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US4958059A Expired / Lapsed US ⏱️ 0.0 years remaining

Electronic bombardment evaporator equipped with means to recover backscattered electrons

Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
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Filing: 1989-06-30
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Granted: 1990-09-18
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Expires: 2009-06-30
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Abstract

Abstract Electronic bombardment evaporator equipped with means to recuperate backscattered electrons by a target (14) submitted to a bombardment by an electronic beam (12) comprising means to collect the backscattered electrons, said means (26) being brought to a Vc potential so that the electrons backscattered by the target (14) are attracted by said means (26), and a power source (30) connected firstly to the means (26) to collect the backscattered electrons and polarizing them to the VC potential, and secondly to the main power source (18) of the electron gun (10), supplying the latter with the intensity Ic originating from the recuperation of the backscattered electrons.

Inventors

  • 👤 Jean-Francois Lizee

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 04:05
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 143 words
Electronic bombardment evaporator provided with means for recovering electrons backscattered by a target subjected to a bombardment by an electronic beam, said beam originating from an electron gun with an electrode connected to an output S1 of a first d.c. power source, said power source furnishing a negative potential Vo on its output S1, wherein it includes: means to collect said backscattered electrons, said means being brought to a potential Vc so that the electrons backscattered by the target are attracted by said means, a second d.c. power source connected via a first output S2 to the means to collect the backscattered electrons, said first output being brought to the potential Vc, the second power source being also connected via a second output S3 to the output S1 of the first power source, the second output S3 being brought to the potential Vo.
Claim 2
Dependent Claim 143 words
Electronic bombardment evaporator provided with means for recovering electrons backscattered by a target subjected to a bombardment by an electronic beam, said beam originating from an electron gun with an electrode connected to an output S1 of a first d.c. power source, said power source furnishing a negative potential Vo on its output S1, wherein it includes: means to collect said backscattered electrons, said means being brought to a potential Vc so that the electrons backscattered by the target are attracted by said means, a second d.c. power source connected via a first output S2 to the means to collect the backscattered electrons, said first output being brought to the potential Vc, the second power source being also connected via a second output S3 to the output S1 of the first power source, the second output S3 being brought to the potential Vo.
Claim 3
Dependent Claim 30 words
Evaporator according to claim 1, wherein the means to collect said backscattered electrons consist of a metal trapping cage recuperating any electron due to a backscattering occuring inside said cage.
Claim 4
Dependent Claim 12 words
Evaporator according to claim 2, wherein the trapping cage is a parallelpiped.

References Cited (Backward Citations)

US3244855A Cited
US3390249A Cited
US3467057A Cited
US3949187A Cited
US3876879A Cited
US4309589A Cited
US4262160A Cited
US4551844A Cited
US4760254A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-09-17 1994-03-19 1994-09-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-09-17 1998-03-19 1998-09-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-09-17 2002-03-19 2002-09-18 $7700.00 Window Closed / Lapsed

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