Mass flow controller

Claim 2

An improved mass flow controller for monitoring a flow rate of a fluid and for purging a fluid delivery system of moisture, comprising: a fluid intake conduit adapted to be connected to a source of fluid; a mass flow meter connected to the fluid intake conduit including a capillary tube and a flow sensing means connected to the capillary tube for providing a signal of the flow rate, and a fluid controlling portion including an annular rimmed valve port with a conduit connected to the intake conduit and having a flat mirror finish surface, the valve port being significantly larger than a cross-sectional size of the conduit, a valve head having a flat mirror finish, a support diaphragm for positioning the valve head adjacent the annular rimmed valve port, and a valve drive means for driving the valve head relative to the valve port in response to the flow rate signal, the mirror finish surface having a maximum surface roughness height of 0.5 microns, wherein the fluid controlling portion can accurately control a very low flow rate and can also provide a large purging rate of flow to remove moisture from a fluid delivery system.

Claim 3

The improved mass flow controller of claim 1 wherein the fluid intake conduit includes a bypass portion having a constant flow dividing ratio characteristic to the capillary tube.

Claim 4

The improved mass flow controller of claim 1 wherein the valve drive means includes a plurality of piezo elements.

Claim 5

The improved mass flow controller of claim 1 wherein the valve port has an enlarged bell mouth configuration.

Claim 6

An improved mass flow controller having a mass flow meter portion for measuring a flow rate of a gas and a gas-controlling portion for controlling the flow rate of the gas provided between a gas inlet and a gas outlet, the improvement comprising: said gas-controlling portion having a controlled flow position wherein the gas flow rate may be accurately controlled at very low flow rates and a purging flow position wherein the gas flow rate is increased to a gas flow rate that exceeds the gas flow rate in the controlled flow position by a factor of at least 50, the gas-controlling portion consists of a gas control valve, the operative surfaces of said gas control valve having a mirror-finish in order to achieve the high control accuracy at very low flow rates, the gas-controlling portion consists of a gas control valve comprised of a valve head which movably opposes a valve mouth, the opposing planar surfaces of the valve head and the valve mouth being mirror-finished so as to provide a very low and controlled flow rate that may be varied with high accuracy, wherein the planar surfaces of the valve mouth and valve head have a maximum height variance of 0.5 microns or less from their surfaces.

Claim 7

An improved mass flow controller having a mass flow meter portion for measuring a flow rate of a gas and a gas-controlling portion for controlling the flow rate of the gas provided between a gas inlet and a gas outlet, the improvement comprising: said gas-controlling portion having a controlled flow position wherein the gas flow rate may be accurately controlled at very low flow rates and a purging flow position wherein the gas flow rate is increased to a gas flow rate that exceeds the gas flow rate in the controlled flow position by a factor of at least 50, the gas-controlling portion consists of a gas control valve, the operative surfaces of said gas control valve having a mirror-finish in order to achieve the high control accuracy at very low flow rates, the gas-controlling portion consists of a gas control valve comprised of a valve head which movably opposes a valve mouth, the opposing planar surfaces of the valve head and the valve mouth being mirror-finished so as to provide a very low and controlled flow rate that may be varied with high accuracy, wherein the planar surfaces of the valve mouth and valve head have a maximum height variance of 0.5 microns or less from their surfaces.

Claim 8

The improved mean flow controller of claim 5 wherein the valve head is movably supported by a metal diaphragm.

Claim 9

In a method of controlling the supply of gases in the production of semiconductor elements to prevent the contamination of moisture with a mass flow controller having a mass flow meter and a gas-controlling portion with a valve assembly of an enlarged annular rimmed valve port of a mirror finish surface having a maximum surface roughness height of 0.5 microns and a valve head, also of a mirror finish surface, having a maximum surface roughness height of 0.5 microns, the gas-controlling portion connected to a source of purging gas such as N 2 or Ar gas, the improvement comprising: increasing the flow rate of a nitrogen purging gas through the valve assembly to 5 liters/minute for several days to provide a new point of -100° C., and subsequently precisely controlling the flow of argon through the same valve assembly at less than 100 cc/minute to enable sputtering for semiconductor production.

Claim 10

In a method of controlling the supply of gases in the production of semiconductor elements to prevent the contamination of moisture with a mass flow controller having a mass flow meter and a gas-controlling portion with a valve assembly of an enlarged annular rimmed valve port of a mirror finish surface having a maximum surface roughness height of 0.5 microns and a valve head, also of a mirror finish surface, having a maximum surface roughness height of 0.5 microns, the gas-controlling portion connected to a source of purging gas such as N 2 or Ar gas, the improvement comprising: increasing the flow rate of a nitrogen purging gas through the valve assembly to 5 liters/minute for several days to provide a new point of -100° C., and subsequently precisely controlling the flow of argon through the same valve assembly at less than 100 cc/minute to enable sputtering for semiconductor production.