US4959848A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for the measurement of the thickness and concentration of elements in thin films by means of X-ray analysis
Assignee: AXIC Inc 2376 WALSHAVE SANTA CLARA CALIFORNIA 95051 A CA CORP
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Filing: 1987-12-16
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Granted: 1990-09-25
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Expires: 2007-12-16
Abstract
Abstract A device which measures both the thickness of a thin film and the concentration of selected elements within the thin film. An X-ray source is utilized to irradiate the thin film sample and two detectors, an energy dispersive detector and a wavelength dispersive detector, provide the film thickness and element concentration measurements respectively.
Inventors
- 👤 Lubomir Parobek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:56
CPC Classifications
G; G01; G01B; G01B15/00; G01B15/02; G01N; G01N23/00; G01N23/20; G01N23/207; G01N23/2076; G01N23/22; G01N23/223
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
258 words
An apparatus for the measurement of the thickness of a thin film disposed upon a substrate and the quantitative determination of certain elements within said thin film comprising: a housing formed from at least one wall defining an enclosed space; a window disposed within a wall of said housing and functioning to permit X-rays to pass therethrough; an X-ray source within said housing and oriented therewithin to cause x-rays to be directed through said window; a test sample holder disposed proximate said window and outside of said housing and functioning to hold a test sample outside of said housing in close proximity to said window such that said test sample will be irradiated by said X-rays; a first X-ray detection system being fixedly engaged within said housing and operable to detect X-rays emitted from atoms within said test sample through said window, said first X-ray detection system providing a measurement through the detection of a broad energy spectrum of X-rays from all emitting elements of said test sample; a second X-ray detection system being movably engaged within said housing and operable to detect X-rays emitted from said atoms within said test sample and passing through said window, said second X-ray system being turnable to detect X-rays of a selected narrow wavelength band for measurement; said measurement first said first X-ray detection system being utilized to determine the thickness of said thin film, and said measurement from said second X-ray detection system being utilized to provide a quantitative measurement of the content of particular elements within said thin film.
Claim 2
Independent Claim
258 words
An apparatus for the measurement of the thickness of a thin film disposed upon a substrate and the quantitative determination of certain elements within said thin film comprising: a housing formed from at least one wall defining an enclosed space; a window disposed within a wall of said housing and functioning to permit X-rays to pass therethrough; an X-ray source within said housing and oriented therewithin to cause x-rays to be directed through said window; a test sample holder disposed proximate said window and outside of said housing and functioning to hold a test sample outside of said housing in close proximity to said window such that said test sample will be irradiated by said X-rays; a first X-ray detection system being fixedly engaged within said housing and operable to detect X-rays emitted from atoms within said test sample through said window, said first X-ray detection system providing a measurement through the detection of a broad energy spectrum of X-rays from all emitting elements of said test sample; a second X-ray detection system being movably engaged within said housing and operable to detect X-rays emitted from said atoms within said test sample and passing through said window, said second X-ray system being turnable to detect X-rays of a selected narrow wavelength band for measurement; said measurement first said first X-ray detection system being utilized to determine the thickness of said thin film, and said measurement from said second X-ray detection system being utilized to provide a quantitative measurement of the content of particular elements within said thin film.
Claim 3
Dependent Claim
27 words
An apparatus as described in claim 1, further including an atmosphere of helium gas being disposed within said housing at a pressure slightly greater than atmospheric pressure.
Claim 4
Dependent Claim
37 words
An apparatus as described in claim 1 wherein said first X-ray detection system includes a first X-ray detector comprising an energy dispersive spectrometer (EDS) and a collimator that is disposed between said window and said first detector.
Claim 5
Dependent Claim
30 words
The apparatus as described in claim 1 wherein said second X-ray detection system includes a wavelength dispersive spectrometer (WDS) which detects X-rays of a selected wavelength according to Bragg's Law.
Claim 6
Dependent Claim
65 words
The apparatus as described in claim 4 wherein said wavelength dispersive spectrometer includes a crystal mountably engaged to a rotatable holder and wherein a first collimator is disposed between said window and said crystal; said second X-ray detection system including a second X-ray detector having a second collimator fixedly engaged thereto and oriented to pass X-rays diffracted from said crystal therethrough to said second detector.
Claim 7
Dependent Claim
51 words
The apparatus as described in claim 5 wherein said second X-ray detector and said second collimator are engaged to a rotatable arm, said, rotatable arm being operable to cause said second X-ray detector to sweep through an arc of 2Δθ whenever said crystal holder is rotated through an angle of Δθ.
Claim 8
Dependent Claim
58 words
The apparatus as described in claim 1 wherein said first detector is mounted within said housing at a relatively shallow angle with respect to the planar surface of said test sample, and wherein said second X-ray detection system is disposed within said housing at relatively large tunable angles with respect to the planar surface of said test sample.
Claim 9
Dependent Claim
18 words
The apparatus as described in claim 1 wherein a means is provided to air cool said X-ray source.
Claim 10
Dependent Claim
45 words
The apparatus as described in claim 8 wherein said X-ray source cooling means includes a heat-conducting member being engaged to said X-ray source at one end thereof and passing through said housing and being joined to a finned heat-radiating member at the other end thereof.
Claim 11
Dependent Claim
40 words
The apparatus as described in claim 1 wherein a calibrated sample is mountably engaged to said test sample holder; said test sample holder being operable to place said calibrated sample in position proximate said window for irradiation by said X-rays.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-24 | 1994-03-26 | 1994-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-24 | 1998-03-26 | 1998-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-24 | 2002-03-26 | 2002-09-25 | $7700.00 | Window Closed / Lapsed |