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US4981714A
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Method of producing ferroelectric LiNb1-31 x Tax O3 0<x<1) thin film by activated evaporation
Assignee: Sharp Corp
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Filing: 1990-04-30
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Granted: 1991-01-01
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Expires: 2010-04-30
Abstract
Abstract A method of producing a ferroelectric thin film comprising the steps of evaporating metal Li or an oxide thereof as a Li source, metal Nb or an oxide thereof as a Nb source and metal Ta or an oxide thereof as a Ta source in a substantially oxygen gas plasma atmosphere while controlling the respective heating temperatures independently from each other and simultaneously depositing the Li, Nb and Ta on a substrate so as to obtain an LiNb 1-x Ta x O 3 (0<x<1) thin film which shows ferroelectricity.
Inventors
- 👤 Hirotaka Ohno
- 👤 Hironori Matsunaga
- 👤 Yasunari Okamoto
- 👤 Yoshiharu Nakajima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/088; C30; C30B; C30B23/00; C30B23/002; C30B23/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/30
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
96 words
A method of producing a ferroelectric thin film comprising the steps of evaporating metal Li or an oxide thereof as a Li source, metal Nb or an oxide thereof as a Nb source and metal Ta or an oxide thereof as a Ta source in a substantially oxygen gas plasma atmosphere while controlling the respective heating temperatures of the evaporation independently from each other and simultaneously depositing at controlled evaporation rates said Li, Nb and Ta on a substrate so as to obtain a LiNb 1-x Ta x O 3 (0<x<1) thin film which shows ferroelectricity.
Claim 2
Independent Claim
96 words
A method of producing a ferroelectric thin film comprising the steps of evaporating metal Li or an oxide thereof as a Li source, metal Nb or an oxide thereof as a Nb source and metal Ta or an oxide thereof as a Ta source in a substantially oxygen gas plasma atmosphere while controlling the respective heating temperatures of the evaporation independently from each other and simultaneously depositing at controlled evaporation rates said Li, Nb and Ta on a substrate so as to obtain a LiNb 1-x Ta x O 3 (0<x<1) thin film which shows ferroelectricity.
Claim 3
Dependent Claim
64 words
A method of producing a ferroelectric thin film according to claim 1, wherein said Li source is metal Li having a purity of not less than 99.9%, said Nb source is a high-melting metal Nb having a purity of not less than 99.9 to 99.999%, and said Ta source is a high-melting metal Ta having a purity of not less than 99.9 to 99.999%.
Claim 4
Independent Claim
38 words
A method of producing a ferroelectric thin film according to claim l, wherein said Li source is Li 2 O, said Nb source is Nb 2 O 5 and said Ta source is Ta 2 O 5 .
Claim 5
Dependent Claim
35 words
A method of producing a ferroelectric thin film according to claim 2, wherein said high-melting metals Nb and Ta are evaporated by electron beam evaporation and said metal Li is evaporated by a Knudsen cell.
Claim 6
Dependent Claim
19 words
A method of producing a ferroelectric thin film according to claim 2, wherein said substrate is a sapphire substrate.
Claim 7
Dependent Claim
57 words
A method of producing a ferroelectric thin film according to claim 4, wherein the emission current of the heating electron beam is set at 100 to 200 mA for said metal Nb and at 30 to 100 mA for said metal Ta, and the heating temperature of said Knudsen cell is set at 500 to 600° C.
Claim 8
Dependent Claim
46 words
A method of producing a ferroelectric thin film according to claim 1, wherein said oxygen gas plasma atmosphere is formed by introducing oxygen gas into a vacuum of 1×10 -7 to 1×10 -8 Torr until the degree of vacuum becomes 1×10 -4 to 5×10 -4 Torr.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |