Patent US4991475A successfully refreshed from Google Patents.
US4991475A
Expired / Lapsed
US
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Method and apparatus for sawing bar-shaped workpieces into slices
Assignee: Siltronic AG
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Filing: 1990-02-13
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Granted: 1991-02-12
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Expires: 2010-02-13
Abstract
Abstract The invention is a method and apparatus for sawing bar-shaped workpieces o slices by means of an annular saw. The saw blade deviation, from its nominal position in the axial direction during the sawing operation, is compensated for. According to the invention, the deviation can be compensated for by the workpiece and the clamping system of the saw blade performing an appropriate relative translatory axial movement in accordance with the measured deviation. This movement is conveniently controlled by a computer, which compares the actual and nominal position of the saw blade with one another. The method can be used especially in the sawing of semiconductor bars.
Inventors
- 👤 Hanifi Malcok
- 👤 Hermann Zwirglmaier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:14
CPC Classifications
B; B24; B24D; B24D5/00; B24D5/12; B24D5/126; B23; B23D; B23D59/00; B23D59/001; B23D59/002; B24B; B24B27/00; B24B27/06; B24B27/0675; B28; B28D; B28D5/00; B28D5/0058; B28D5/02; B28D5/022; B28D5/028; Y; Y10; Y10T; Y10T82/00; Y10T82/16; Y10T82/16426; Y10T82/16442; Y10T82/25; Y10T82/2502; Y10T82/2527; Y10T83/00; Y10T83/04
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
135 words
A method for sawing a bar-shaped workpiece into slices, which comprises: guiding an annular saw radially through the workpiece comprising a rotatable saw blade having a peripheral surface and an inner cutting edge set with cutting grains, and a blade clamping means for operatively clamping the saw blade on said peripheral surface said workpiece held in a sawing position by a workpiece holding device, while with a longitudinal axis of said workpiece being substantially parallel to a rotary axis of said blade clamping means, and detecting an actual position of the saw blade during the cutting operation; determining a deviation of the actual position of the saw blade from a nominal position of the saw blade; and compensating for the deviation by a translatory axial relative movement between the workpiece and the blade clamping means.
Claim 2
Independent Claim
135 words
A method for sawing a bar-shaped workpiece into slices, which comprises: guiding an annular saw radially through the workpiece comprising a rotatable saw blade having a peripheral surface and an inner cutting edge set with cutting grains, and a blade clamping means for operatively clamping the saw blade on said peripheral surface said workpiece held in a sawing position by a workpiece holding device, while with a longitudinal axis of said workpiece being substantially parallel to a rotary axis of said blade clamping means, and detecting an actual position of the saw blade during the cutting operation; determining a deviation of the actual position of the saw blade from a nominal position of the saw blade; and compensating for the deviation by a translatory axial relative movement between the workpiece and the blade clamping means.
Claim 3
Dependent Claim
33 words
A method of claim 1, wherein the deviation of the saw blade from the nominal position is compensated for to the extent required to bring the blade position within a set tolerance limit.
Claim 4
Dependent Claim
20 words
A method of claim 1, wherein the deviation is compensated for by a translatory axial movement of the clamping means.
Claim 5
Dependent Claim
20 words
A method of claim 2, wherein the deviation is compensated for by a translatory axial movement of the clamping means.
Claim 6
Dependent Claim
27 words
A method of claim 3, wherein the translatory axial movement of the clamping means is effected by a change in the rotational speed of the saw blade.
Claim 7
Dependent Claim
27 words
A method of claim 4, wherein the translatory axial movement of the clamping means is effected by a change in the rotational speed of the saw blade.
Claim 8
Dependent Claim
19 words
A method of claim 1, wherein the deviation is compensated for by a translatory axial movement of the workpiece.
Claim 9
Dependent Claim
19 words
A method of claim 2, wherein the deviation is compensated for by a translatory axial movement of the workpiece.
Claim 10
Dependent Claim
20 words
A method of claim 7, wherein the translatory axial movement of the workpiece is effected by a piezoelectric drive means.
Claim 11
Dependent Claim
20 words
A method of claim 8, wherein the translatory axial movement of the workpiece is effected by a piezoelectric drive means.
Claim 12
Dependent Claim
136 words
An annular saw comprising: a rotatable saw blade having a peripheral surface and a blade clamping means operatively clamping the saw blade on said peripheral surface, said blade having an inner cutting edge set with cutting grains, and a workpiece having a longitudinal axis substantially parallel to a rotary axis of the blade clamping means, means of providing a relative translatory axial movement between the blade clamping means and the workpiece, at least one measuring unit for detecting an axial position of the rotatable saw blade, and a control unit for comparing the detected axial position of the rotatable saw balde with a nominal position of the rotatable saw blade to thereby determine a deviation from the nominal position and to control the relative translatory axial movement in response to the deviation during the cutting operation.
Claim 13
Dependent Claim
136 words
An annular saw comprising: a rotatable saw blade having a peripheral surface and a blade clamping means operatively clamping the saw blade on said peripheral surface, said blade having an inner cutting edge set with cutting grains, and a workpiece having a longitudinal axis substantially parallel to a rotary axis of the blade clamping means, means of providing a relative translatory axial movement between the blade clamping means and the workpiece, at least one measuring unit for detecting an axial position of the rotatable saw blade, and a control unit for comparing the detected axial position of the rotatable saw balde with a nominal position of the rotatable saw blade to thereby determine a deviation from the nominal position and to control the relative translatory axial movement in response to the deviation during the cutting operation.
Claim 14
Dependent Claim
26 words
An annular saw of claim 11, wherein a means for regulating the saw blade rotational speed is the means to provide a relative translatory axial movement.
Claim 15
Dependent Claim
25 words
An annular saw of claim 11, wherein a piezoelectric drive unit, acting on the workpiece, is the means to provide a relative translatory axial movement.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-11 | 1994-08-13 | 1995-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-11 | 1998-08-13 | 1999-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-11 | 2002-08-13 | 2003-02-12 | $7700.00 | Window Closed / Lapsed |