US4975327A
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US
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Polyimide substrate having a textured surface and metallizing such a substrate
Assignee: 3M Co
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Filing: 1989-07-11
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Granted: 1990-12-04
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Expires: 2009-07-11
Abstract
Abstract The adhesion of metal to a polyimide substrate is enhanced by depositing onto at least one surface of the polyimide a thin film of metal such as copper and heating in air to cause the deposited metal to texturize that surface by producing asperities that are at least 0.05 μm in average height and average breadth. In doing so, metal oxide clusters are formed at the textured surface. When the textured surface is metallized, the resulting composite resists delamination even at soldering temperatures.
Inventors
- 👤 Nanayakkara L. D. Somasiri
- 👤 Thomas A. Speckhard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:26
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/20; C23C14/02; C23C14/024; C23C14/205; C23C18/00; C23C18/16; C23C18/1601; C23C18/1633; C23C18/1635; C23C18/1639; C23C18/1641; C23C18/18; C23C18/20; C23C18/2006; C23C18/2046; C23C18/2053; C23C18/206; C23C18/2066; H; H05; H05K; H05K3/00; H05K3/38; H05K3/381; C23C18/31; C23C18/38; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/31; Y10T428/31504; Y10T428/31721
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
31 words
A polyimide sheet or film having at least one textured surface characterized by asperities that are from 0.05 to 0.5μm in average height and from 0.05 to 0.5μm in average breadth.
Claim 2
Dependent Claim
31 words
A polyimide sheet or film having at least one textured surface characterized by asperities that are from 0.05 to 0.5μm in average height and from 0.05 to 0.5μm in average breadth.
Claim 3
Dependent Claim
49 words
A polyimide sheet or film as defined in claim 1 and having discrete metal oxide particles partially or completely embedded within the asperities and just beneath of the surfaces of the valleys between the asperities, while being sufficiently close to those surfaces to be readily removable by acid dissolution.
Claim 4
Dependent Claim
20 words
A composite of a polyimide sheet or film as defined in claim 1 and an electrically conductive layer of metal.
Claim 5
Dependent Claim
12 words
A composite as defined in claim 3 wherein said metal is copper.
Claim 6
Dependent Claim
15 words
A composite as defined in claim 3 wherein said layer of metal forms a pattern.
Claim 7
Dependent Claim
47 words
A composite wherein a layer of copper that does not exceed 40μm in thickness is in direct contact with a polyimide substrate, which laminate affords a 90° Peel Value (as herein defined) of at least 80 N/dm when measured one day after thermal ramp to 280° C.
Claim 8
Dependent Claim
47 words
A composite wherein a layer of copper that does not exceed 40μm in thickness is in direct contact with a polyimide substrate, which laminate affords a 90° Peel Value (as herein defined) of at least 80 N/dm when measured one day after thermal ramp to 280° C.
Claim 9
Dependent Claim
104 words
Method of modifying at least one surface of a polyimide substrate to enhance the adhesion of a metal layer to that surface, said method comprising the sequential steps of: (a) depositing onto at least one surface of a polyimide substrate a thin film of metal capable of catalyzing the texturization of polyimide, (b) heating the polyimide substrate and deposited metal in air at a temperature of at least 350° C. and for a time sufficient to cause the metal to produce asperities that are at least 0.05μm in average height and breadth, while allowing the polyimide substrate to retain good tensile strength and elongation.
Claim 10
Dependent Claim
104 words
Method of modifying at least one surface of a polyimide substrate to enhance the adhesion of a metal layer to that surface, said method comprising the sequential steps of: (a) depositing onto at least one surface of a polyimide substrate a thin film of metal capable of catalyzing the texturization of polyimide, (b) heating the polyimide substrate and deposited metal in air at a temperature of at least 350° C. and for a time sufficient to cause the metal to produce asperities that are at least 0.05μm in average height and breadth, while allowing the polyimide substrate to retain good tensile strength and elongation.
Claim 11
Dependent Claim
20 words
Method as defined in claim 7 wherein step (b) involves heating at a temperature of from 400° to 540° C.
Claim 12
Dependent Claim
40 words
Method as defined in claim 8 wherein step (b) involves heating at a temperature and for a time within the range from 400° C. for 20-40 minutes to 540° C. for 7-14 seconds and for intermediate times at intermediate temperatures.
Claim 13
Dependent Claim
32 words
Method as defined in claim 7 wherein the thin film is deposited in step (a) by a technique selected from vapor deposition, sputtering, dip coating in a colloidal suspension, and electroless deposition.
Claim 14
Dependent Claim
15 words
Method as defined in claim 7 wherein the metal deposited in step (a) is copper.
Claim 15
Dependent Claim
113 words
Method of metallizing a polyimide substrate, said method comprising the sequential steps of: (a) depositing onto at least one surface of a polyimide substrate a thin film of metal capable of catalyzing the texturization of polyimide; (b) heating the polyimide substrate and deposited metal in air at a temperature of at least 350° C. and for a time sufficient to cause the metal to produce asperities that are at least 0.05μm in average height and breadth while allowing the polyimide substrate to retain good tensile strength and elongation; (c) depositing onto said surface an electrically-conductive metal sublayer; and (d) electroplating an electrically conductive metal over the sublayer to produce a metallized polyimide substrate.
Claim 16
Dependent Claim
113 words
Method of metallizing a polyimide substrate, said method comprising the sequential steps of: (a) depositing onto at least one surface of a polyimide substrate a thin film of metal capable of catalyzing the texturization of polyimide; (b) heating the polyimide substrate and deposited metal in air at a temperature of at least 350° C. and for a time sufficient to cause the metal to produce asperities that are at least 0.05μm in average height and breadth while allowing the polyimide substrate to retain good tensile strength and elongation; (c) depositing onto said surface an electrically-conductive metal sublayer; and (d) electroplating an electrically conductive metal over the sublayer to produce a metallized polyimide substrate.
Claim 17
Dependent Claim
23 words
Method as defined in claim 12 wherein the sublayer is deposited in step (c) by a technique selected from sputtering and electroless deposition.
Claim 18
Dependent Claim
19 words
Method as defined in claim 12 wherein the metal deposited in each of steps (c) and (d) is copper.
Claim 19
Dependent Claim
24 words
Method as defined in claim 14 wherein the sublayer is built up in step (c) to a thickness of from 60 to 200 nm.
Claim 20
Dependent Claim
35 words
Method as defined in claim 15 wherein the metal is electroplated in step (d) until the total thickness of the electrically conductive metal applied in steps (c) and (d) is within the range of 1-40μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-03 | 1994-06-04 | 1994-12-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-03 | 1998-06-04 | 1998-12-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-03 | 2002-06-04 | 2002-12-04 | $7700.00 | Window Closed / Lapsed |