Patent US4957370A successfully refreshed from Google Patents.
US4957370A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for determining the degree of oxidation of an oxide coating
Assignee: Toshiba Corp
•
Filing: 1989-09-06
•
Granted: 1990-09-18
•
Expires: 2009-09-06
Abstract
Abstract A method and apparatus determines the thickness of a copper oxide coating of an object by measuring the quantity of light reflected from the object in at least two wavelength zones, and then determining a value for a relationship between those quantities, for example, the ratio or difference of those quantities. The value is then compared to a predetermined, regular correspondence between such values and copper oxide thicknesses to determine the object's copper oxide thickness.
Inventors
- 👤 Mamoru Tominaga
- 👤 Leo Mori
- 👤 Junetsu Akiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:58
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/25; G01N21/31; G01N21/314; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
149 words
An apparatus for determining the thickness of a layer of copper oxide on an object comprising: illumination means producing a light having a known spectral distribution; illuminating light guide means for directing said light from said illumination means onto said object; reflecting light guide means for directing reflections of said light from said object to a first area; filter means mounted in said first area for filtering said reflected light received from said reflecting light guide means into two wavelength zones; determining means for receiving said reflected light filtered by said filter means and for measuring the quantities of said reflected light in said two wavelength zones; and calculating means for calculating a value representing a relationship of said reflected light quantities, and for thereby determining the thickness of said copper oxide layer on said object from a predetermined correspondence between copper oxide thicknesses and values for said relationship.
Claim 2
Independent Claim
149 words
An apparatus for determining the thickness of a layer of copper oxide on an object comprising: illumination means producing a light having a known spectral distribution; illuminating light guide means for directing said light from said illumination means onto said object; reflecting light guide means for directing reflections of said light from said object to a first area; filter means mounted in said first area for filtering said reflected light received from said reflecting light guide means into two wavelength zones; determining means for receiving said reflected light filtered by said filter means and for measuring the quantities of said reflected light in said two wavelength zones; and calculating means for calculating a value representing a relationship of said reflected light quantities, and for thereby determining the thickness of said copper oxide layer on said object from a predetermined correspondence between copper oxide thicknesses and values for said relationship.
Claim 3
Dependent Claim
46 words
The apparatus of claim 1 wherein said illuminating means includes an incandescent light source and a reflective mirror mounted to direct light from said incandescent light source into said illuminating light guide means, and wherein both said illuminating and reflecting light guide means include optical fibers.
Claim 4
Dependent Claim
26 words
The apparatus of claim 2 further including a hot mirror mounted between said incadescent light source and said optical fiber in said illuminating light guide means.
Claim 5
Dependent Claim
51 words
The apparatus of claim 3 wherein said filter means includes a rotatable disk; two color filters mounted on said disk; and a motor coupled to said disk for rotating said color filters through said first area to intersect a path of said reflected light created by said reflecting light guide means.
Claim 6
Dependent Claim
25 words
The apparatus of claim 4 wherein said determining means includes a photodetector and wherein said calculating means includes a data processor coupled to said photodetector.
Claim 7
Dependent Claim
23 words
The apparatus of claim 5 further including means for transmitting information regarding the rate of rotation of said filters to said data processor.
Claim 8
Dependent Claim
57 words
The apparatus of claim 6 wherein said rate information transmitting means includes an LED and a second photodetector mounted on opposite sides of said rotating means, said rotatable disk also including at least one transparent portion located to allow light from said LED to strike said second photodetector at least once during each rotation of said filters.
Claim 9
Dependent Claim
24 words
The apparatus of claim 5 wherein said motor includes means, coupled to said data processor, for controlling the rate of rotation of said filters.
Claim 10
Dependent Claim
26 words
The apparatus of claim 4 wherein said two color filters are each sharp cut-off filters with transmission thresholds of approximately 500 nm and 630 nm, respectively.
Claim 11
Dependent Claim
81 words
The device of claim 1 wherein said filtering means includes: a first beam splitter having a first dichroic mirror splitting said reflected light into first and second beams; and a second beam splitter having a second dichroic mirror for splitting said second beam into third and fourth beams; wherein said determining means includes first through third photodetectors for receiving said first, third and fourth beams; and wherein said calculating means includes a data processor coupled to said first through third photodetectors.
Claim 12
Dependent Claim
74 words
The device of claim 1 wherein said filter means includes a color filter for filtering said reflected light and a beam splitter with a dichroic mirror for splitting said light reflections, after passing through color filter, into first and second beams; wherein said determining means includes first and second photodetectors mounted to receive said first and second beams; and wherein said calculating means includes a data processor coupled to said first and second photodetectors.
Claim 13
Dependent Claim
91 words
The device of claim 1 wherein said filter means includes a first color filter to filter said reflected light, a beam splitter with an archromatic coating layer for splitting said light reflections, after passing through said first color filter, into first and second beams, and a second color filter mounted in the light path of said first beam; wherein said determining means includes first and second photodetectors mounted to receive said first and second beams; and wherein said calculating means includes a data processor coupled to said first and second photodetectors.
Claim 14
Independent Claim
112 words
A system for testing manufacturing items coated with copper oxide comprising: means for applying a copper oxide coating to said items; means for moving said items through said copper oxide coating means; means for illuminating said items with light; means for determining the quantities of reflected light by said items in different wavelength zones after said items have passed through said applying means; and means, coupled to said determining means, for calculating a value representing a relationship between said quantities of reflected light and for thereby determining the thickness of said copper oxide coating of said items from a predetermined regular relationship between copper oxide coating thicknesses and values for said relationship.
