Patent US4969745A successfully refreshed from Google Patents.
US4969745A
Expired / Lapsed
US
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Device for measuring offset of axis of crystal lifting wire
Assignee: Shin-Etsu Handotai Co Ltd
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Filing: 1989-11-20
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Granted: 1990-11-13
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Expires: 2009-11-20
Abstract
Abstract A device used in a single-crystal production apparatus based on Czochralski method and designed for measuring the offset of the wire for lifting the growing crystal. In order to enable an easy and appropriate mounting and adjustment of the crystal lifting wire, while preventing abnormal oscillation of the axis of rotation of the growing crystal, the device has a block which fits in the upper end opening of a chamber. The block has a central through-hole which the wire penetrates. Light sources and photo-detectors are arranged to oppose each other across the through-hole. Slits are arranged between the wire and the photo-detectors. The device measures the offset from the outputs of the photo-detectors, and an alarm activates when the measured wire offset has exceeded an upper limit. In another form, the assembly including the block, light sources, photo-detectors and the slits is substituted by linear image sensor cameras.
Inventors
- 👤 Hiroyuki Ibe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:24
CPC Classifications
C; C30; C30B; C30B15/00; C30B15/30; Y; Y10; Y10T; Y10T117/00; Y10T117/10; Y10T117/1004
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
114 words
A device for measuring offset of a wire for lifting a crystal which is growing on the basis of Czochralski method, said device comprising: a light source (48, 56) for emitting light to said wire (16); a photo-detector (46, 54) arranged against said light source across said wire, converting the intensity of the light from said light source into electric signal; a slit (36, 38) disposed between said photo-detector and said wire, passing a part of the light beam directed from said light source to said photo-detector; means (66) for determining the wire offset with respect to a certain position, from the outputs of said photo-detector; and means (68) for displaying the wire offset.
Claim 2
Independent Claim
114 words
A device for measuring offset of a wire for lifting a crystal which is growing on the basis of Czochralski method, said device comprising: a light source (48, 56) for emitting light to said wire (16); a photo-detector (46, 54) arranged against said light source across said wire, converting the intensity of the light from said light source into electric signal; a slit (36, 38) disposed between said photo-detector and said wire, passing a part of the light beam directed from said light source to said photo-detector; means (66) for determining the wire offset with respect to a certain position, from the outputs of said photo-detector; and means (68) for displaying the wire offset.
Claim 3
Dependent Claim
69 words
A device according to claim 1, wherein there are two sets (48, 36, 46; 56, 38, 54) of said light source, said slit and said photo-detector arranged such that the optical axes of both sets are unparallel to each other, and wherein said means (66) for determining the offset determine, by the outputs from two photo-detectors, the distance of said wire from the certain position as the wire offset.
Claim 4
Dependent Claim
89 words
A device according to claim 1, wherein said light source (48. 56), said slit (36, 38) and said photo-detector (46, 54) are set to a block, said block having a through-hole (30) which said wire (16) penetrates and a fitting portion (14b) which fits in an opening formed in the upper end of a chamber which covers a crucible for a melt, said through-hole being formed such that, when said fitting portion fits in said opening, the axis of said through-hole coincides with the desired position of said wire.
Claim 5
Dependent Claim
89 words
A device according to claim 2, wherein said light sources (48, 56), said slits (36, 38) and said photo-detectors (46, 54) are set to a block, said block having a through-hole (30) which said wire (16) penetrates and a fitting portion (14b) which fits in an opening formed in the upper end of a chamber which covers a crucible for a melt, said through-hole being formed such that, when said fitting portion fits in said opening, the axis of said through-hole coincides with the desired position of said wire.
Claim 6
Dependent Claim
42 words
A device according to claim 1, further comprising: means (70) for setting the upper limit of the amount of the wire offset; an alarm (72); and means (66) for activating said alarm when the detected wire offset has exceeded said upper limit.
Claim 7
Dependent Claim
40 words
A device according to claim 2, further comprising: a means (70) for setting the upper limit of the wire offset; an alarm (72); and means (66) for activating said alarm when the detected wire offset has exceeded said upper limit.
Claim 8
Dependent Claim
39 words
A device according to claim 3, further comprising: means (70) for setting the upper limit of the wire offset; an alarm (72); and means (66) for activating said alarm when the detected wire offset has exceeded said upper limit.
Claim 9
Dependent Claim
41 words
A device according to claim 4, further comprising: a means (70) for setting the upper limit of the wire offset; an alarm (72); and means (66) for activating said alarm when the detected wire offset has exceeded said upper allowable limit.
Claim 10
Independent Claim
79 words
A device for measuring offset of a wire for lifting a crystal which is growing on the basis of Czochralski method, said device comprising: a linear image sensor camera (76a, 76b) for imaging the horizontal position of said wire (16) at a certain height; means (82a, 82b, 84, 86) for processing video signals from said linear image sensor camera and determining the wire offset with respect to a certain position; and means (68) for displaying the determined wire offset.
Claim 11
Independent Claim
79 words
A device for measuring offset of a wire for lifting a crystal which is growing on the basis of Czochralski method, said device comprising: a linear image sensor camera (76a, 76b) for imaging the horizontal position of said wire (16) at a certain height; means (82a, 82b, 84, 86) for processing video signals from said linear image sensor camera and determining the wire offset with respect to a certain position; and means (68) for displaying the determined wire offset.
References Cited (Backward Citations)
US4794263A
Cited
US4915775A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |