US4962049A
Expired / Lapsed
US
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Process for the plasma treatment of the backside of a semiconductor wafer
Assignee: Applied Materials Inc
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Filing: 1989-04-13
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Granted: 1990-10-09
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Expires: 2009-04-13
Abstract
Abstract A process is disclosed for the treatment of the backside or back surface of a semiconductor wafer such as a silicon wafer. By spacing the back side of a semiconductor wafer a predetermined distance from a cathode in a vacuum chamber and controlling the rf power and the pressure, a confined plasma may be used both to clean the back side of the wafer to remove impurities, including moisture and other occluded gases; as well as to deposit a layer of oxide on the back surface of the wafer to inhibit subsequent deposition of poorly adherent materials on the back side of the wafer which might otherwise flake off during processing of the front side of the wafer to form integrated circuits thereon.
Inventors
- 👤 Mei Chang
- 👤 David Cheng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:57
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/50; H10P70/56; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; C; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/022; C23C16/00; C23C16/02; C23C16/0227; C23C16/0245; C23C8/00; C23C8/06; C23C8/36; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6319; H10P70/10; H10P70/12; H10P72/70; H10P72/76; H10P72/7604; H10P72/7614; Y; Y10; Y10S; Y10S438/00; Y10S438/906; Y10S438/928
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
62 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a spaced distance from a cathode with the back side of said wafer facing said cathode; and (b) forming a plasma in the gap formed between said cathode and said back side of said wafer to treat said back side of the semiconductor wafer.
Claim 2
Dependent Claim
62 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a spaced distance from a cathode with the back side of said wafer facing said cathode; and (b) forming a plasma in the gap formed between said cathode and said back side of said wafer to treat said back side of the semiconductor wafer.
Claim 3
Dependent Claim
41 words
The process of claim 1 wherein said step of supporting a semiconductor wafer a spaced distance from a cathode further comprises spacing said back side of said wafer a distance of from about 0.25 to about 1 inch from said cathode.
Claim 4
Dependent Claim
27 words
The process of claim 2 wherein said process is carried out in a vacuum chamber maintained at a vacuum of from about 50 to about 300 millitorr.
Claim 5
Dependent Claim
38 words
The process of claim 3 wherein said step of forming a plasma further comprises maintaining the rf power at from about 25 to about 100 watts to substantially confine said plasma to the back side of said wafer.
Claim 6
Dependent Claim
39 words
The process of claim 4 wherein said step of forming a plasma further comprises maintaining said plasma between said back side of said wafer and said cathode for a period of from about 10 second to about 3 minutes.
Claim 7
Dependent Claim
35 words
The process of claim 5 wherein said step of flowing a gas through said chamber further includes flowing an inert gas through said chamber at a rate of from about 50 to about 200 sccm.
Claim 8
Dependent Claim
20 words
The process of claim 6 wherein said inert gas is selected from the class consisting of argon, neon, and helium.
Claim 9
Dependent Claim
55 words
The process of claim 5 wherein said step of flowing a gas through said chamber further includes flowing an oxidizing gas through said chamber at a rate of from about 50 to about 200 sccm to form from about 10 to about 30 Angstroms of an oxide layer on said back side of said wafer.
Claim 10
Dependent Claim
29 words
The process of claim 8 wherein said oxidizing gas is selected from the class consisting of O 2 , N 2 O, O 3 , and CO 2 .
Claim 11
Dependent Claim
128 words
A process for treating the back side of a semiconductor wafer to form a protective oxide layer thereon to inhibit subsequent deposition of undesirable materials on said back side of said wafer which comprises: (a) supporting a semiconductor wafer in a vacuum chamber at a distance of from about 0.25 to about 1 inch from a cathode with the back side of said wafer facing said cathode; (b) flowing an oxidizing gas into said vacuum chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said cathode and said back side of said wafer to form an oxide layer of from about 10 to about 30 Angstroms thickness on said back side of said semiconductor wafer.
Claim 12
Dependent Claim
128 words
A process for treating the back side of a semiconductor wafer to form a protective oxide layer thereon to inhibit subsequent deposition of undesirable materials on said back side of said wafer which comprises: (a) supporting a semiconductor wafer in a vacuum chamber at a distance of from about 0.25 to about 1 inch from a cathode with the back side of said wafer facing said cathode; (b) flowing an oxidizing gas into said vacuum chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said cathode and said back side of said wafer to form an oxide layer of from about 10 to about 30 Angstroms thickness on said back side of said semiconductor wafer.
Claim 13
Dependent Claim
27 words
The process of claim 10 wherein said vacuum chamber is maintained at a vacuum of from about 50 to about 300 millitorr during said plasma oxygen formation.
Claim 14
Dependent Claim
41 words
The process of claim 1 wherein the step of forming a plasma further comprises maintaining the rf power generating said plasma at from about 25 to about 100 watts to substantially confine said plasma to the back side of said wafer.
