US4970366A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser patterning apparatus and method
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-03-24
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Granted: 1990-11-13
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Expires: 2009-03-24
Abstract
Abstract An improved laser patterning method and apparatus is described. A number of parallel grooves can be formed on a glass substrate coated with an ITO film by projecting flat laser pulses while the substrate is continuously sliding. By this process, the process time for producing a substrate for liquid crystal display can be reduced.
Inventors
- 👤 Shinji Imatou
- 👤 Hisato Shinohara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 08:54
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/08; B23K26/083; B23K26/0853; B23K26/36; B23K26/361; B41; B41M; B41M5/00; B41M5/24; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70041; G03F7/70375; G03F7/70691; G03F7/70716; G03F7/70725
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
112 words
A laser patterning apparatus comprising: a table for supporting thereon a substrate to be patterned; a base for sliding said table thereon in a direction; a means for determining the current position of said table relative to said base; an excimer laser capable of emitting pulsed laser beams; an optical system for guiding and focusing said laser beam on said substrate; and a means for controlling said laser to emit a laser beam pulse at the time when said table is just in the position required to produce a predetermined pattern; wherein said laser emission is repeated onto different surface portions of said substrate whereas said substrate continuously slides on said base.
Claim 2
Dependent Claim
112 words
A laser patterning apparatus comprising: a table for supporting thereon a substrate to be patterned; a base for sliding said table thereon in a direction; a means for determining the current position of said table relative to said base; an excimer laser capable of emitting pulsed laser beams; an optical system for guiding and focusing said laser beam on said substrate; and a means for controlling said laser to emit a laser beam pulse at the time when said table is just in the position required to produce a predetermined pattern; wherein said laser emission is repeated onto different surface portions of said substrate whereas said substrate continuously slides on said base.
Claim 3
Dependent Claim
20 words
The apparatus of claim 1 wherein said optical system is adapted to shape said laser beam into a flat beam.
Claim 4
Independent Claim
51 words
A method of producing a pattern comprising the steps of: emitting a pulsed laser beam from an excimer laser; focusing said pulsed laser beam on a surface to be patterned; and repeating said emitting and focussing steps while said surface is moving relative to the focal point of said laser beam.
Claim 5
Independent Claim
51 words
A method of producing a pattern comprising the steps of: emitting a pulsed laser beam from an excimer laser; focusing said pulsed laser beam on a surface to be patterned; and repeating said emitting and focussing steps while said surface is moving relative to the focal point of said laser beam.
Claim 6
Dependent Claim
19 words
The method of claim 3 further comprising the step of shaping said pulsed laser beam into a flat beam.
Claim 7
Dependent Claim
22 words
The method of claim 4 wherein pulsed laser beams are emitted at constant intervals in order to produce a plurality of grooves.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |