Abstract The temperature of a surface undergoing a radiation assisted thermally driven process is sensed by observation of the thermal emission from that surface and used to control the process. In a preferred embodiment, the blue edge of the thermal emission spectral distribution is detected to determine the surface temperature of a workpiece during a process such as laser-assisted chemical vapor deposition, and used to control this temperature. The temperature measuring system has means for focusing workpiece thermal emission and defining the field of view, a spectrometer to separate shorter wavelength light from other spectral components of the thermal emission, and a photon-counting system to detect the shorter wavelength light and generate a surface temperature signal. Systems to determine surface temperature at a spot and along a line have an optical prism to disperse the thermal emission into component wavelengths, and a multichannel photon-counting detector comprised of an intensified photodetector array.
A method of controlling a radiation assisted chemical vapor deposition process comprising: delivering radiation to a portion of the surface of a workpiece to cause deposition of gaseous chemical reactants onto the workpiece by radiation heating; sensing the workpiece surface temperature resulting from said radiation by detecting thermal emission from said workpiece toward the short wavelength edge of the thermal emission spectrum and deriving therefrom a surface temperature signal; and utilizing the sensed surface temperature to control said radiation and deposition process.
Claim 2
Independent Claim
82 words
A method of controlling a radiation assisted chemical vapor deposition process comprising: delivering radiation to a portion of the surface of a workpiece to cause deposition of gaseous chemical reactants onto the workpiece by radiation heating; sensing the workpiece surface temperature resulting from said radiation by detecting thermal emission from said workpiece toward the short wavelength edge of the thermal emission spectrum and deriving therefrom a surface temperature signal; and utilizing the sensed surface temperature to control said radiation and deposition process.
Claim 3
Dependent Claim
34 words
The method of claim 1 wherein said radiation is laser radiation, and said utilizing comprises using said temperature signal to control a laser and laser beam power to produce a preselected workpiece surface temperature.