device for deflecting said focussed electron beams and support means for supporting a specimen so as to be impinged on by the electron beams.
Claim 9
Dependent Claim
98 words
A multi-electron beam apparatus comprising a plurality of electron beam sources for emitting electron beams, two electron lenses each having a common exciting coil and a pole piece assembly having a plurality of beam passing apertures provided in correspondence to respective electron beams and commonly excited by said common exciting coil so as to focus said respective electron beams passing therethrough, said two electron lenses being disposed along the electron beams respectively, a deflecting device for deflecting said focussed electron beams and support means for supporting a specimen so as to be impinged on by the electron beams.
Claim 10
Dependent Claim
35 words
A multi-electron beam apparatus according to claim 5 which further comprises a plurality of auxiliary coils disposed adjacent to the respective beams passing apertures of said lens for finely adjusting the focal lengths thereof, respectively.
Claim 11
Dependent Claim
28 words
A multi-electron beam apparatus according to claim 5 which further comprises a plurality of auxiliary coils disposed in said lens to surround the respective beam passing aperture thereof.
References Cited (Backward Citations)
US3519873A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-02-06 | 1976-08-07 | 1977-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-02-06 | 1980-08-07 | 1981-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-02-06 | 1984-08-07 | 1985-02-06 | $7700.00 | Window Closed / Lapsed |