Patent US4959113A successfully refreshed from Google Patents.
US4959113A
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Method and composition for polishing metal surfaces
Assignee: DuPont Electronic Materials Holding Inc
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Filing: 1989-07-31
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Granted: 1990-09-25
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Expires: 2009-07-31
Abstract
Abstract The present invention relates to a method of polishing a metal surface using an aqueous polishing composition for metal surfaces comprising water, an abrasive agent, such as sluminum oxide, cerium oxide, zirconium oxide, tin oxide, silicon dioxide, silicon carbide, titanium dioxide and titanium carbide and a salt, or combination of salts, such as aluminum chloride, zirconyl nitrate, zirconyl sulfate, cerium nitrate, aluminum nitrate, aluminum bromide, aluminum iodide, aluminum chloride, zirconyl chloride, tin chloride, aluminum perchlorate, magnesium chloride, zinc chloride, magnesium perchlorate and iron chloride.
Inventors
- 👤 John V. H. Roberts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:47
CPC Classifications
C; C09; C09K; C09K3/00; C09K3/14; C23; C23F; C23F3/00; B; B24; B24B; B24B37/00; C09K3/1454; C09K3/1463
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
108 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt, wherein the salt is the reaction product of a reaction selected from the group consisting of a reaction between an acid and a base and a reaction between an acid and a metal, wherein the salt includes a cationic component and an anionic component, the cationic component being selected from the group consisting of ionized elements which will not deposit by electroless plating on the metal surface being polished; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 2
Independent Claim
108 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt, wherein the salt is the reaction product of a reaction selected from the group consisting of a reaction between an acid and a base and a reaction between an acid and a metal, wherein the salt includes a cationic component and an anionic component, the cationic component being selected from the group consisting of ionized elements which will not deposit by electroless plating on the metal surface being polished; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 3
Dependent Claim
34 words
A method according to claim 1, wherein the abrasive agent is selected from the group consisting of cerium oxide, aluminum oxide, zirconium oxide, tin oxide, silicon dioxide, silicon carbide, titanium dioxide and titanium carbide.
Claim 4
Dependent Claim
20 words
A method according to claim 2, wherein the abrasive agent comprises particles of about 20 microns or less in size.
Claim 5
Dependent Claim
33 words
A method according to claim 1, wherein the combined weight percent of the abrasive agent and the salt is from about 2% by weight to about 50% by weight of the polishing composition.
Claim 6
Dependent Claim
41 words
A method according to claim 1 wherein the cationic component of the salt comprises an ionized element selected from the group consisting of Groups IIA, IIIA, IVA and IVB of the periodic table of elements, zinc, cerium, tin and iron ions.
Claim 7
Dependent Claim
29 words
A method according to claim 1 wherein the anionic component of the salt is selected from the group consisting of chloride, bromide, iodide, nitrate, phosphate, sulfate and perchlorate ions.
Claim 8
Dependent Claim
15 words
A method according to claim 1 wherein the polishing composition comprises at least two salts.
Claim 9
Dependent Claim
25 words
A method according to claim 1, wherein the salt concentration is from about 0.1% by weight to about 50% by weight of the polishing composition.
Claim 10
Independent Claim
61 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt wherein the salt is formed in situ by adding an acid and a base to an aqueous slurry of the abrasive compound; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 11
Independent Claim
61 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt wherein the salt is formed in situ by adding an acid and a base to an aqueous slurry of the abrasive compound; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 12
Independent Claim
61 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt wherein the salt is formed in situ by adding a metal and an acid to an aqueous slurry of the abrasive compound; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 13
Independent Claim
61 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt wherein the salt is formed in situ by adding a metal and an acid to an aqueous slurry of the abrasive compound; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 14
Independent Claim
76 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt, wherein the salt is selected from the group consisting of aluminum bromide, aluminum chloride, aluminum iodide, zirconyl nitrate, zirconyl sulfate, cerium nitrate, aluminum nitrate, zirconyl chloride, tin chloride, aluminum perchlorate, magnesium chloride, zinc chloride and magnesium perchlorate; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 15
Independent Claim
76 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent and a salt, wherein the salt is selected from the group consisting of aluminum bromide, aluminum chloride, aluminum iodide, zirconyl nitrate, zirconyl sulfate, cerium nitrate, aluminum nitrate, zirconyl chloride, tin chloride, aluminum perchlorate, magnesium chloride, zinc chloride and magnesium perchlorate; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 16
Independent Claim
77 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent, a salt and an acid in an amount to adjust the pH of the polishing composition to about 1 to about 6, wherein the acid is selected from the group consisting of hydrochloric acid, nitric acid, phosphoric acid and sulfuric acid; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 17
Independent Claim
77 words
A method for polishing a metal surface comprising (a) providing an aqueous polishing composition comprising water, an abrasive agent, a salt and an acid in an amount to adjust the pH of the polishing composition to about 1 to about 6, wherein the acid is selected from the group consisting of hydrochloric acid, nitric acid, phosphoric acid and sulfuric acid; (b) applying the composition to a metal surface to be polished; and (c) polishing the metal surface.
Claim 18
Dependent Claim
53 words
An aqueous polishing composition for polishing a metal surface comprising water, an abrasive agent selected from the group consisting of aluminum oxide, cerium oxide, zirconium oxide, tin oxide, silicon dioxide, silicon carbide, titanium dioxide and titanium carbide, and a salt selected from the group consisting of magnesium chloride, aluminum nitrate and magnesium perchlorate.
Claim 19
Dependent Claim
53 words
An aqueous polishing composition for polishing a metal surface comprising water, an abrasive agent selected from the group consisting of aluminum oxide, cerium oxide, zirconium oxide, tin oxide, silicon dioxide, silicon carbide, titanium dioxide and titanium carbide, and a salt selected from the group consisting of magnesium chloride, aluminum nitrate and magnesium perchlorate.
Claim 20
Dependent Claim
12 words
A polishing composition according to claim 13 comprising at least two salts.
Claim 21
Dependent Claim
26 words
A polishing composition according to claim 13 wherein the salt concentration is from about 0.1% by weight to about 50% by weight of the polishing composition.
Claim 22
Dependent Claim
34 words
A polishing composition according to claim 13 wherein the combined weight percent of the abrasive agent and the salt is from about 2% by weight to about 50% by weight of the polishing composition.
Claim 23
Dependent Claim
32 words
A polishing composition according to claim 13 wherein the polishing composition further comprises an acid in an amount to adjust the pH of the polishing composition to about 1 to about 6.
Claim 24
Dependent Claim
26 words
A polishing composition according to claim 17 wherein the acid is selected from the group consisting of hydrochloric acid, nitric acid, phosphoric acid and sulfuric acid.
Claim 25
Dependent Claim
31 words
A method according to claim 7 wherein the two or more salts provide a synergistic polishing effect on the metal surface being polished compared to a method using a single salt.
Claim 26
Dependent Claim
32 words
A polishing composition according to claim 14 wherein the two or more salts provide a synergistic polishing effect on the metal surface being polished compared to a composition containing a single salt.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1993-09-24 | 1994-03-26 | 1994-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-24 | 1998-03-26 | 1998-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-24 | 2002-03-26 | 2002-09-25 | $7700.00 | Window Closed / Lapsed |