Patent US4988609A successfully refreshed from Google Patents.
US4988609A
Expired / Lapsed
US
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Method of forming micro patterns
Assignee: Toshiba Corp
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Filing: 1988-06-13
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Granted: 1991-01-29
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Expires: 2008-06-13
Abstract
Abstract In a patterning method according to this invention, a surface region of a resist layer is solution-retarded by a developer, and, then, the resist layer is patterned. Therefore, a desired shape of a side wall of the resist layer may be obtained by varying a solubility of the resist layer, with the result that a resist pattern with the side wall orthogonal to a surface of the substrate or the overhung side may be formed.
Inventors
- 👤 Hidetsuna Hashimoto
- 👤 Tiharu Kato
- 👤 Hitoshi Tsuji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
85 words
A method of forming micro patterns comprising the steps of: forming a resist layer on a layer to be processed; exposing said entire resist layer to rays of light; thereafter thermally heating said resist layer, to form a layer on a surface region of said resist layer, with said formed layer being solution-retarded by a developer; immediately following the thermally heating step, exposing only selected portions of said resist layer to rays of light, thereby forming a predetermined pattern thereon; and developing said resist layer.
Claim 2
Independent Claim
85 words
A method of forming micro patterns comprising the steps of: forming a resist layer on a layer to be processed; exposing said entire resist layer to rays of light; thereafter thermally heating said resist layer, to form a layer on a surface region of said resist layer, with said formed layer being solution-retarded by a developer; immediately following the thermally heating step, exposing only selected portions of said resist layer to rays of light, thereby forming a predetermined pattern thereon; and developing said resist layer.
Claim 3
Dependent Claim
18 words
The method of forming micro patterns according claim 1, wherein said first-recited rays of light are ultraviolet rays.
Claim 4
Dependent Claim
19 words
The method of forming micro patterns according to claim 1, wherein said first-recited rays of light are deep-ultraviolet rays.
Claim 5
Dependent Claim
23 words
The method of forming micro patterns according to claim 1, wherein said thermally heating of said resist layer is performed in an atmosphere.
Claim 6
Dependent Claim
20 words
The method of forming micro patterns according to claim 1, wherein said resist layer is of the positive resist type.
Claim 7
Independent Claim
84 words
A method of forming micro patterns comprising the steps of: forming a resist layer on a layer to be processed; exposing said entire resist layer to rays of light; thereafter thermally heating said resist layer in an ammonia gas, to form a layer on a surface region of said resist layer, with said formed layer being solution-retarded by a developer; thereafter exposing only selected portions of said resist layer to rays of light, thereby forming a predetermined pattern thereon; and developing said resist layer.
Claim 8
Independent Claim
84 words
A method of forming micro patterns comprising the steps of: forming a resist layer on a layer to be processed; exposing said entire resist layer to rays of light; thereafter thermally heating said resist layer in an ammonia gas, to form a layer on a surface region of said resist layer, with said formed layer being solution-retarded by a developer; thereafter exposing only selected portions of said resist layer to rays of light, thereby forming a predetermined pattern thereon; and developing said resist layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-28 | 1994-07-30 | 1995-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-28 | 1998-07-30 | 1999-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-28 | 2002-07-30 | 2003-01-29 | $7700.00 | Window Closed / Lapsed |