US4970386A
Expired / Lapsed
US
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Vertical FET high speed optical sensor
Assignee: Micron Technology Inc
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Filing: 1989-06-22
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Granted: 1990-11-13
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Expires: 2009-06-22
Abstract
Abstract A high speed optical sensor comprising a parallel array of vertical field effect transistors and optical fibers disposed in the recesses between the transistors is disclosed herein. Each of the vertical field effect transistors includes a substrate of doped gallium arsenide divided by a depleted region. One side of each of the gallium arsenide substrates is flanked by an optical fiber which transmits an optical signal into one side of the depleted region, while the other side of the substrate includes a gate electrode for controlling the flow of photo charges induced in the depleted region by the light signals. The gate electrode serves not only to control the flow of charges through the transistor but also reflects back a portion of the light emanated by the optical fiber so that it passes a second time through the depleted region. The efficient light coupling that occurs between the optical fibers and the depleted regions of the substrates of the vertical FET's, in combination with the low capacitive leakage afforded by the design at high frequencies and the high power density obtainable with vertical FET's results in a photosensor which is advantageously efficient, fast the compact.
Inventors
- 👤 Daniel C. Buck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:03
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4249; G02B6/4295; H; H10; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/28; H10F30/283; H10F30/2843; H10F77/00; H10F77/10; H10F77/14; H10F77/147; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
127 words
An optical sensor semiconductor device, comprising: a vertically configured substrate of semiconductor material connected between a source means and a drain means and having first and second opposing sides, each of which are transverse with respect to said source and drain means, said substrate having a doped region in electrical contact with said source and drain means, a depleted region disposed within said doped region that traverse said first and second opposing sides, and a gate means disposed on said first side over said depleted region, and a fiber-optical conduit having an end that is disposed on said second side over said depleted region in spaced relation thereto for transmitting an optical signal directly into said depleted region and thereby creating a flow of electrical charges therein.
Claim 2
Dependent Claim
127 words
An optical sensor semiconductor device, comprising: a vertically configured substrate of semiconductor material connected between a source means and a drain means and having first and second opposing sides, each of which are transverse with respect to said source and drain means, said substrate having a doped region in electrical contact with said source and drain means, a depleted region disposed within said doped region that traverse said first and second opposing sides, and a gate means disposed on said first side over said depleted region, and a fiber-optical conduit having an end that is disposed on said second side over said depleted region in spaced relation thereto for transmitting an optical signal directly into said depleted region and thereby creating a flow of electrical charges therein.
Claim 3
Dependent Claim
40 words
An optical sensor semiconductor device as defined in claim 1, wherein said end of said optical conduit is tapered in the vicinity of said depleted region to increase the amount of optical coupling between said fiber-optical conduit and said substrate.
Claim 4
Dependent Claim
18 words
An optical sensor semiconductor device as defined in claim 1, wherein said substrate is formed from gallium arsenide.
Claim 5
Dependent Claim
48 words
An optical sensor semiconductor device as defined in claim 1, wherein said end of said optical conduit is secured against said second side by a transparent low dielectric potting material that maintains a space of between about 0.05 and 0.02 microns between said conduit and said depleted region
Claim 6
Dependent Claim
16 words
An optical sensor semiconductor device as defined in claim 4, wherein said potting material is polyamide.
Claim 7
Dependent Claim
37 words
An optical sensor semiconductor device as defined in claim 1, wherein said gate means includes an electrode formed from a light-reflective metal for reflecting the optical signals transmitted by the fiber-optical conduit back through the depleted region.
Claim 8
Dependent Claim
31 words
An optical sensor semiconductor device as defined in claim 1, wherein said fiber-optical conduit is a single fiber-optical fiber having a second end optically coupled to a source of optical signals.
Claim 9
Dependent Claim
23 words
An optical sensor semiconductor device as defined in claim 1, wherein said substrate, source and drain means are a vertical field effect transistor.
Claim 10
Dependent Claim
43 words
An optical sensor semiconductor device as defined in claim 1, wherein said first and second opposing sides of said substrate are sufficiently close together so as to allow said single gate means to selectively control the flow of charges through said depleted region.
Claim 11
Dependent Claim
49 words
An optical sensor semiconductor device as defined in claim 1, wherein said gate means is dimensioned so that the reactance of the capacitative leakage that said gate means induces between said source and drain means is greater than 100 ohms for light at a frequency of 10 10 hertz.
Claim 12
Dependent Claim
101 words
An optical sensor semiconductor device, comprising: a parallel array of vertical field effect transistors, each of which includes a substrate of semiconductor material disposed between a source means and a drain means, each substrate including a doped region divided by a depleted region and a gate means disposed on one side of each substrate for controlling the flow of charges therethrough, and at least one fiber-optical conduit disposed in a recess defined by the sides of the substrates of two adjacent transistors for transmitting an optical signal into the depleted region of at least one of the substrates of said transistors.
Claim 13
Dependent Claim
101 words
An optical sensor semiconductor device, comprising: a parallel array of vertical field effect transistors, each of which includes a substrate of semiconductor material disposed between a source means and a drain means, each substrate including a doped region divided by a depleted region and a gate means disposed on one side of each substrate for controlling the flow of charges therethrough, and at least one fiber-optical conduit disposed in a recess defined by the sides of the substrates of two adjacent transistors for transmitting an optical signal into the depleted region of at least one of the substrates of said transistors.
Claim 14
Dependent Claim
67 words
An optical sensor semiconductor device as defined in claim 11, wherein the gate means of the substrates of adjacent transistors are disposed over different sides of these substrates, and said fiber-optical conduit is disposed in a recess defined by opposing substrate sides, neither of which includes a gate means such that the signal emanated from the fiber optical conduit strikes the depleted regions of both adjacent transistors.
Claim 15
Dependent Claim
55 words
An optical sensor semiconductor device as defined in claim 11, wherein the width of the gate means of each transistor is selected so that the reactance of the capacitative leakage that said gate means induces between the source and drain means is greater than 50 ohms for light at a frequency of 10 10 hertz.
Claim 16
Dependent Claim
33 words
An optical sensor semiconductor device as defined in claim 11, wherein the width of the gate means of each transistor is less than about 50 microns to minimize capacitative leakage through each transistor.
Claim 17
Dependent Claim
33 words
An optical sensor semiconductor device as defined in claim 11, wherein the width of the gate means of each transistor is less than about 10 microns to minimize capacitative leakage through each transistor.
Claim 18
Dependent Claim
18 words
An optical sensor semiconductor device as defined in claim 11, wherein said conduit is a singlemode optical fiber.
Claim 19
Dependent Claim
39 words
An optical sensor semiconductor device as defined in claim 16, wherein the sides of said fiber adjacent to the depleted regions of said transistors are tapered to increase the amount of optical coupling between said fiber and said regions.
Claim 20
Dependent Claim
45 words
An optical sensor semiconductor device as defined in claim 12, wherein each of the gate means includes an electrode formed from a light reflective metal that reflects back a portion of the optical signal back through the depleted regions of each of the adjacent transistors.
Claim 21
Dependent Claim
21 words
An optical sensor semiconductor device as defined in claim 11, wherein the substrate of each transistor is formed from gallium arsenide.
Claim 22
Dependent Claim
130 words
An optical sensor semiconductor device, comprising: a parallel array of vertical field effect transistors, each of which includes a substrate of doped gallium arsenide disposed between a source means and a drain means, each doped substrate having first and second opposing sides that are traversed by a depleted region, and a gate means including a light reflective electrode disposed on the first side of the substrate for controlling a flow of photo charges induced in said region by light, and at least one single-mode optical fiber disposed adjacent the second side of the substrate over the depleted region for transmitting an optical signal into said depleted region, wherein the light reflective electrode of said gate means reflects a portion of said signal back through said depleted region a second time.
Claim 23
Dependent Claim
130 words
An optical sensor semiconductor device, comprising: a parallel array of vertical field effect transistors, each of which includes a substrate of doped gallium arsenide disposed between a source means and a drain means, each doped substrate having first and second opposing sides that are traversed by a depleted region, and a gate means including a light reflective electrode disposed on the first side of the substrate for controlling a flow of photo charges induced in said region by light, and at least one single-mode optical fiber disposed adjacent the second side of the substrate over the depleted region for transmitting an optical signal into said depleted region, wherein the light reflective electrode of said gate means reflects a portion of said signal back through said depleted region a second time.
Claim 24
Dependent Claim
41 words
An optical sensor semiconductor device as defined in claim 20, wherein the side of the optical fiber adjacent to the second side of the substrate is tapered to increase the amount of optical coupling between said fiber and said depleted region.
Claim 25
Dependent Claim
61 words
An optical sensor semiconductor device as defined in claim 20, wherein the width of the electrode of said gate means is selected so that the reactance of the capacitative leakage that occurs between the source and the drain is greater than 50 ohms when the modulation frequency of the light used to transmit the optical signal is about 10 10 hertz.
Claim 26
Dependent Claim
46 words
An optical sensor semiconductor device as defined in claim 21, wherein the tapered side of the optical fiber is spaced about 0.10 microns from the second side of the substrate by a transparent potting material having a relative dielectric constant of between about 1.0 and 2.0.
Claim 27
Dependent Claim
26 words
An optical sensor semiconductor device as defined in claim 20, wherein the optical fiber is formed from fused silica to lessen capacitative leakage through the transistors.
Claim 28
Dependent Claim
120 words
An optical sensor semiconductor device for mixing two different optical signals of different frequencies and generating an electrical current whose voltage fluctuates at a frequency that is between the two different frequencies of said optical signals, comprising: at least one vertical field effect transistor that includes a substrate of semiconductor material disposed between a source means and a drain means, said substrate having a doped region and a depleted region; and first and second fiber-optical conduits flanking opposite sides of the doped region of the substrate for transmitting first and second optical signals of different frequencies into said depleted region such that said region is exposed to an optical interference pattern generated at the interface of said two optical signals
Claim 29
Dependent Claim
120 words
An optical sensor semiconductor device for mixing two different optical signals of different frequencies and generating an electrical current whose voltage fluctuates at a frequency that is between the two different frequencies of said optical signals, comprising: at least one vertical field effect transistor that includes a substrate of semiconductor material disposed between a source means and a drain means, said substrate having a doped region and a depleted region; and first and second fiber-optical conduits flanking opposite sides of the doped region of the substrate for transmitting first and second optical signals of different frequencies into said depleted region such that said region is exposed to an optical interference pattern generated at the interface of said two optical signals
Claim 30
Dependent Claim
34 words
An optical sensor according to claim 25, wherein said first and second fiber-optical conduits are optically coupled to a source of an optical modulation signal and a source of an optical oscillator signal, respectively.
Claim 31
Dependent Claim
18 words
An optical sensor according to claim 26, wherein each of said fiber-optical conduits is a single-mode optical fiber.
Claim 32
Dependent Claim
36 words
An optical sensor according to claim 27, wherein the sides of each fiber adjacent to the depleted region of said substrate are tapered to increase the amount of optical coupling between said fiber and said region.
Claim 33
Dependent Claim
22 words
According to claim 25, wherein said first and second fiber-optical conduits are secured adjacent to said depleted by a transparent pottinq material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |