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US4976944A
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US
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Purification of silane gas
Assignee: Rhodia Chimie SAS
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Filing: 1988-10-24
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Granted: 1990-12-11
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Expires: 2008-10-24
Abstract
Abstract Impure gaseous silane containing such impurities as, in particular, phosphines and arsines, is purified, whether by chemisorption and/or physical adsorption, by contacting such silane gas with a sorption mass that includes cooper values, e.g., a copper cation-exchanged molecular sieve.
Inventors
- 👤 Bernard Pacaud
- 👤 Jean-Michel Popa
- 👤 Claude-Bernard Cartier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 20:07
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/04; C01B33/046
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
33 words
A process for purification of impure gaseous silane comprising contacting such silane with a solid sorption mass comprising copper values, said copper values existing primarily in an oxidation state of 2 + .
Claim 2
Dependent Claim
33 words
A process for purification of impure gaseous silane comprising contacting such silane with a solid sorption mass comprising copper values, said copper values existing primarily in an oxidation state of 2 + .
Claim 3
Dependent Claim
51 words
The process as defined in claim 1, said sorption mass comprising a solid support having said copper values deposited thereon, wherein said solid support comprises a molecular sieve or an inorganic material, said inorganic material comprising alumina, silica, silicoaluminate, titanium oxide, zirconium oxide, cerium oxide, magnesium oxide or an admixture thereof.
Claim 4
Dependent Claim
22 words
The process as defined in claim 2, said solid support having a specific surface ranging from 30 to 600 m 2 /g.
Claim 5
Dependent Claim
24 words
The process as defined in claim 1, said sorption mass comprising from 3 to 15% by weight of copper, expressed as elemental copper values.
Claim 6
Dependent Claim
18 words
The process as defined by claim 1, said copper values being present in the form of copper oxide.
Claim 7
Dependent Claim
17 words
The process as defined by claim 2, said molecular sieve comprising a cupric cation exchanged molecular sieve.
Claim 8
Dependent Claim
19 words
The process as defined by claim 6, said molecular sieve comprising a type A, X or Y synthetic zeolite.
Claim 9
Dependent Claim
17 words
The process as defined by claim 6, said molecular sieve being from 20% to 80% cupric cation-exchanged.
Claim 10
Dependent Claim
16 words
The process as defined by claim 1, said impure gaseous silane comprising phosphine and/or arsine impurities.
Claim 11
Dependent Claim
14 words
The process as defined by claim 9, said impure gaseous silane comprising diborane impurities.
Claim 12
Dependent Claim
22 words
The process as defined by claim 1, said purification comprising both chemisorption and physical adsorption of impurities from such impure gaseous silane.
Claim 13
Dependent Claim
14 words
The process as defined by claim 1, comprising regenerating said sorption mass by oxidation.
Claim 14
Dependent Claim
10 words
The process as defined by claim 1, carried out continuously.
Claim 15
Dependent Claim
10 words
The process as defined by claim 1, carried out discontinuously.
Claim 16
Dependent Claim
24 words
The process as defined by claim 2, said sorption mass comprising from 3 to 15% by weight of copper, expressed as elemental copper values.
Claim 17
Dependent Claim
18 words
The process as defined by claim 2, said copper values being present in the form of copper oxide.
Claim 18
Dependent Claim
16 words
The process as defined by claim 2, said impure gaseous silane comprising phosphine and/or arsine impurities.
Claim 19
Dependent Claim
14 words
The process as defined by claim 17, said impure gaseous silane comprising diborane impurities.
Claim 20
Dependent Claim
22 words
The process as defined by claim 2, said purification comprising both chemisorption and physical adsorption of impurities from such impure gaseous silane.
Claim 21
Dependent Claim
14 words
The process as defined by claim 2, comprising regenerating said sorption mass by oxidation.
Claim 22
Dependent Claim
10 words
The process as defined by claim 2, carried out continuously.
Claim 23
Dependent Claim
10 words
The process as defined by claim 2, carried out discontinuously.
References Cited (Backward Citations)
CA595816A
Cited
CA622438A
Cited
CA632238A
Cited
JPS5930711A
Cited
JPS6453106A
Cited
JPH01168518A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-10 | 1994-06-11 | 1994-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-10 | 1998-06-11 | 1998-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-10 | 2002-06-11 | 2002-12-11 | $7700.00 | Window Closed / Lapsed |