US4978188A
Expired / Lapsed
US
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Integrated optical device and method for manufacturing thereof
Assignee: NTT Inc
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Filing: 1989-10-13
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Granted: 1990-12-18
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Expires: 2009-10-13
Abstract
Abstract An integrated optical device includes a substrate; a single-mode optical waveguide having a cladding layer disposed on the substrate and a core portion embedded in the cladding layer for transmitting light therethrough; and a stress applying film disposed on a desired portion of the cladding layer for adjusting stress-induced birefringence of the single-mode optical waveguide by irreversibly changing the stress exerted on the core portion by a trimming technique. The integrated optical device can be manufactured by the steps of forming a cladding layer on a substrate; forming a single-mode optical waveguide having a core portion embedded in the cladding layer for transmitting light therethrough; and forming, on the cladding layer, a stress applying film for exerting a stress on the single-mode optical waveguide to irreversibly change the stress by trimming the film. The device exhibits a precisely adjusted birefringence and a desired polarization dependence or independence, and is effective for constructing an integrated optical device for optical communication, for optical sensing or for optical signal processing, in which the polarization characteristics play an important role.
Inventors
- 👤 Masao Kawachi
- 👤 Norio Takato
- 👤 Kaname Jinguji
- 👤 Akio Sugita
- 👤 Shin Sumida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:22
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/12007; G02B6/105; G02B6/126; G02B6/13; G02B6/24; G02B6/26; G02B6/28; G02B6/293; G02B6/29346; G02B6/2935; G02B6/29352; G02B6/29353
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
77 words
A method for manufacturing an integrated optical device, comprising the steps of: forming a single-mode optical waveguide on a substrate, said single-mode optical waveguide having a core portion embedded in a cladding layer for transmitting light therethrough; and forming, on said cladding layer, a stress applying film so that said stress applying film exhibits residual stress, for exerting a stress on said single-mode optical waveguide and for irreversibly changing the stress by trimming said stress applying film.
Claim 2
Independent Claim
77 words
A method for manufacturing an integrated optical device, comprising the steps of: forming a single-mode optical waveguide on a substrate, said single-mode optical waveguide having a core portion embedded in a cladding layer for transmitting light therethrough; and forming, on said cladding layer, a stress applying film so that said stress applying film exhibits residual stress, for exerting a stress on said single-mode optical waveguide and for irreversibly changing the stress by trimming said stress applying film.
Claim 3
Dependent Claim
52 words
A method as claimed in claim 1, further comprising the step of partially trimming said stress applying film to adjust a stress-induced birefringence value of a part of said single-mode optical waveguide lying under the trimmed portion of said stress applying film to adjust the optical characteristics of said integrated optical device.
Claim 4
Dependent Claim
42 words
A method as claimed in claim 2, wherein a monitoring light is made incident upon said integrated optical device in said step of trimming said stress applying film, and wherein said stress applying film is trimmed while said optical characteristics are monitored.
Claim 5
Dependent Claim
34 words
A method as claimed in claim 2, wherein in said step of trimming said stress applying film, said stress applying film is trimmed by partially irradiating a light beam on said stress applying film.
Claim 6
Independent Claim
104 words
A method for manufacturing an integrated optical device, comprising the steps of: (a) forming a single-mode optical waveguide on a substrate, the optical waveguide having a cladding layer and having an elongated core embedded in the cladding layer; (b) forming a stress applying film on the cladding layer above the core to exert stress on the optical waveguide, the stress applying film exhibiting residual stress; and (c) permanently modifying a first portion of the stress applying film to irreversibly change the stress exerted on the waveguide by the stress applying film, a second portion of the stress applying film remaining unmodified during step (c).
Claim 7
Independent Claim
104 words
A method for manufacturing an integrated optical device, comprising the steps of: (a) forming a single-mode optical waveguide on a substrate, the optical waveguide having a cladding layer and having an elongated core embedded in the cladding layer; (b) forming a stress applying film on the cladding layer above the core to exert stress on the optical waveguide, the stress applying film exhibiting residual stress; and (c) permanently modifying a first portion of the stress applying film to irreversibly change the stress exerted on the waveguide by the stress applying film, a second portion of the stress applying film remaining unmodified during step (c).
