US4970369A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electronic device manufacturing methods
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-04-06
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Granted: 1990-11-13
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Expires: 2009-04-06
Abstract
Abstract In a method of making an electronic device having at least a transparent conductive layer, which includes at least a step of forming a transparent conductive layer member and a step of forming a transparent conductive layer by patterning the transparent conductive layer member using a spot-shaped or linear laser beam or beams, each of which has a short wavelength of 400 nm or less and optical energy greater than the optical energy band gap of the transparent conductive layer.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Kenji Itoh
- 👤 Susumu Nagayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:35
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/16; H10F77/169; H10F77/1692; H10F19/00; H10F19/30; H10F19/31; H10F19/33; H10F77/20; H10F77/244; H10P; H10P50/00; H05; H05K; H05K3/00; H05K3/02; H05K3/027; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
79 words
A laser scribing method for producing a plurality of grooves on a layer disposed on a substrate comprising: expanding square- or rectangular-sectioned laser light; focusing the expanded laser light on said layer by a convex lens means with respect to one direction in order to obtain concentrated laser light energy distributed along a line on said layer corresponding to one of said grooves and sublime a part of said layer along said line by the concentrated laser light energy.
Claim 2
Dependent Claim
79 words
A laser scribing method for producing a plurality of grooves on a layer disposed on a substrate comprising: expanding square- or rectangular-sectioned laser light; focusing the expanded laser light on said layer by a convex lens means with respect to one direction in order to obtain concentrated laser light energy distributed along a line on said layer corresponding to one of said grooves and sublime a part of said layer along said line by the concentrated laser light energy.
Claim 3
Dependent Claim
96 words
A laser scribing method for producing a plurality of grooves on a layer comprising: expanding square- or rectangular-sectioned laser light; contracting the expanded laser light in one direction by a convex lens means; and disposing the layer substantially at the focal point of the convex lens means whereby the contracted laser light is focused on said layers in said one direction to obtain concentrated laser light energy along a line on said layer corresponding to one of said grooves to thus subline a part of said layer along said line and form one of said grooves.
Claim 4
Dependent Claim
96 words
A laser scribing method for producing a plurality of grooves on a layer comprising: expanding square- or rectangular-sectioned laser light; contracting the expanded laser light in one direction by a convex lens means; and disposing the layer substantially at the focal point of the convex lens means whereby the contracted laser light is focused on said layers in said one direction to obtain concentrated laser light energy along a line on said layer corresponding to one of said grooves to thus subline a part of said layer along said line and form one of said grooves.
Claim 5
Dependent Claim
93 words
A laser scribing method for producing a plurality of grooves on a layer comprising: expanding square- or rectangular-sectioned laser light; contracting the expanded laser light in one direction by a plurality of convex lens means; and disposing the layer substantially at the focal points of the plurality of convex lens means whereby the contracted laser light is focused on said layer so that whereby said expanded laser light is separated into a plurality of laser rays with each laser ray respectively subliming a line on said layer to produce said plurality of grooves.
Claim 6
Dependent Claim
93 words
A laser scribing method for producing a plurality of grooves on a layer comprising: expanding square- or rectangular-sectioned laser light; contracting the expanded laser light in one direction by a plurality of convex lens means; and disposing the layer substantially at the focal points of the plurality of convex lens means whereby the contracted laser light is focused on said layer so that whereby said expanded laser light is separated into a plurality of laser rays with each laser ray respectively subliming a line on said layer to produce said plurality of grooves.
Claim 7
Dependent Claim
19 words
A laser scribing method as defined in claim 1, wherein said convex lens means is a cylindrical convex lens.
Claim 8
Dependent Claim
19 words
A laser scribing method as defined in claim 2, wherein said convex lens means is a cylindrical convex lens.
Claim 9
Dependent Claim
20 words
A laser scribing method as defined in claim 3, wherein said plurality of convex lens means are cylindrical convex lenses.
Claim 10
Dependent Claim
17 words
A method as in claim 1 where said substrate has a surface of organic and inorganic insulators.
Claim 11
Independent Claim
16 words
A method as in claims 2 or 3 where said layer is a transparent conductive layer.
Claim 12
Dependent Claim
20 words
A method as in claim 8 wherein said transparent conductive layer is an oxide layer disposed on a glass substrate.
Claim 13
Independent Claim
15 words
A method as in claims 2 or 3 where said layer is a semiconductor layer.
Claim 14
Dependent Claim
19 words
A method as in claim 8 where the transparent conductive layer has a thickness of two μm or less.
Claim 15
Dependent Claim
26 words
A method as in claim 8 where the transparent conductive layer consists principally of sublimable metallic compounds selected from the group consisting of oxides and nitrides.
Claim 16
Dependent Claim
52 words
A method as in claim 12 which said sublimable metallic oxide is selected from the group consisting of SnO 2 , In 2 O 3 , and ITO (Indium-Tin Oxide), and in which said sublimable metallic nitride is selected from the group consisting of SbN, InN and Sn 3 N 4 .
Claim 17
Dependent Claim
17 words
A method as in claim 10 where the semiconductor layer consists principally of a sublimable non-single-crystal semiconductor.
Claim 18
Dependent Claim
41 words
A method as in claim 14 where said sublimable semiconductor is selected from the group consisting of Si, Si x Ge 1-x (where 0<×<0.5), Si x C 1-x (where 0<×<1), Si 3 N 4-x (where 0<×<2), and SiO 2-x (where 0<×<1).
Claim 19
Independent Claim
29 words
A method as in claims 1, 2, or 3 where said laser light comprises one of an excimer laser light, an argon laser light, and a nitrogen laser light.
Claim 20
Dependent Claim
20 words
A method as in claim 1 where said layer is a transparent conductive oxide layer and said substrate is glass.
Claim 21
Dependent Claim
17 words
A method as in claim 2 where said expanded laser light is contracted in only one direction.
Claim 22
Dependent Claim
17 words
A method as in claim 3 where said expanded laser light is contracted in only one direction.
Claim 23
Dependent Claim
17 words
A method as in claim 1 where said expanded laser light is contracted in only one direction.
References Cited (Backward Citations)
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