← Back to Patent Explorer
US4990224A Expired / Lapsed US ⏱️ 0.0 years remaining

Copper plating bath and process for difficult to plate metals

Assignee: International Business Machines Corp
•
Filing: 1989-10-25
•
Granted: 1991-02-05
•
Expires: 2009-10-25
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract An acid copper plating bath and process for using with electropositive metals such as aluminum and tungsten is described, wherein the bath contains sulfuric acid, copper sulfate, in solution with urea as a levelling agent, a cationic surfactant as a wetting agent and an ester of a sulfonic acid, Beta-phenylethyltosylate as a brightening agent.

Inventors

  • 👤 Issa S. Mahmoud

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 00:02
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/02; C25D3/38; C25D5/00; C25D5/34; C25D5/38; C25D5/42; C25D5/44

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 62 words
An acid copper plating bath for electropositive metals consisting essentially of: 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1 to 2 milliliters per liter, wetting agent, 1 to 2 grams per liter, Beta-phenylethyltosylate as a brightening agent, and sufficient deionized water to make one liter.
Claim 2
Dependent Claim 62 words
An acid copper plating bath for electropositive metals consisting essentially of: 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1 to 2 milliliters per liter, wetting agent, 1 to 2 grams per liter, Beta-phenylethyltosylate as a brightening agent, and sufficient deionized water to make one liter.
Claim 3
Dependent Claim 13 words
The bath of claim 1 wherein the wetting agent is a cationic surfactant.
Claim 4
Dependent Claim 37 words
An aqueous acid copper electroplating bath composition for strongly electropositive metals such as aluminum and tungsten comprising: sulfuric acid, 30-50 grams/liter; hydrated copper sulfate, 50-72 grams/liter; urea, 1 gram/liter; Beta-phenylethyltosylate, 1 gram/liter; and cationic surfactant, 1 gram/liter.
Claim 5
Dependent Claim 37 words
An aqueous acid copper electroplating bath composition for strongly electropositive metals such as aluminum and tungsten comprising: sulfuric acid, 30-50 grams/liter; hydrated copper sulfate, 50-72 grams/liter; urea, 1 gram/liter; Beta-phenylethyltosylate, 1 gram/liter; and cationic surfactant, 1 gram/liter.
Claim 6
Dependent Claim 128 words
A process for copper plating electropositive metals comprising the steps of: A. preparing a bath containing 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1to 2 milliliters per liter, sodium lauryl sulfate, 1 to 2 grams per liter, a tosyl or mesyl sulfonic acid ester, and sufficient deionized water to make one liter by first mixing components in order set out then filtering the solution; B. soaking the parts to be plated in the bath for 2 to 3 minutes; and C. electrodepositing copper from the bath, at a temperature of about 20 to 30 degrees centigrade, at a current density of 10 to 20 amperes per square foot, with continuous agitation.
Claim 7
Dependent Claim 128 words
A process for copper plating electropositive metals comprising the steps of: A. preparing a bath containing 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1to 2 milliliters per liter, sodium lauryl sulfate, 1 to 2 grams per liter, a tosyl or mesyl sulfonic acid ester, and sufficient deionized water to make one liter by first mixing components in order set out then filtering the solution; B. soaking the parts to be plated in the bath for 2 to 3 minutes; and C. electrodepositing copper from the bath, at a temperature of about 20 to 30 degrees centigrade, at a current density of 10 to 20 amperes per square foot, with continuous agitation.
Claim 8
Dependent Claim 25 words
The process of claim 4 wherein the soaking step is replaced by soaking for 30 to 60 seconds, under the influence of a positive bias.

References Cited (Backward Citations)

US3732151A Cited
US3769179A Cited
US3923613A Cited
US4036710A Cited
US4242181A Cited
SU901363A1 Cited
US4686017A Cited
US4576685A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-02-04 1994-08-06 1995-02-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-02-04 1998-08-06 1999-02-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-02-04 2002-08-06 2003-02-05 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag