US4989542A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for synthesizing diamond
Assignee: National Institute for Materials Science
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Filing: 1988-05-24
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Granted: 1991-02-05
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Expires: 2008-05-24
Abstract
Abstract An apparatus for synthesizing diamond, which comprises a reaction chamber, a means for supplying to the reaction chamber a gas mixture comprising a hydrogen gas and an organic compound decomposable by a plasma to form a diamond or a gas mixture comprising a hydrogen gas, an inert gas and said organic compound, a means of conducting a microwave of frequency larger than 300 MHz to the reaction chamber to generate a microwave plasma in the gas mixture and a substrate held by a substrate holder to locate in the microwave plasma and on which diamond is to be formed, wherein the microwave conducting means is designed to introduce the microwave to the reaction chamber from a plurality of directions.
Inventors
- 👤 Mutsukazu Kamo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:10
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/277; C23C16/44; C23C16/458; C23C16/50; C23C16/511; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32431; H01J37/3266; H01J37/32678
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
142 words
An apparatus for synthesizing diamond, which comprises: (a) a reaction chamber, (b) means for supplying to the reaction chamber a gas mixture comprising hydrogen gas and an organic compound decomposable by a plasma to form diamond, or a gas mixture comprising hydrogen gas, an inert gas and said organic compound, (c) means of conducting a microwave having a frequency larger than 300 MHz to the reaction chamber to generate a microwave plasma in the gas mixture, and (d) one or more substrates held by one or more substrates holders to locate in the microwave plasma and on which said diamond is to be formed, wherein said microwave conducting means is designed to introduce the microwave to the reaction chamber from a plurality of directions, and further wherein a microwave absorber is placed around said one or more substrates, to the shape thereof.
Claim 2
Independent Claim
142 words
An apparatus for synthesizing diamond, which comprises: (a) a reaction chamber, (b) means for supplying to the reaction chamber a gas mixture comprising hydrogen gas and an organic compound decomposable by a plasma to form diamond, or a gas mixture comprising hydrogen gas, an inert gas and said organic compound, (c) means of conducting a microwave having a frequency larger than 300 MHz to the reaction chamber to generate a microwave plasma in the gas mixture, and (d) one or more substrates held by one or more substrates holders to locate in the microwave plasma and on which said diamond is to be formed, wherein said microwave conducting means is designed to introduce the microwave to the reaction chamber from a plurality of directions, and further wherein a microwave absorber is placed around said one or more substrates, to the shape thereof.
Claim 3
Dependent Claim
29 words
The apparatus for synthesizing diamond according to claim 1, wherein the number of directions for introducing said microwave is determined so that the generated plasma has a uniform shape.
Claim 4
Dependent Claim
32 words
The apparatus for synthesizing diamond according to claim 1, wherein said one or more substrate holders are each capable of being rotated at a rotational speed of from 0.01 to 100 rpm.
Claim 5
Dependent Claim
25 words
The apparatus for synthesizing diamond according to claim 1, wherein said shaped microwave absorber placed around said one or more substrates is made of carbon.
Claim 6
Dependent Claim
33 words
The apparatus for synthesizing diamond according to claim 1, wherein said microwave conducting means is designed to introduce the microwave to the reaction chamber from two, three, four, five or six different directions.
Claim 7
Dependent Claim
20 words
The apparatus for synthesizing diamond according to claim 1, wherein said substrate is a silicon wafer scratched by diamond powder.
Claim 8
Dependent Claim
29 words
The apparatus for synthesizing diamond according to claim 1, wherein the substrate comprises a plurality of substrate plates held by the substrate holder with a distance from one another.
Claim 9
Dependent Claim
18 words
The apparatus for synthesizing diamond according to claim 7, wherein the distance is from 5 to 50 mm.
References Cited (Backward Citations)
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JPS6244578A
Cited
US4729341A
Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-04 | 1994-08-06 | 1995-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-04 | 1998-08-06 | 1999-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-04 | 2002-08-06 | 2003-02-05 | $7700.00 | Window Closed / Lapsed |