Claim 15
Dependent Claim
37 words
The process of claim 12 wherein said plasma is maintained between said back side of said wafer and said cathode for a period of from about 10 second to about 3 minutes to form said oxide layer.
Claim 16
Dependent Claim
29 words
The process of claim 13 wherein said oxidizing gas is selected from the class consisting of O 2 , N 2 O, O 3 , and CO 2 .
Claim 17
Dependent Claim
177 words
A process for treating the back side of a semiconductor wafer to form a protective oxide layer thereon to inhibit subsequent deposition of undesirable materials on said back side of said wafer which comprises: (a) supporting a semiconductor wafer at a distance of from about 0.25 to about 1 inch from a cathode with the back side of said wafer facing said cathode in a vacuum chamber maintained at a pressure of from about 20 to about 300 millitorr; (b) flowing an oxidizing gas into said vacuum chamber at a rate of from about 20 to about 200 sccm; (c) forming a plasma with an rf energy of from about 25 to 100 watts in the gap formed between said cathode and said back side of said wafer; and (d) maintaining said plasma between said back side of said wafer and said cathode for a period of from about 10 second to about 3 minutes to form an oxide layer of from about 10 to about 30 Angstroms thickness on said back side of said semiconductor wafer.
Claim 18
Dependent Claim
177 words
A process for treating the back side of a semiconductor wafer to form a protective oxide layer thereon to inhibit subsequent deposition of undesirable materials on said back side of said wafer which comprises: (a) supporting a semiconductor wafer at a distance of from about 0.25 to about 1 inch from a cathode with the back side of said wafer facing said cathode in a vacuum chamber maintained at a pressure of from about 20 to about 300 millitorr; (b) flowing an oxidizing gas into said vacuum chamber at a rate of from about 20 to about 200 sccm; (c) forming a plasma with an rf energy of from about 25 to 100 watts in the gap formed between said cathode and said back side of said wafer; and (d) maintaining said plasma between said back side of said wafer and said cathode for a period of from about 10 second to about 3 minutes to form an oxide layer of from about 10 to about 30 Angstroms thickness on said back side of said semiconductor wafer.
Claim 19
Dependent Claim
29 words
The process of claim 15 wherein said oxidizing gas is selected from the class consisting of O 2 , N 2 O, O 3 , and CO 2 .
Claim 20
Dependent Claim
80 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a spaced distance from an electrode with the back side of said wafer facing said electrode (b) flowing a gas through said chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to treat said back side of the semiconductor wafer.
Claim 21
Dependent Claim
80 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a spaced distance from an electrode with the back side of said wafer facing said electrode (b) flowing a gas through said chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to treat said back side of the semiconductor wafer.
Claim 22
Dependent Claim
84 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a spaced distance from an electrode with the back side of said wafer facing said electrode; (b) flowing an inert gas through said chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to remove undesirable materials from said back side of the semiconductor wafer.
Claim 23
Dependent Claim
84 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a spaced distance from an electrode with the back side of said wafer facing said electrode; (b) flowing an inert gas through said chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to remove undesirable materials from said back side of the semiconductor wafer.
Claim 24
Dependent Claim
91 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a distance of from about 0.25 to about 1 inch from an electrode with the back side of said wafer facing said electrode; (b) flowing an inert gas through said chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to remove undesirable materials from said back side of the semiconductor wafer.
Claim 25
Dependent Claim
91 words
A process for treating the back side of a semiconductor wafer which comprises: (a) supporting a semiconductor wafer a distance of from about 0.25 to about 1 inch from an electrode with the back side of said wafer facing said electrode; (b) flowing an inert gas through said chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to remove undesirable materials from said back side of the semiconductor wafer.
Claim 26
Dependent Claim
121 words
A process for treating the back side of a semiconductor wafer to form a protective oxide layer thereon to inhibit subsequent deposition of undesirable materials on said back side of said wafer which comprises: (a) supporting a semiconductor wafer in a vacuum chamber at a spaced distance from an electrode with the back side of said wafer facing said electrode; (b) flowing an oxidizing gas into said vacuum chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to form an oxide layer of from about 10 to about 30 Angstroms thickness on said back side of said semiconductor wafer.
Claim 27
Dependent Claim
121 words
A process for treating the back side of a semiconductor wafer to form a protective oxide layer thereon to inhibit subsequent deposition of undesirable materials on said back side of said wafer which comprises: (a) supporting a semiconductor wafer in a vacuum chamber at a spaced distance from an electrode with the back side of said wafer facing said electrode; (b) flowing an oxidizing gas into said vacuum chamber at a rate of from about 50 to about 200 sccm; and (c) forming a plasma in the gap formed between said electrode and said back side of said wafer to form an oxide layer of from about 10 to about 30 Angstroms thickness on said back side of said semiconductor wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-08 | 1994-04-09 | 1994-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-08 | 1998-04-09 | 1998-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-08 | 2002-04-09 | 2002-10-09 | $7700.00 | Window Closed / Lapsed |