US4993799A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Arrangement for aligning a lens and opto-electronic component in free beam technology
Assignee: Siemens AG
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Filing: 1989-09-08
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Granted: 1991-02-19
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Expires: 2009-09-08
Abstract
Abstract An arrangement for the optical coupling of optical and/or opto-electronic components in free-beam technique includes a lens that is integrally formed with a semiconductor wafer. The semiconductor wafer simultaneously serves as an adjustable carrier. A planar Fresnel lens structure, Fresnel zone plate structure or holographic lens structure may be incorporated into the semiconductor wafer. The coupling arrangement of the invention is employed in light wave guide components and particularly laser modules.
Inventors
- 👤 Karl-Ulrich Stein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:43
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4219; G02B6/4234; G02B6/4204
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
112 words
An optical coupling arrangement for use in free-beam technology, the optical coupling arrangement comprising: a semiconductor wafer; a carrier substrate having a support surface for supporting the semiconductor wafer; a lens integrally formed within the semiconductor wafer and spaced apart from the support surface of the carrier substrate; and an opto-electrical component disposed on the carrier substrate between the lens and the support surface of the carrier substrate, the semiconductor wafer adapted to be freely movable about the support surface of the carrier substrate for positionally adjusting the lens with respect to the opto-electrical component before the semiconductor wafer is finally fastened in a fixed position with respect to the carrier substrate.
Claim 2
Dependent Claim
112 words
An optical coupling arrangement for use in free-beam technology, the optical coupling arrangement comprising: a semiconductor wafer; a carrier substrate having a support surface for supporting the semiconductor wafer; a lens integrally formed within the semiconductor wafer and spaced apart from the support surface of the carrier substrate; and an opto-electrical component disposed on the carrier substrate between the lens and the support surface of the carrier substrate, the semiconductor wafer adapted to be freely movable about the support surface of the carrier substrate for positionally adjusting the lens with respect to the opto-electrical component before the semiconductor wafer is finally fastened in a fixed position with respect to the carrier substrate.
Claim 3
Dependent Claim
18 words
An optical coupling arrangement as recited in claim 1, wherein the carrier substrate consists of a ceramic material.
Claim 4
Dependent Claim
34 words
An optical coupling arrangement as recited in claim 1, wherein the lens has a structure selected from the group consisting of a planar Fresnel lens, a Fresnel zone plate lens, and a holographic lens.
Claim 5
Dependent Claim
15 words
An optical coupling arrangement as recited in claim 1, wherein the semiconductor wafer is silicon.
Claim 6
Dependent Claim
53 words
An optical coupling arrangement as recited in claim 1, wherein the semiconductor wafer is directly secured to the support surface of the carrier substrate and wherein the lens is spaced apart from the support surface of the carrier substrate by a depression etched into the semiconductor wafer in a region of the lens.
Claim 7
Dependent Claim
56 words
An optical coupling arrangement as recited in claim 1, wherein the semiconductor wafer is supported indirectly by the support surface of the carrier substrate by metallization disposed between the semiconductor wafer and the support surface of the carrier substrate, the metallization being used to space apart the lens from the support surface of the carrier substrate.
Claim 8
Dependent Claim
22 words
An optical coupling arrangement as recited in claim 1, wherein the lens has a phase pattern of grooves at a surface thereof.
Claim 9
Dependent Claim
24 words
An optical coupling arrangement as recited in claim 1, wherein the lens has an amplitude pattern of opaque strips situated at a surface thereof.
Claim 10
Dependent Claim
18 words
An optical coupling arrangement as recited in claim 8, wherein the opaque strips consist of a metal material.
Claim 11
Dependent Claim
19 words
An optical coupling arrangement as recited in claim 1, wherein the lens is coated with an optically transmissive material.
Claim 12
Dependent Claim
17 words
An optical coupling arrangement as recited in claim 1, wherein the opto-electrical component is a transmission device.
Claim 13
Dependent Claim
17 words
An optical coupling arrangement as recited in claim 11, wherein the transmission device is a laser diode.
Claim 14
Dependent Claim
17 words
An optical coupling arrangement as recited in claim 1, wherein the opto-electrical component is a reception device.
Claim 15
Dependent Claim
17 words
An optical coupling arrangement as recited in claim 13, wherein the reception device is a monitor diode.
Claim 16
Dependent Claim
20 words
An optical coupling arrangement as recited in claim 1, wherein the semiconductor wafer has a reduced thickness at the lens.
References Cited (Backward Citations)
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-18 | 1994-08-20 | 1995-02-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-18 | 1998-08-20 | 1999-02-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-18 | 2002-08-20 | 2003-02-19 | $7700.00 | Window Closed / Lapsed |