Claim 8
Dependent Claim
24 words
The method of claim 5, wherein step (c) is conducted by changing the physical state of the first portion of the stress applying film.
Claim 9
Dependent Claim
41 words
The method of claim 5, wherein step (b) is conducted by forming an amorphous silicon film as the stress applying film, and wherein step (c) comprises the step of changing the first portion of the amorphous silicon film to polycrystalline silicon.
Claim 10
Dependent Claim
34 words
The method of claim 7, wherein the step of changing the first portion of the amorphous silicon film to polycrystalline silicon comprises the step of heating the first portion of the amorphous silicon film.
Claim 11
Dependent Claim
39 words
The method of claim 7, wherein the step of changing the first portion of the amorphous silicon film to polycrystalline silicon comprises the step of directing light from a laser toward the first portion of the amorphous silicon film.
Claim 12
Dependent Claim
22 words
The method of claim 5, further comprising the step of directing a monitoring light through the core while step (c) is conducted.
Claim 13
Dependent Claim
11 words
An integrated optical device made by the method of claim 5.
Claim 14
Independent Claim
160 words
A method for manufacturing an integrated optical device, comprising the steps of: (a) forming first and second single-mode optical waveguides on a substrate, the first optical waveguide having an elongated first core embedded in a cladding layer and the second optical waveguide having an elongated second core embedded in the cladding layer, the first core following a first path and the second core following a second path having a portion which passes adjacent a corresponding portion of the first path to provide a coupler between the first and second optical waveguides; (b) forming a stress applying film on the cladding layer above the first core to exert stress on the first optical waveguide, the stress applying film exhibiting residual stress; and (c) permanently modifying a first portion of the stress applying film to irreversibly change the stress exerted on the first waveguide by the stress applying film, a second portion of the stress applying film remaining unmodified during step (c).
Claim 15
Independent Claim
160 words
A method for manufacturing an integrated optical device, comprising the steps of: (a) forming first and second single-mode optical waveguides on a substrate, the first optical waveguide having an elongated first core embedded in a cladding layer and the second optical waveguide having an elongated second core embedded in the cladding layer, the first core following a first path and the second core following a second path having a portion which passes adjacent a corresponding portion of the first path to provide a coupler between the first and second optical waveguides; (b) forming a stress applying film on the cladding layer above the first core to exert stress on the first optical waveguide, the stress applying film exhibiting residual stress; and (c) permanently modifying a first portion of the stress applying film to irreversibly change the stress exerted on the first waveguide by the stress applying film, a second portion of the stress applying film remaining unmodified during step (c).
Claim 16
Dependent Claim
24 words
The method of claim 12, wherein step (b) is conducted by changing the physical state of the first portion of the stress applying film.
Claim 17
Dependent Claim
41 words
The method of claim 12, wherein step (b) is conducted by forming an amorphous silicon film as the stress applying film, and wherein step (c) comprises the step of changing the first portion of the amorphous silicon film to polycrystalline silicon.
Claim 18
Dependent Claim
22 words
The method of claim 12, further comprising the step of depositing a heater film on the cladding layer above the second core.
Claim 19
Dependent Claim
21 words
The method of claim 15, further comprising the step of making a groove in the cladding layer adjacent the heater film.
Claim 20
Dependent Claim
33 words
The method of claim 12, further comprising the steps of directing a first monitoring light through the first core and directing a second monitoring light through the second core while conducting step (c).
Claim 21
Dependent Claim
12 words
The method of claim 12, wherein step (b) is accomplished by sputtering.
Claim 22
Dependent Claim
11 words
An integrated optical device made by the method of claim 12.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-17 | 1994-06-18 | 1994-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-17 | 1998-06-18 | 1998-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-17 | 2002-06-18 | 2002-12-18 | $7700.00 | Window Closed / Lapsed |