US4980239A
Expired / Lapsed
US
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Metallization layer structure formed on aluminum nitride ceramics and method of producing the metallization layer structure
Assignee: Fujitsu Ltd
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Filing: 1988-08-24
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Granted: 1990-12-25
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Expires: 2008-08-24
Abstract
Abstract A metallization layer structure includes an intermediate layer formed on an aluminum nitride ceramics base. The intermediate layer contains aluminum titanium nitride. A titanium layer is formed on the intermediate layer. A heat-resistant metallic layer is formed on the titanium layer. A metallic layer for facilitating soldering or brazing is formed on the heat-resistant metallic layer.
Inventors
- 👤 Shigeki Harada
- 👤 Masahiro Sugimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 03:47
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; C04B41/45; C04B41/52; C04B41/80; C04B41/81; C04B41/89; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/38; H10W72/00; H10W72/50; H10W72/531; H10W72/536; H10W72/5363; H10W72/851; H10W72/874; H10W72/884; H10W90/00; H10W90/701; H10W90/731; H10W90/734; H10W90/751; H10W90/754; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12014; Y10T428/12028; Y10T428/12049; Y10T428/12056; Y10T428/12493; Y10T428/12535; Y10T428/12576; Y10T428/31504; Y10T428/31536
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
87 words
A metallization layer structure formed on an aluminum nitride ceramics, comprising: an intermediate layer formed on an aluminum nitride ceramics base, the intermediate layer comprising aluminum titanium nitride; a titanium layer formed on the intermediate layer; a heat-resistant metallic layer comprising a metal selected from the group consisting of tongsten and molybdenum formed on the titanium layer; and a metallic layer formed on the heat-resistant metallic layer for facilitating soldering or brazing, said heat-resistant metallic layer preventing an interdiffusion between said titanium layer and said metallic layer.
Claim 2
Dependent Claim
87 words
A metallization layer structure formed on an aluminum nitride ceramics, comprising: an intermediate layer formed on an aluminum nitride ceramics base, the intermediate layer comprising aluminum titanium nitride; a titanium layer formed on the intermediate layer; a heat-resistant metallic layer comprising a metal selected from the group consisting of tongsten and molybdenum formed on the titanium layer; and a metallic layer formed on the heat-resistant metallic layer for facilitating soldering or brazing, said heat-resistant metallic layer preventing an interdiffusion between said titanium layer and said metallic layer.
Claim 3
Dependent Claim
23 words
A metallization layer structure as claimed in claim 1, wherein the intermediate layer is equal to or smaller than 1000 [Å] in thickness.
Claim 4
Dependent Claim
15 words
A metallization layer structure as claimed in claim 1, wherein the metallic layer comprises nickel.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-24 | 1994-06-25 | 1994-12-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-24 | 1998-06-25 | 1998-12-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-24 | 2002-06-25 | 2002-12-25 | $7700.00 | Window Closed / Lapsed |