US4985071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for producing a base metal thin film and an electronic device using the same
Assignee: Panasonic Holdings Corp
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Filing: 1988-05-20
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Granted: 1991-01-15
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Expires: 2008-05-20
Abstract
Abstract A process for producing a thin film of a base metal on a substrate which comprises thermally decomposing in oxidative atmosphere an organic or inorganic compound containing a base metal compound formed on a substrate to form the oxide of the metal and then reducing the oxide by heat-treating it in reductive atmosphere. A temperature sensor, magnetic sensor, and ceramic wiring substrate utilizing the base metal thin film.
Inventors
- 👤 Munehiro Tabata
- 👤 Chiharu Hayashi
- 👤 Yasuhito Isozaki
- 👤 Kazuyuki Okano
- 👤 Yo Hasegawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 02:06
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/105; C; C23; C23C; C23C18/00; C23C18/02; C23C18/08
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
63 words
A process for producing a base metal thin film which comprises forming on a substrate a layer of an organic compound containing a base metal in the molecular structure, thermally decomposing the organic compound layer containing the base metal in the molecular structure in oxidative atmosphere into the oxide of the base metal, and then heat-treating the base metal oxide in reductive atmosphere.
Claim 2
Dependent Claim
63 words
A process for producing a base metal thin film which comprises forming on a substrate a layer of an organic compound containing a base metal in the molecular structure, thermally decomposing the organic compound layer containing the base metal in the molecular structure in oxidative atmosphere into the oxide of the base metal, and then heat-treating the base metal oxide in reductive atmosphere.
Claim 3
Dependent Claim
15 words
A base metal thin film according to claim 1 wherein the base metal is nickel.
Claim 4
Dependent Claim
22 words
A base metal thin film wherein the thin film is formed of a sintered fine metal particles of 50 to 2000 Å.
Claim 5
Dependent Claim
22 words
A base metal thin film wherein the thin film is formed of a sintered fine metal particles of 50 to 2000 Å.
Claim 6
Dependent Claim
20 words
A base metal thin film according to claim 1 wherein the base metal is an alloy of nickel and cobalt.
Claim 7
Dependent Claim
15 words
A base metal thin film according to claim 1 wherein the base metal is copper.
Claim 8
Dependent Claim
13 words
A base metal thin film produced by the process according to claim 1.
Claim 9
Dependent Claim
16 words
A nickel thin film temperature sensor which is produced by the process according to claim 1.
Claim 10
Dependent Claim
11 words
A magnetoresistive element produced by the process according to claim 1.
Claim 11
Dependent Claim
12 words
A ceramic wiring board produced by the process according to claim 1.
References Cited (Backward Citations)
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US3914517A
Cited
US4077854A
Cited
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Cited
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Cited
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Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-14 | 1994-07-16 | 1995-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-14 | 1998-07-16 | 1999-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-14 | 2002-07-16 | 2003-01-15 | $7700.00 | Window Closed / Lapsed |