US4955692A
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Quasi-periodic layered structures
Assignee: BOARD OF REGENTS ACTING FOR AND ON BEHALF OF UNIVERSITY OF MICHIGAN A CONSTITUTIONAL Corp OF MI
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Filing: 1986-08-19
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Granted: 1990-09-11
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Expires: 2006-08-19
Abstract
Abstract A quasi-periodic sequence of a plurality of types of layers is produced by selecting successive subsequences of the layers in response to at least one prior subsequence of the layers and a predetermined substitution matrix. In one specific illustrative embodiment, the substitution matrix is such that each successive term of a series corresponds to a Fibonacci sequence. Quasi-periodic structures produced in accordance with the present invention are produced simply and inexpensively without the need for very stringent manufacturing tolerances and controls. Optical embodiments of the invention yield highly desirable characteristics with respect to incident radiation in the ranges of X-rays, ultaviolet, and visible light. Additionally, electrical devices having unusual electrical characteristics can be produced.
Inventors
- 👤 Roberto Merlin
- 👤 Roy Clarke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:26
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/81; H10D62/815; H10D62/8161; H10D62/8162; H10D62/8164; G; G02; G02B; G02B1/00; G02B1/10; G02B6/00; G02B6/02
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
237 words
A process of making an optical coating for reflecting x-ray energy having a predetermined wavelength characteristic, the optical coating being formed of a respective plurality of each of n types of thin film layers, the process comprising the steps of: first defining the n types of thin film layers, where n is an integer having a value which is at least three, each of the n types of thin film layers being characterized by a respective predetermined thickness in the range of approximately between 5Å and 5000Å and corresponding substantially to the predetermined wavelength characteristic of the x-ray energy; second defining a selection matrix having n columns by n rows, said selection matrix having a non-zero determinant and a first element equal to unity, for determining a quasi-periodic sequence of said n types of layers; and applying a respective plurality of the n types of thin film layers, said application of said pluralities of said n types of the thin film layers being performed so that respective ones of the n types of the thin film layers are interleaved in accordance with a predetermined sequence of groupings of the thin film layers, each grouping in said predetermined sequence of groupings being configured in response to the configuration of a sequence of a prior grouping of the thin film layers, and in response to said selection matrix which defines the configuration of the sequence of each subsequent grouping.
Claim 2
Dependent Claim
237 words
A process of making an optical coating for reflecting x-ray energy having a predetermined wavelength characteristic, the optical coating being formed of a respective plurality of each of n types of thin film layers, the process comprising the steps of: first defining the n types of thin film layers, where n is an integer having a value which is at least three, each of the n types of thin film layers being characterized by a respective predetermined thickness in the range of approximately between 5Å and 5000Å and corresponding substantially to the predetermined wavelength characteristic of the x-ray energy; second defining a selection matrix having n columns by n rows, said selection matrix having a non-zero determinant and a first element equal to unity, for determining a quasi-periodic sequence of said n types of layers; and applying a respective plurality of the n types of thin film layers, said application of said pluralities of said n types of the thin film layers being performed so that respective ones of the n types of the thin film layers are interleaved in accordance with a predetermined sequence of groupings of the thin film layers, each grouping in said predetermined sequence of groupings being configured in response to the configuration of a sequence of a prior grouping of the thin film layers, and in response to said selection matrix which defines the configuration of the sequence of each subsequent grouping.
Claim 3
Dependent Claim
19 words
The process of claim 1 wherein said n types of the thin film layers are formed of different materials.
Claim 4
Dependent Claim
20 words
The process of claim 2 wherein at least first and second ones of said thicknesses are equal to one another.
Claim 5
Dependent Claim
24 words
The process of claim 1 wherein at least first and second types of the thin film layers are formed of GaAs and AlAs, respectively.
Claim 6
Dependent Claim
37 words
The process of claim 1 wherein said predetermined thicknesses of said thin film layers are selected to achieve a predetermined reflection-absorption characteristic of the x-ray reflective optical coating in a selected frequency range of the x-ray energy.
Claim 7
Independent Claim
121 words
A method of making an x-ray reflective optical coating of the type having a plurality of each of n types of thin film layers, where n is an integer having a value greater than or equal to three, the n types of thin film layers being arranged in an interleaved layer sequence, the sequence being characterized by being determined in response to a predetermined n×n layer sequence selection matrix formed of positive matrix elements whereby successive sub-sequences of said thin film layers are selected to form said layer sequence in response to a prior sub-sequence and to said n×n layer sequence selection matrix, said n×n layer sequence selection matrix having a non-zero determinant and a first matrix element equal to unity.
Claim 8
Independent Claim
121 words
A method of making an x-ray reflective optical coating of the type having a plurality of each of n types of thin film layers, where n is an integer having a value greater than or equal to three, the n types of thin film layers being arranged in an interleaved layer sequence, the sequence being characterized by being determined in response to a predetermined n×n layer sequence selection matrix formed of positive matrix elements whereby successive sub-sequences of said thin film layers are selected to form said layer sequence in response to a prior sub-sequence and to said n×n layer sequence selection matrix, said n×n layer sequence selection matrix having a non-zero determinant and a first matrix element equal to unity.
Claim 9
Independent Claim
101 words
A method of forming a multilayer, x-ray reflective structure, the method comprising the steps of: defining a predetermined characteristic for each of n types of thin film layers, where n is an integer having a value of at least three; defining a predetermined n×n substitution matrix for specifying successive sequences of said n types of thin film layers, said substitution matrix having a non-zero determinant; and depositing a respective plurality of each of said n types of thin film layers in an interleaved manner having a sequence of said thin film layers which is responsive to said predetermined n×n substitution matrix.
Claim 10
Independent Claim
101 words
A method of forming a multilayer, x-ray reflective structure, the method comprising the steps of: defining a predetermined characteristic for each of n types of thin film layers, where n is an integer having a value of at least three; defining a predetermined n×n substitution matrix for specifying successive sequences of said n types of thin film layers, said substitution matrix having a non-zero determinant; and depositing a respective plurality of each of said n types of thin film layers in an interleaved manner having a sequence of said thin film layers which is responsive to said predetermined n×n substitution matrix.
Claim 11
Dependent Claim
24 words
The method of claim 7 wherein said characteristic of at least one of said n types of thin film layers corresponds to layer thickness.
Claim 12
Dependent Claim
25 words
The method of claim 7 wherein said characteristic of at least one of said n types of thin film layers corresponds to a layer material.
Claim 13
Dependent Claim
28 words
The method of claim 7 wherein said characteristic of at least one of said n types of thin film layers corresponds to a predetermined combination of layer materials.
Claim 14
Dependent Claim
14 words
The method of claim 7 wherein said step of depositing comprises deposition by sputtering.
Claim 15
Dependent Claim
16 words
The method of claim 7 wherein said step of depositing comprises deposition by molecular beam epitaxy.
Claim 16
Dependent Claim
14 words
The method of claim 7 wherein said step of depositing comprises deposition by metallization.
Claim 17
Dependent Claim
13 words
The method of claim 7 wherein said step of depositing comprises aerosol deposition.
Claim 18
Dependent Claim
15 words
The method of claim 7 wherein said step of depositing comprises a layer growth technique.
Claim 19
Dependent Claim
14 words
The method of claim 7 wherein said step of depositing comprises chemical vapor deposition.
Claim 20
Dependent Claim
14 words
The method of claim 7 wherein said step of depositing comprises liquid phase epitaxy.
References Cited (Backward Citations)
US4189205A
Cited
US4431258A
Cited
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