Patent US4959745A successfully refreshed from Google Patents.
US4959745A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Capacitor and method for producing the same
Assignee: Toshiba Corp
•
Filing: 1989-03-06
•
Granted: 1990-09-25
•
Expires: 2009-03-06
Abstract
Abstract A capacitor including a dielectric film of a metal oxide, in which two electrodes contact with the surfaces of the dielectric film, and at least one of the electrodes is a conductive metal compound to which oxygen is added. A method for producing the capacitor is also disclosed.
Inventors
- 👤 Kyoichi Suguro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 11:43
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H01; H01G; H01G4/00; H01G4/002; H01G4/005; H01G4/008; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
81 words
A capacitor comprising: a dielectric film of a metal oxide; and two electrodes contacting with surfaces of the dielectric film, wherein at least one of the electrodes comprises a conductive metal compound having a sufficient amount of added oxygen so as to reduce leakage current resistivity of said conductive metal compound to less than 1000 ohms·/cm, to reduce a crystal size of the electrode and to smooth surfaces of said electrodes contacting said dielectric film to restrict electric field concentration effect.
Claim 2
Dependent Claim
81 words
A capacitor comprising: a dielectric film of a metal oxide; and two electrodes contacting with surfaces of the dielectric film, wherein at least one of the electrodes comprises a conductive metal compound having a sufficient amount of added oxygen so as to reduce leakage current resistivity of said conductive metal compound to less than 1000 ohms·/cm, to reduce a crystal size of the electrode and to smooth surfaces of said electrodes contacting said dielectric film to restrict electric field concentration effect.
Claim 3
Dependent Claim
41 words
The capacitor of claim 1, wherein the conductive metal compound comprises at least one compound selected from the group consisting of nitrides, borides, carbides and silicides of titanium, zirconium, hafnium, niobium and tantalum, and silicides and nitrides of tungsten and molybdenum.
Claim 4
Dependent Claim
21 words
The capacitor of claim 1, wherein the metal oxide comprises at least one of tantalum, niobium, titanium, zirconium, hafnium or yttrium.
Claim 5
Independent Claim
96 words
A method for producing a capacitor having a metal oxide dielectric film disposed between a pair of electrodes, comprising: forming at least one of said electrodes with a conductive metal compound comprising at least one compound selected from the group consisting of nitrides, borides, carbides and silicides of titanium, zirconium, hafnium, niobium and tantalum, and silicides and nitrides of tungsten and molybdenum; and adding sufficient oxygen to the conductive metal compound during the formation of said electrode in order to prevent a reduction of oxygen included in the dielectric film during a high temperature treatment thereof.
Claim 6
Independent Claim
96 words
A method for producing a capacitor having a metal oxide dielectric film disposed between a pair of electrodes, comprising: forming at least one of said electrodes with a conductive metal compound comprising at least one compound selected from the group consisting of nitrides, borides, carbides and silicides of titanium, zirconium, hafnium, niobium and tantalum, and silicides and nitrides of tungsten and molybdenum; and adding sufficient oxygen to the conductive metal compound during the formation of said electrode in order to prevent a reduction of oxygen included in the dielectric film during a high temperature treatment thereof.
Claim 7
Dependent Claim
24 words
The method according to claim 4 further comprising subsequent to the formation of the electrodes, subjecting the resultant structure to a higher temperature treatment.
Claim 8
Independent Claim
128 words
A method for producing a capacitor having a metal oxide dielectric film disposed between a pair of electrodes such that the electrodes contact surfaces of the dielectric film, comprising: forming at least one of said electrodes with a conductive metal compound comprising at least one compound selected from the group consisting of nitrides, borides, carbides and silicides of titanium, zirconium, hafnium, niobium and tantalum, and silicides and nitrides of tungsten and molybdenum; and adding sufficient oxygen to the conductive metal compound during the formation of said electrode so as to reduce leakage current resistivity of the conductive metal compound to less than 1000 ohms/cm, to reduce crystal size of the electrodes and to smooth the surfaces of said electrodes contacting said dielectric film to restrict electric field concentration.
Claim 9
Independent Claim
128 words
A method for producing a capacitor having a metal oxide dielectric film disposed between a pair of electrodes such that the electrodes contact surfaces of the dielectric film, comprising: forming at least one of said electrodes with a conductive metal compound comprising at least one compound selected from the group consisting of nitrides, borides, carbides and silicides of titanium, zirconium, hafnium, niobium and tantalum, and silicides and nitrides of tungsten and molybdenum; and adding sufficient oxygen to the conductive metal compound during the formation of said electrode so as to reduce leakage current resistivity of the conductive metal compound to less than 1000 ohms/cm, to reduce crystal size of the electrodes and to smooth the surfaces of said electrodes contacting said dielectric film to restrict electric field concentration.
References Cited (Backward Citations)
US3274025A
Cited
US3579063A
Cited
US3819990A
Cited
US4464701A
Cited
JPS61265856A
Cited
US4784975A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-24 | 1994-03-26 | 1994-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-24 | 1998-03-26 | 1998-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-24 | 2002-03-26 | 2002-09-25 | $7700.00 | Window Closed / Lapsed |