Claim 15
Independent Claim
112 words
A system for testing manufacturing items coated with copper oxide comprising: means for applying a copper oxide coating to said items; means for moving said items through said copper oxide coating means; means for illuminating said items with light; means for determining the quantities of reflected light by said items in different wavelength zones after said items have passed through said applying means; and means, coupled to said determining means, for calculating a value representing a relationship between said quantities of reflected light and for thereby determining the thickness of said copper oxide coating of said items from a predetermined regular relationship between copper oxide coating thicknesses and values for said relationship.
Claim 16
Dependent Claim
24 words
The system of claim 13 wherein said calculating means includes means for calculating a value for the ratio of said quantities of reflected light.
Claim 17
Dependent Claim
24 words
The system of claim 13 wherein said calculating means includes means for calculating a value for the difference between said quantities of reflected light.
Claim 18
Dependent Claim
35 words
The device of claim 13 wherein said determining means includes two beam splitters, each with a dichroic mirror, for splitting said reflected light into three beams, and three photodetectors mounted to receive said three beams.
Claim 19
Dependent Claim
44 words
The device of claim 13 wherein said determining means includes a color filter mounted to filter said reflected light, a beam splitter with a dichroic mirror for splitting said filtered reflected light into two beams, and two photodetectors mounted to receive said two beams.
Claim 20
Dependent Claim
61 words
The device of claim 13 wherein said determining means includes a first color filter mounted to filter said reflected light, a beam splitter with an achromatic reflecting surface for splitting said filtered reflected light into two beams, a second color filter mounted in the light path of one of said two beams and two photodetectors mounted to receive said two beams.
Claim 21
Independent Claim
71 words
A method for determining the thickness of a copper oxide coating on an object comprising the steps of: measuring the quantity of light reflected by said object in different wavelength zones; calculating a value for a relationship between said quantities of reflected light; and comparing said value of said relationship to a predetermined regular correspondence between thickness values and relationship values thereby to determine the thickness of said copper oxide coating.
Claim 22
Independent Claim
71 words
A method for determining the thickness of a copper oxide coating on an object comprising the steps of: measuring the quantity of light reflected by said object in different wavelength zones; calculating a value for a relationship between said quantities of reflected light; and comparing said value of said relationship to a predetermined regular correspondence between thickness values and relationship values thereby to determine the thickness of said copper oxide coating.
Claim 23
Dependent Claim
25 words
The method of claim 19 wherein said calculating step includes the step of calculating a value for the ratio of said quantities of reflected light.
Claim 24
Dependent Claim
25 words
The method of claim 19 wherein said calculating step includes the step of calculating a value for the difference between said quantities of reflected light.
Claim 25
Independent Claim
73 words
A method for manufacturing items coated with copper oxide comprising the steps of: applying a copper oxide coating to said items; measuring the quantities of light reflected from said items in predetermined wavelength zones; calculating a value for the relationship between said quantities of reflected light; and determining the thickness of said copper oxide coating by comparing said value with a predetermined regular correspondence between values for thicknesses and values of said relationship
Claim 26
Independent Claim
73 words
A method for manufacturing items coated with copper oxide comprising the steps of: applying a copper oxide coating to said items; measuring the quantities of light reflected from said items in predetermined wavelength zones; calculating a value for the relationship between said quantities of reflected light; and determining the thickness of said copper oxide coating by comparing said value with a predetermined regular correspondence between values for thicknesses and values of said relationship
Claim 27
Independent Claim
116 words
An apparatus for determining the thickness of a layer of copper oxide coating on an object comprising: light means for illuminating said object with light; spectrum means for receiving the illuminating light reflected from said object and for separating the reflected light into at least three wavelength zones; determining means for measuring the quantities of said reflected light in each of said separate zones; and calculating means, coupled to said determining means, for calculating a value representing a relationship between said measured quantities of reflected light in said wavelength zones, and for thereby determining the thickness of the coating of said object from a predetermined regular correspondence between oxide coating thickness and values for said relationship.
Claim 28
Independent Claim
116 words
An apparatus for determining the thickness of a layer of copper oxide coating on an object comprising: light means for illuminating said object with light; spectrum means for receiving the illuminating light reflected from said object and for separating the reflected light into at least three wavelength zones; determining means for measuring the quantities of said reflected light in each of said separate zones; and calculating means, coupled to said determining means, for calculating a value representing a relationship between said measured quantities of reflected light in said wavelength zones, and for thereby determining the thickness of the coating of said object from a predetermined regular correspondence between oxide coating thickness and values for said relationship.
Claim 29
Dependent Claim
18 words
The apparatus of claim 23 wherein said wavelength zones are separated by borders at approximately 500nm and 630nm.
References Cited (Backward Citations)
US3017512A
Cited
US3737237A
Cited
US3960451A
Cited
US4095881A
Cited
DE2909400A1
Cited
EP0011723A1
Cited
JPS56101505A
Cited
US4405989A
Cited
JPS57166547A
Cited
JPS5830605A
Cited
JPS601563A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-17 | 1994-03-19 | 1994-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-17 | 1998-03-19 | 1998-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-17 | 2002-03-19 | 2002-09-18 | $7700.00 | Window Closed / Lapsed |