US4996079A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of depositing thin films consisting mainly of carbon
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-02-17
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Granted: 1991-02-26
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Expires: 2009-02-17
Abstract
Abstract While CVD (chemical vopour reaction) methods and enhanced CVD methods for coating a substrate with a carbon coating have recently been attracting considerable interest, there have occurred hitherto rubbing-off of the carbon coating from the underlying substrate due to differential thermal expansion or contraction. The present invention discloses a modification of the conventional CVD process for carbon deposition in accordance with which the deposition condition is changed in order that the hardness of the carbon coating at the interface between the coating and the underlying substrate is lower than that at the external surface of the coating.
Inventors
- 👤 Kenji Itoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:49
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/517; C23C16/22; C23C16/26; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04; Y; Y02; Y02P; Y02P20/00; Y02P20/10; Y02P20/129; Y10; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
104 words
A method for forming an amorphous carbon coating comprising the steps of: placing an object in a reaction chamber; introducing a reaction gas comprising carbon into said reaction chamber; inputting an rf power to a pair of electrodes in order to decompose said reaction gas wherein said object is placed on one of said electrodes; inputting a DC bias voltage to at least one of said pair of electrodes; and depositing said amorphous coating on said object, wherein said DC bias voltage is continuously changed in order that the hardness of said amorphous coating continuously changes with respect to the thickness of the coating.
Claim 2
Independent Claim
104 words
A method for forming an amorphous carbon coating comprising the steps of: placing an object in a reaction chamber; introducing a reaction gas comprising carbon into said reaction chamber; inputting an rf power to a pair of electrodes in order to decompose said reaction gas wherein said object is placed on one of said electrodes; inputting a DC bias voltage to at least one of said pair of electrodes; and depositing said amorphous coating on said object, wherein said DC bias voltage is continuously changed in order that the hardness of said amorphous coating continuously changes with respect to the thickness of the coating.
Claim 3
Dependent Claim
40 words
The method of claim 1 wherein the energy supply to said electrodes is adjusted so that the differential potential between said electrodes on the average increases from the initial stage of the deposition to the final stage of the deposition.
Claim 4
Dependent Claim
20 words
The method of claim 2 wherein the average potential of said object is lower than that of the other electrode.
Claim 5
Dependent Claim
36 words
The method of claim 3 wherein said differential gradually increases in steps in order that said carbon coating comprises a lower film having a relatively low hardness and a upper film having a relatively high hardness.
Claim 6
Dependent Claim
42 words
The method of claim 3 wherein said differential potential is gradually increased in order to form a carbon coating whose hardness is continuously increased from the interface between said carbon coating and said substrate to the external surface of said carbon coating.
Claim 7
Dependent Claim
23 words
The method of claim 2 wherein said differential potential is increased by decreasing the pressure in said reaction chamber during the deposition step.
Claim 8
Dependent Claim
36 words
The method of claim 6 wherein said pressure is decreased in steps in order that said carbon coating comprises a lower film having a relatively low hardness and an upper film having a relatively high hardness.
Claim 9
Dependent Claim
41 words
The method of claim 6 wherein said pressure is gradually decreased in order to form a carbon coating whose hardness is continuously increased from the interface between said carbon coating and said substrate to the external surface of said carbon coating.
Claim 10
Dependent Claim
24 words
The method of claim 2 wherein said differential potential is increased by increasing the input level of said electric energy supplied to said electrodes.
Claim 11
Dependent Claim
39 words
The method of claim 1 wherein the proportion of the carbon bonds based on the SP 2 orbital is continuously reduced with respect to the thickness of the coating in accordance with the increase of said DC bias voltage.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-02-25 | 1994-08-27 | 1995-02-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-25 | 1998-08-27 | 1999-02-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-25 | 2002-08-27 | 2003-02-26 | $7700.00 | Window Closed / Lapsed |