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US4982256A Expired / Lapsed US ⏱️ 0.0 years remaining

Optoelectronic integrated circuit

Assignee: NEC Corp
•
Filing: 1988-10-24
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Granted: 1991-01-01
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Expires: 2008-10-24
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Abstract

Abstract An optoelectronic integrated circuit comprises an optical device such as a photodiode and a semiconductor laser provided on a semi-insulating InP substrate and buried except for an operating plane with a high resistance buried layer, and a field effect transistor provided on a strain buffer layer which is provided on the semi-insulating InP substrate. The top surfaces of the optical device and the high resistance buried layer are of the approximately same position levels. Therefore, an optoelectronic integrated circuit is fabricated with a high yield and a high performance.

Inventors

  • 👤 Akira Suzuki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 08:21
CPC Classifications
H; H10; H10H; H10H29/00; H10H29/10; H01; H01S; H01S5/00; H01S5/02; H01S5/026; H01S5/0261

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 165 words
An optoelectronic integrated circuit comprising: a semi-insulating InP substrate, an optical device of an InP system semiconductor which is selected from InGaAs and InGaAsP, and provided on said semi-insulating InP substrate, said optical device having a flat plane on which electrodes are provided to be connected to lead patterns; a high resistance buried layer of InP for burying said optical device except for said flat plane, said high resistance buried layer being provided on said semi-insulating InP substrate, and a position level of said high resistance buried layer being equal on its top surface to a position level of said flat plane; a strain buffer layer of a material which is selected from GaAs and AlGaAs provided on said top surface of said high resistance buried layer; and a field effect transistor of a GaAs system semiconductor including AlGaAs, said field effect transistor being provided on said strain buffer layer and provided with electrodes thereon to be connected to selected ones of said lead patterns.
Claim 2
Dependent Claim 165 words
An optoelectronic integrated circuit comprising: a semi-insulating InP substrate, an optical device of an InP system semiconductor which is selected from InGaAs and InGaAsP, and provided on said semi-insulating InP substrate, said optical device having a flat plane on which electrodes are provided to be connected to lead patterns; a high resistance buried layer of InP for burying said optical device except for said flat plane, said high resistance buried layer being provided on said semi-insulating InP substrate, and a position level of said high resistance buried layer being equal on its top surface to a position level of said flat plane; a strain buffer layer of a material which is selected from GaAs and AlGaAs provided on said top surface of said high resistance buried layer; and a field effect transistor of a GaAs system semiconductor including AlGaAs, said field effect transistor being provided on said strain buffer layer and provided with electrodes thereon to be connected to selected ones of said lead patterns.
Claim 3
Dependent Claim 16 words
An optical optoelectronic integrated circuit according to claim 1, wherein said optical device is a photodiode.
Claim 4
Dependent Claim 17 words
An optical optoelectronic integrated circuit according to claim 1, wherein said optical device is a semiconductor laser.

References Cited (Backward Citations)

US4593304A Cited
US4736231A Cited
GB2168528A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-12-31 1994-07-02 1995-01-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-12-31 1998-07-02 1999-01-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-12-31 2002-07-02 2003-01-01 $7700.00 Window Closed / Lapsed

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