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US4992665A
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Filamentless magnetron-ion source and a process using it
Assignee: TECHNICS PLASMA DIESELSTR 22 D-8011 KIRCHHEIM FR GERMANY A CORP OF FR GERMANY GmbH
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Filing: 1988-11-10
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Granted: 1991-02-12
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Expires: 2008-11-10
Abstract
Abstract The invention relates to a filamentless magnetron-ion source with a magnetron, a microwave guide or a microwave coaxial line, a cylindrical cavity resonator, a lambda-4-short circuit slider member, ECR magnets and a quartz dome. The invention also relates to a process using the said apparatus.
Inventors
- 👤 Wolfgang Mohl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:32
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/16; H01J27/18; H01J37/00; H01J37/02; H01J37/04; H01J37/08
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
110 words
A filamentless magnetron-ion source comprising: a magnetron (119) for generating microwaves; a cylindrical cavity resonator (1, 101) with an input iris: microwave guide means arrange and constructed for coupling said microwaves to said iris; a sliding member with a quarter-wave choke disposed in said resonator for matching the performance of said resonator to said magnetron: gas inlet means for providing a gas into said resonator; a quartz dome disposed in said resonator for forming an ionization chamber and for shielding said gas from gas components from said microwave guide means; ECR magnet means for ionizing said gas into ions; and ion extracting means for extracting said plasma from said dome.
Claim 2
Dependent Claim
110 words
A filamentless magnetron-ion source comprising: a magnetron (119) for generating microwaves; a cylindrical cavity resonator (1, 101) with an input iris: microwave guide means arrange and constructed for coupling said microwaves to said iris; a sliding member with a quarter-wave choke disposed in said resonator for matching the performance of said resonator to said magnetron: gas inlet means for providing a gas into said resonator; a quartz dome disposed in said resonator for forming an ionization chamber and for shielding said gas from gas components from said microwave guide means; ECR magnet means for ionizing said gas into ions; and ion extracting means for extracting said plasma from said dome.
Claim 3
Dependent Claim
39 words
A filamentless magnetron-ion source according to claim 1, characterized in that it comprises, in addition,: a multi-aperture passage for extracting one or more directed ion beams and a vacuum chamber for the ion beams to act on material specimens.
Claim 4
Dependent Claim
35 words
A filamentless magnetron-ion source according to claim 2, characterized in that the multi-aperture passage is formed from several extraction electrodes arranged one after the other (12, 13 and 14; 112 and 113; 212 and 213).
Claim 5
Dependent Claim
26 words
A filamentless magnetron-ion source according to claim 2, characterized in that, furthermore, it comprises: an annular gas inlet system (116; 216) opening into the quartz dome.
Claim 6
Dependent Claim
47 words
A filamentless magnetron-ion source according to claim 1, characterized in that it comprises, in addition,: an orifice through which the plasma passes, the diameter of which is made optimum for the mode of use, and a vacuum chamber for the ion beams to act on material specimens.
Claim 7
Dependent Claim
24 words
A filamentless magnetron-ion source according to claim 5, characterized in that it furthermore comprises. an annular gas inlet system opening into the quartz dome.
Claim 8
Dependent Claim
24 words
A filamentless magnetron-ion source according to claim 1, comprising in addition: a microwave coaxial line for coupling said microwaves to said cylindrical cavity resonator.
References Cited (Backward Citations)
US4401054A
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US4507588A
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US4691662A
Cited
US4857809A
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US4630566A
Cited
US4788473A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-11 | 1994-08-13 | 1995-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-11 | 1998-08-13 | 1999-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-11 | 2002-08-13 | 2003-02-12 | $7700.00 | Window Closed / Lapsed |